Integrated micro electro-mechanical system and manufacturing method thereof
First Claim
1. A manufacturing method of an integrated micro electro-mechanical system, in which a micro machine formed by using a manufacturing technology of a semiconductor integrated circuit and a semiconductor integrated circuit are formed on a semiconductor substrate, said method comprising the steps of:
- (a) forming a mechanical structure which is a part of said micro machine, said mechanical structure including a fixed part which is elastically un-deformable and fixed to an interlayer dielectric layer, a movable part which is movable in a cavity, and an elastically deformable part which connects said fixed part with said movable part, a width of said fixed part is wider than a width of said elastically deformable part in plan view;
(b) forming the interlayer dielectric layer covering said mechanical structure, said interlayer dielectric layer being formed as a part of an interconnect of said semiconductor integrated circuit;
(c) forming said cavity in which said mechanical structure is placed by forming a film having holes on said interlayer dielectric layer which covers said mechanical structure and etching said interlayer dielectric layer around said mechanical structure through said holes to form said cavity; and
(d) sealing said cavity by sealing only said holes, wherein said step (a), said step (b), said step (c) and said step (d) are performed by using a technology for forming an interconnect of said semiconductor integrated circuit.
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Accused Products
Abstract
In the manufacturing technology of an integrated MEMS in which a semiconductor integrated circuit (CMOS or the like) and a micro machine are monolithically integrated on a semiconductor substrate, a technology capable of manufacturing the integrated MEMS without using a special process different from the normal manufacturing technology of a semiconductor integrated circuit is provided. A MEMS structure is formed together with an integrated circuit by using the CMOS integrated circuit process. For example, when forming an acceleration sensor, a structure composed of a movable mass, an elastic beam and a fixed beam is formed by using the CMOS interconnect technology. Thereafter, an interlayer dielectric and the like are etched by using the CMOS process to form a cavity. Then, fine holes used in the etching are sealed with a dielectric.
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Citations
10 Claims
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1. A manufacturing method of an integrated micro electro-mechanical system, in which a micro machine formed by using a manufacturing technology of a semiconductor integrated circuit and a semiconductor integrated circuit are formed on a semiconductor substrate, said method comprising the steps of:
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(a) forming a mechanical structure which is a part of said micro machine, said mechanical structure including a fixed part which is elastically un-deformable and fixed to an interlayer dielectric layer, a movable part which is movable in a cavity, and an elastically deformable part which connects said fixed part with said movable part, a width of said fixed part is wider than a width of said elastically deformable part in plan view; (b) forming the interlayer dielectric layer covering said mechanical structure, said interlayer dielectric layer being formed as a part of an interconnect of said semiconductor integrated circuit; (c) forming said cavity in which said mechanical structure is placed by forming a film having holes on said interlayer dielectric layer which covers said mechanical structure and etching said interlayer dielectric layer around said mechanical structure through said holes to form said cavity; and (d) sealing said cavity by sealing only said holes, wherein said step (a), said step (b), said step (c) and said step (d) are performed by using a technology for forming an interconnect of said semiconductor integrated circuit. - View Dependent Claims (2, 3, 5, 6, 7, 8, 9, 10)
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4. A manufacturing method of an integrated micro electro-mechanical system in which a micro machine formed by using a manufacturing technology of a semiconductor integrated circuit and a semiconductor integrated circuit are formed on a semiconductor substrate, said method comprising:
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(a) forming a mechanical structure which is a part of said micro machine; (b) forming an interlayer dielectric layer which covers said mechanical structure, said interlayer dielectric being formed between interconnects of said semiconductor integrated circuit; (c) forming a cavity in which said mechanical structure by forming a film having holes on said interlayer dielectric layer which covers said mechanical structure and etching said interlayer dielectric layer around said mechanical structure through said holes to form said cavity; and (d) sealing said cavity by sealing said holes, wherein said step (a), said step (b), said step (c) and said step (d) are performed by using a technology for forming an interconnect of a MOSFET, wherein said step (c) includes the steps of; (c1) forming a film having first holes and a second hole larger than said first holes therein on said interlayer dielectric; (c2) forming said cavity by etching said interlayer dielectric around said mechanical structure through said first holes and said second hole; (c3) filling said first holes with a dielectric while keeping said second hole open; and (c4) removing said dielectric formed by said step (c3) on said mechanical structure, wherein, in said step (d), said second hole is sealed.
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Specification