Automated test and characterization web services

• US 7,401,275 B1
• Filed: 03/28/2005
• Issued: 07/15/2008
• Est. Priority Date: 03/28/2005
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Smith, Duane, Krishnaiah-Felton, Roopa, Sarmiento, Jaime, Ku, Tina Pai-Lin, Ballintine, Paul Ronald, Hsu, Gean
• Primary Examiner(s): TU, CHRISTINE TRINH LE
• Application Number:
  US11/093,094
• Time in Patent Office: 1,205 Days
• Field of Search: None
• US Class Current: 714/724
• CPC Class Codes: G05B 19/41875 characterised by quality surveillance of production
• CPC Class Codes: G05B 2219/32197 Inspection at different locations, stages of manufacturing
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling the plasma cluster tool during production. The testing arrangement includes a data manager module for obtaining, via a computer network, specification data pertaining to a component of the plasma cluster tool. The testing arrangement further includes a test manager module configured to provide a set of tests for testing the component, the set of tests incorporating data obtained in the specification data. The testing arrangement additionally includes a SCS interface engine configured to communicate the set of tests with the system control software of the plasma cluster tool, thereby enabling the SCS to execute at least a test in the set of tests to test the component.

Claims

1. A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling said plasma cluster tool during production, the testing arrangement comprising:

a data manager module for obtaining, via a computer network, specification data pertaining to a component of said plasma cluster tool, said specification data including at least simulation data for simulating operation of other possible hardware components of said plasma cluster tool other than said component of said plasma cluster tool;

a test manager module configured to provide a set of tests for testing said component, said set of tests incorporating data obtained in said specification data; and

a SCS interface engine configured to communicate said set of tests with said system control software of said plasma cluster tool, thereby enabling said SCS to execute at least a test in said set of tests to test said component of said plasma cluster tool, said test including at least simulated operation of said other possible hardware components of said plasma cluster tool according to said specification data.

2. The testing arrangement of claim 1 wherein said component of said plasma cluster tool represents at least one of a TCP match, a bias match, a gas box, a bias electrode, and a top plate of a process module of said plasma cluster tool.

3. The testing arrangement of claim 1 wherein said SCS interface engine, said SCS, said data manager, and said test manager reside on a same host computer, said host computer connected to a computer, said computer configured to control said component of said plasma cluster tool.

4. The testing arrangement of claim 1 further comprising a second data manager, a second test manager, and a second SCS interface engine for testing a second component of said plasma cluster tool.

5. The testing arrangement of claim 1 wherein said specification data further includes at least a plasma processing recipe and a capacitance range, said recipe retrieved from a file server, said capacitance range retrieved from a database.

6. The testing arrangement of claim 1 wherein said test manager is configured to be shut down when results of said test are unloaded to a web service.

7. The testing arrangement of claim 1 wherein said other possible hardware components of said plasma cluster tool do not exist in said plasma cluster tool when said component of said plasma cluster tool is tested.

8. The testing arrangement of claim 1 wherein said specification data is obtained from a computer internal to an IT infrastructure of a manufacturer of said plasma cluster tool.

9. The testing arrangement of claim 8 wherein said computer internal to said IT infrastructure is accessible only after proper authentication.

10. The testing arrangement of claim 1 further comprising means for archiving test results on a database managed within an IT infrastructure of a manufacturer of said plasma cluster tool.

11. A method for testing a plasma cluster tool, comprising:

obtaining, via a computer network, specification data pertaining to a component of said plasma cluster tool, said specification data including at least simulation data for simulating operation of other possible hardware components of said plasma cluster tool other than said component of said plasma cluster tool;

providing a set of tests for testing said component of said plasma cluster tool, said set of tests incorporating data obtained in said specification data;

communicating said set of tests with a system control software of said plasma cluster tool to enable said system control software to execute at least a test in said set of tests to test said component of said plasma cluster tool; and

performing said test, said test including at least simulated operation of said other possible hardware components of said plasma cluster tool according to said specification data.

12. The method of claim 11 wherein said other possible hardware components of said plasma cluster tool includes one or more of a TCP match, a bias match, a gas box, a bias electrode, a top plate, a vacuum transfer module, an atmospheric transfer module.

13. The method of claim 11 further comprising receiving user input pertaining to identification of said component of said plasma cluster tool.

14. The method of claim 11 further comprising receiving user input pertaining to options specific to said component of said plasma cluster tool.

15. The method of claim 11 further comprising receiving user selection of one or more test scenarios.

16. The method of claim 15 further comprising:

shutting down a software module configured for receiving said user selection of said one or more scenarios; and

after said shutting down said software module, unloading results of said test to a web service.

17. The method of claim 11 wherein said system control software reside on a host computer configured to control said plasma cluster tool during production.

18. The method of claim 11 wherein said other possible hardware components of said plasma cluster tool do not exist in said plasma cluster tool when said component of said plasma cluster tool is tested.

19. The method of claim 11 wherein said specification data is obtained from a computer internal to an IT infrastructure of a manufacturer of said plasma cluster tool.

20. A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling said plasma cluster tool during production, comprising:

means for obtaining, via a computer network, specification data pertaining to a component of said plasma cluster tool, said specification data including at least simulation data for simulating operation of other possible hardware components of said plasma cluster tool other than said component of said plasma cluster tool;

means for providing a set of tests for testing said component of said plasma cluster tool, said set of tests incorporating data obtained in said specification data; and

means for providing said set of tests with said system control software of said plasma cluster tool, thereby enabling said SCS to execute at least a test in said set of tests to test said component of said plasma cluster tool, said test including at least simulated operation of said other possible hardware components of said plasma cluster tool according to said specification data.

21. The testing arrangement of claim 20 wherein said other possible hardware components of said plasma cluster tool do not exist in said plasma cluster tool when said component of said plasma cluster tool is tested.

22. The testing arrangement of claim 20 wherein said specification data is obtained from a computer internal to an IT infrastructure of a manufacturer of said plasma cluster tool.