Optical scanning device and method of manufacturing the same
First Claim
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1. An optical scanning device, comprising:
- a plurality of drive electrodes formed on a substrate of an oscillation mirror for driving the oscillation mirror, the drive electrodes being arranged in perpendicular and parallel directions with respect to a torsion rotational axis; and
a plurality of external electrodes of the drive electrodes that are formed on the substrate at a same height and a same side,wherein the external electrodes are integrally formed on a side of the substrate of the oscillation mirror against which side a base substrate including a lead terminal is positioned.
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Abstract
An optical scanning device is disclosed that is manufactured through a simple mounting process and is provided with a hermetically sealed oscillation space for an oscillation mirror. The optical scanning device includes plural drive electrodes for driving the oscillation mirror and plural external electrodes of the drive electrodes that are formed at the same height.
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Citations
23 Claims
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1. An optical scanning device, comprising:
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a plurality of drive electrodes formed on a substrate of an oscillation mirror for driving the oscillation mirror, the drive electrodes being arranged in perpendicular and parallel directions with respect to a torsion rotational axis; and a plurality of external electrodes of the drive electrodes that are formed on the substrate at a same height and a same side, wherein the external electrodes are integrally formed on a side of the substrate of the oscillation mirror against which side a base substrate including a lead terminal is positioned. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12)
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2. An optical scanning apparatus comprising:
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an optical scanning device including a plurality of drive electrodes formed on a substrate of an oscillation mirror for driving the oscillation mirror, the drive electrodes being arranged in perpendicular and parallel directions with respect to a torsion rotational axis; and a plurality of external electrodes of the drive electrodes that are formed on the substrate at a same height and a same side, wherein the external electrodes are integrally formed on a side of the substrate of the oscillation mirror against which side a base substrate including a lead terminal is positioned; and a drive voltage generating device that generates a voltage of a predetermined frequency and applies the generated voltage to the optical scanning device to drive the oscillation mirror, the predetermined frequency corresponding to a frequency band in the vicinity of a resonance frequency of the oscillation mirror and outside a peak range of the resonance frequency.
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3. An imaging apparatus comprising:
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an optical scanning device including a plurality of drive electrodes formed on a substrate of an oscillation mirror for driving the oscillation mirror, the drive electrodes being arranged in perpendicular and parallel directions with respect to a torsion rotational axis; and a plurality of external electrodes of the drive electrodes that are formed on the substrate at a same height and a same side, wherein the external electrodes are integrally formed on a side of the substrate of the oscillation mirror against which side a base substrate including a lead terminal is positioned; a photoconductor on which an electrostatic image is formed by the optical scanning device; a developing unit that develops a toner image based on the electrostatic image; and a transfer unit that transfers the toner image onto a recording medium.
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13. A method of manufacturing an optical scanning device that includes an oscillation mirror formed on a substrate of the oscillation mirror as an optical beam deflector, the method comprising a step of:
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forming a plurality of external electrodes of a plurality of drive electrodes of the oscillation mirror on the substrate at a same height and on a same side, wherein the external electrodes are integrally formed on a side of the substrate of the oscillation mirror against which side a base substrate including a lead terminal is positioned. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification