Membrane probing system

• US 7,403,025 B2
• Filed: 08/23/2006
• Issued: 07/22/2008
• Est. Priority Date: 02/25/2000
• Status: Expired due to Fees

• Current Assignee: FormFactor Beaverton, Inc. (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Smith, Kenneth R., Koxxy, Martin J., Cowan, Clarence E., Tervo, Paul A., Dauphinais, Mike P.
• Primary Examiner(s): Gutierrez; Diego
• Assistant Examiner(s): ZHU, JOHN X
• Application Number:
  US11/509,176
• Publication Number:
  US 20060284630A1
• Time in Patent Office: 699 Days
• Field of Search: 324754-758, 324/761, 324/765, 324627-628, 324/688
• US Class Current: 324/755.09
• CPC Class Codes: G01R 1/06772 High frequency probes
• CPC Class Codes: G01R 1/0735 arranged on a flexible frame or film
• CPC Class Codes: G01R 31/2889 Interfaces, e.g. between probe and tester G01R31/31905 and G01R1/07364 take precedence

Abstract

A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal conductor located between a pair of spaced apart guard conductors. The guard conductors of the probe card are electrically interconnected proximate the interconnection between the probe card and the membrane assembly. The guard conductors of the membrane assembly are electrically interconnected proximate the interconnection between the probe card and the membrane assembly.

Claims

1. A membrane probing assembly comprising:

(a) a probe card with conductors supported thereon, including;

(i) an elongate probe card signal conductor including an end portion and a first portion having a first edge and a second edge; and

(ii) a probe card guard conductor comprising a first portion spaced apart from said first edge of said first portion of said probe card signal conductor, a second portion spaced apart from said second edge of said first portion of said probe signal conductor and a third portion interconnecting said first and said second portions of said probe guard conductor proximate to, but spaced apart from said end portion of said probe card signal conductor; and

(b) a membrane assembly including a membrane supporting;

(i) an elongate membrane signal conductor including an end portion and a first portion having a first edge and a second edge; and

(ii) a membrane guard conductor comprising a first portion spaced apart from said first edge of said first portion of said membrane signal conductor, a second portion spaced apart from said second edge of said first portion of said membrane signal conductor and a third portion interconnecting said first and said second portions of said membrane guard conductor proximate to, but spaced apart from said end portion of said membrane signal conductor.

2. The membrane probing assembly of claim 1 wherein said membrane signal conductor includes a portion in conductive contact with said probe card signal conductor and said membrane guard conductor includes a portion in conductive contact with said probe card guard conductor.

3. The membrane probing assembly of claim 2 wherein said portion of said membrane guard conductor in contact with said probe card guard conductor contacts said probe card guard conductor at a location nearer said first edge of said first portion of said probe card signal conductor than said second edge of said first portion of said probe card signal conductor.

4. The membrane probing assembly of claim 1 wherein at least one of said first portion and said third portion of said probe guard conductor further comprises a contact region arranged for conductive contact with a portion of said membrane guard conductor, said contact region having a first edge proximate said probe card signal conductor and a second edge more remote from said probe card signal conductor than either edge of said first portion of said probe card guard conductor.

5. The membrane probing assembly of claim 1 further comprising:

(a) a second elongate probe card signal conductor supported by said probe card, said second probe card signal conductor terminating proximate to, but spaced apart from said end portion of said probe card signal conductor and comprising a portion interposed between, and spaced apart from, said second edge of said probe card signal conductor and said probe card guard conductor; and

(b) a second elongate membrane signal conductor supported by said membrane, said second membrane signal conductor terminating proximate to, but spaced apart from said end portion of said membrane signal conductor and comprising a portion interposed between, and spaced apart from, said second edge of said membrane signal conductor and said membrane guard conductor.

6. The membrane probing assembly of claim 5 wherein said membrane signal conductor includes a portion in conductive contact with said probe card signal conductor;

said second membrane signal conductor includes a portion in conductive contact with said second probe card signal conductor; and

said membrane guard conductor includes a portion in conductive contact with said probe card guard conductor.