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Nano-VCSEL device and fabrication thereof using nano-colonnades

  • US 7,400,665 B2
  • Filed: 03/21/2005
  • Issued: 07/15/2008
  • Est. Priority Date: 11/05/2004
  • Status: Active Grant
First Claim
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1. A nano-colonnade vertical cavity surface emitting laser (VCSEL) device comprising:

  • a first layer having a (111) horizontal surface;

    a second layer;

    an insulator support between the first layer and the second layer that separates the first layer from the second layer, a portion of the second layer overhanging the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer;

    a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface of the overhanging portion; and

    distributed Bragg mirrors adjacent to opposite ends of the nanowire column.

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