Pressure sensor with integrated structure
First Claim
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1. Pressure sensor with an integrated structure comprising:
- a silicon die, having an upper surface including at least an upper edge and an inner face, and an outer surface on which piezoresistors are comprised, wherein at least the inner face of the die is in contact with a fluid the pressure of which is to be measured;
a support having an upper surface, a thickness and a recessed seat in the thickness, the recessed seat adapted to receive the entire die, wherein the recessed seat and the die have the same profile; and
a container including the support;
wherein said die is integrated into the recessed seat in the thickness of the support.
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Abstract
Pressure sensor with an integrated structure comprising a support (33, 133, 233) and a silicon die (11), which lies substantially on the same plane as the upper surface (37, 137, 237) of the support and is integrated in a seat (34, 134, 234) made in the thickness of the support. On the inside face (23) of the die (11), in contact with the fluid the pressure of which has to be measured, is a protective layer.
24 Citations
14 Claims
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1. Pressure sensor with an integrated structure comprising:
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a silicon die, having an upper surface including at least an upper edge and an inner face, and an outer surface on which piezoresistors are comprised, wherein at least the inner face of the die is in contact with a fluid the pressure of which is to be measured; a support having an upper surface, a thickness and a recessed seat in the thickness, the recessed seat adapted to receive the entire die, wherein the recessed seat and the die have the same profile; and a container including the support; wherein said die is integrated into the recessed seat in the thickness of the support. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification