Method and system for centrally-controlled semiconductor wafer correlation

• US 7,403,864 B2
• Filed: 11/06/2006
• Issued: 07/22/2008
• Est. Priority Date: 11/06/2006
• Status: Expired due to Fees

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Huo, Hsing Ya, Hsieh, Chung-Lin, Yen-Ni, Yang, Lee, Tsung-Yu
• Primary Examiner(s): Barlow, Jr.; John E
• Assistant Examiner(s): KHUU, HIEN DIEU THI
• Application Number:
  US11/556,724
• Publication Number:
  US 20080106278A1
• Time in Patent Office: 624 Days
• Field of Search: 702/81
• US Class Current: 702/81
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875

Abstract

A centrally-controlled correlation system for testing a correlation wafer and comparing the testing results with the wafer'"'"'s reference data that has been determined previously. The testing instructions and the correlation criteria are stored and transmitted from a central database. Such centrally-controlled correlation system improves the reliability of the correlation results and reduces the time to correlate a correlation wafer.

Claims

1. A system for wafer correlation, wherein a correlation wafer is tested and its testing results are compared to its previously-determined reference data, the system comprising:

a database operable to store testing instructions for testing the correlation wafer and correlation criteria for comparing the testing results with the previously-determined reference data;

an instruction-server module operable to identify, at the database, the testing instructions and the correlation criteria and to transmit the testing instructions and correlation criteria;

a testing-control module operable to receive the testing instructions and correlation criteria from the instruction-server module and to output electrical signals according to the testing instructions; and

a prober operable to test the correlation wafer according to the electrical signals;

wherein the testing-control module is operable to apply the correlation criteria and to transmit correlation data to the instruction-server module, wherein the correlation data comprise a count of matching and non-matching dice, and

wherein the instruction-server module is further operable to apply a statistical model to the correlation data to generate new testing instructions, the new testing instructions stored in the database.

2. A system according to claim 1, wherein the instruction-server module comprises:

a first server operable to transmit to the testing-control module the testing instructions and the correlation criteria; and

a second server operable to receive the correlation data from the testing-control module and generate the new testing instructions.

3. A system according to claim 1, wherein the testing instructions for testing the correlation wafer comprise position information of dice that are required to be tested.

4. A system according to claim 1, wherein the correlation criteria comprise a script that can be run by a computer.

5. A method for wafer correlation, wherein a correlation wafer is tested and its testing results are compared to its previously-determined reference data, the method comprising:

identifying at a database, testing instructions for testing the correlation wafer and correlation criteria for comparing the testing results with the previously-determined reference data;

transmitting from an instruction-server module to a testing-control module, the testing instructions;

transmitting the correlation criteria from the instruction-server module to the testing-control module, wherein the correlation criteria is operable to be applied by the testing-control module;

receiving, in the instruction-server module, correlation data from the testing-control module, wherein the correlation data comprises a count of matching and non-matching dice; and

applying, in the instruction-server module, a statistical model to the correlation data to generate new testing instructions for testing the correlation wafer.

6. A method according to claim 5, further comprising storing, in the database, the new testing instructions.

7. A method according to claim 5, further comprising receiving in the instruction-server module, a request from the testing-control module for the correlation criteria.

8. A method according to claim 5, wherein the testing instructions are operable to command the testing-control module to output electrical signals that would in turn command a prober to test the correlation wafer and transmit the testing results back to the testing-control module.

9. A method according to claim 5, further comprising receiving in the instruction-server module, a request from the testing-control module for the testing instructions.

10. An instruction system for wafer correlation, wherein a correlation wafer is tested and its testing results are compared to its previously-determined reference data, the system comprising:

a database operable to store the testing instructions for testing the correlation wafer and correlation criteria for comparing the testing results with the previously-determined reference data; and

an instruction-server module operable to identify, at the database, the testing instructions and correlation criteria, and to transmit the testing instructions and the correlation criteria to a testing-control module, wherein the instruction-server module is further operable to receive correlation data and apply a statistical model to the correlation data to generate new testing instructions, and the correlation data comprises a count of matching and non-matching dice.

11. A system according to claim 10, wherein the instruction-server module is operable to receive the testing results and to apply the correlation criteria to compare the testing results with the previously-determine reference data.

12. A system according to claim 10, wherein the instruction-server module comprises:

a first server operable to identify, at the database, the testing instructions and correlation criteria, and to transmit the testing instructions;

a second server operable to receive the correlation data and apply the statistical model to the correlation data to generate the new testing instructions.

13. A system according to claim 12, wherein the second server is operable to transmit the new testing instructions to the database.

14. A system according to claim 10, wherein the instruction-server module is operable to receive a request from the testing-control module for the correlation criteria.