Structured silicon anode
First Claim
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1. An energy storage device comprising:
- an anode comprising an array of sub-micron silicon structures supported on a silicon substrate; and
a cathode comprising lithium, arranged to form a battery.
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Abstract
A silicon/lithium battery can be fabricated from a silicon substrate. This allows the battery to be produced as an integrated unit on a chip. The battery includes a silicon anode formed from sub-micron diameter pillars of silicon fabricated on an n-type silicon wafer. The battery also includes a cathode including lithium.
146 Citations
15 Claims
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1. An energy storage device comprising:
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an anode comprising an array of sub-micron silicon structures supported on a silicon substrate; and a cathode comprising lithium, arranged to form a battery. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A battery including a silicon anode comprising:
- an array of sub-micron silicon pillars fabricated on a silicon substrate; and
a lithium cathode, wherein a compound film is formed on the silicon pillars in a charging step. - View Dependent Claims (13, 14)
- an array of sub-micron silicon pillars fabricated on a silicon substrate; and
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15. An electrode for a battery comprising sub-micron silicon pillars supported on a silicon substrate and arranged to form a battery with a lithium cathode and a lithium-based electrolyte.
Specification