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Optical scanning device and method of manufacturing the same

  • US 7,403,317 B2
  • Filed: 03/09/2005
  • Issued: 07/22/2008
  • Est. Priority Date: 03/10/2004
  • Status: Expired due to Fees
First Claim
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1. An optical scanning device, comprising:

  • a plurality of drive electrodes formed on a substrate of an oscillation mirror for driving the oscillation mirror, the drive electrodes being arranged in perpendicular and parallel directions with respect to a torsion rotational axis; and

    a plurality of external electrodes of the drive electrodes that are formed on the substrate at a same height and a same side,wherein the external electrodes are integrally formed on a side of the substrate of the oscillation mirror against which side a base substrate including a lead terminal is positioned.

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