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Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements

  • US 7,403,324 B2
  • Filed: 01/25/2006
  • Issued: 07/22/2008
  • Est. Priority Date: 06/19/1995
  • Status: Expired due to Term
First Claim
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1. A spatial light modulator comprising:

  • an array of deflectable and reflective mirror plates disposed on the light transmissive substrate, wherein each mirror plate comprises;

    a reflective layer;

    a plurality of light transmissive layers of different refraction indices to visible light for enhancing reflectivity of the mirror plate, wherein the plurality of light transmissive layers are contiguous;

    a first portion; and

    a second portion such that during deflection of each mirror plate, the second portion moves towards a light transmissive substrate as the first portion moves away from the light transmissive substrate.

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