Automated test and characterization data analysis methods and arrangement

• US 7,404,123 B1
• Filed: 08/03/2006
• Issued: 07/22/2008
• Est. Priority Date: 03/28/2005
• Status: Expired due to Fees

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Hsu, Gean, Sarmiento, Jaime, Ku, Tina Pai-Lin, Ballintine, Paul Ronald
• Primary Examiner(s): TU, CHRISTINE TRINH LE
• Application Number:
  US11/462,325
• Time in Patent Office: 719 Days
• Field of Search: None
• US Class Current: 714/724
• CPC Class Codes: G05B 19/042 using digital processors G05B19/05 takes precedence
• CPC Class Codes: G05B 2219/2602 Wafer processing
• CPC Class Codes: H01J 37/32522 Temperature
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H04L 12/66 Arrangements for connecting between networks having differing types of switching systems, e.g. gateways

Abstract

A method for testing a component configured to be installed in a plasma processing system. The method includes providing an ATAC (Automated Test and Characterization) fixture, which includes a system control software package ( SCS) that is representative of production system control software, a data manager module configured to obtain specification data from a database over a computer network, a test manager module configured to execute a set of tests designed to test the component, a SCS interface engine configured to provide the set of tests to the SCS, and a data analysis module configured to provide computer-implemented data analysis tool for analyzing test data obtained from the testing the component. The method also includes coupling the ATAC fixture to the component to enable the SCS in the ATAC fixture to test the component utilizing the set of tests and at least a portion of the specification data.

Claims

1. A method for testing a first component configured to be installed in a plasma processing system that is controlled during production with a production system control software, comprising:

providing an ATAC (Automated Test and Characterization) fixture, said ATAC fixture including at least;

a first system control software package (“

first SCS”

) that is representative of said production system control software,

a data manager module configured to obtain specification data from a first database over a computer network,

a test manager module configured to execute, using said first SCS, a set of tests designed to test said component,

a SCS interface engine configured to provide at least said set of tests to said first SCS, and

a data analysis module configured to provide computer-implemented data analysis tool to a user for analyzing test data obtained from said testing said first component; and

coupling said ATAC fixture to said first component to enable said first SCS in said ATAC fixture to test said first component utilizing said set of tests and at least a portion of said specification data, wherein missing components of said plasma processing system which are not present while testing said first component are stubbed out to simulate said missing components, thereby permitting said first component to be tested in a simulated environment using said first SCS as if said missing components are present while testing said first component.

2. The method of claim 1 wherein said computer network represents the Internet.

3. The method of claim 1 wherein said specification data represents data that is employed by vendors for testing components that are the same type as said first component irrespective of which of said vendors actually performs said testing of said components that are the same type as said first component.

4. The method of claim 1 wherein said first database is rendered accessible to said test manager module using a web server.

5. The method of claim 1 wherein said specification data is provided by a manufacturer of said plasma processing system for all vendors testing components that are the same type as said first component irrespective of which of said vendors actually performs said testing of said components that are the same type as said first component.

6. The method of claim 1 wherein further comprising obtaining test results, using said data manager module, from said testing of said first component and uploading said test results to a second database via the Internet for subsequent analysis.

7. The method of claim 6 wherein said test results are stored using a predefined format that is consistent for all vendors testing components that are the same type as said first component irrespective of which of said vendors actually performs said testing of said components that are the same type as said first component.

8. The method of claim 1 wherein said first SCS represents an exact copy of said production system control software.

9. The method of claim 1 wherein said data analysis module is further configured to monitor said test data for a condition that triggers a notification event.

10. The method of claim 9 wherein said data analysis module further includes an auto-notification module configured to transmit a notification if said condition that triggers said notification event is met.

11. A test fixture configured for testing a first component that is configured to be installed in a plasma processing system that is controlled during production with a production system control software, said test fixture comprising:

a first system control software package (“

first SCS”

) that is representative of said production system control software;

a data manager module configured to obtain specification data from a first database over a computer network;

a test manager module configured to execute, using said first SCS, a set of tests designed to test said component;

a SCS interface engine configured to provide at least said set of tests to said first SCS; and

a data analysis module configured to provide computer-implemented data analysis tool to a user for analyzing test data obtained from said testing said first component,

wherein said test fixture, when coupled to said first component, is configured to enable said first SCS in said test fixture to test said first component utilizing said set of tests and at least a portion of said specification data, and

wherein missing components of said production plasma processing system which are not present while testing said first component are stubbed out to simulate said missing components, thereby permitting said first component to be tested in a simulated environment using said first SCS as if said missing components are present while testing said first component.

12. The test fixture of claim 11 wherein said computer network represents the Internet.

13. The test fixture of claim 11 wherein said specification data represents data that is employed by vendors for testing components that are the same type as said first component irrespective of which of said vendors actually performs said testing of said components that are the same type as said first component.

14. The test fixture of claim 11 wherein said first database is rendered accessible to said test manager module using a web server.

15. The test fixture of claim 11 wherein said specification data is provided by a manufacturer of said plasma processing system for all vendors testing components that are the same type as said first component irrespective of which of said vendors actually performs said testing of said components that are the same type as said first component.

16. The test fixture of claim 11 wherein said data manager module is further configured to obtain test results from said testing of said first component and uploading said test results to a second database via the Internet for subsequent analysis.

17. The test fixture of claim 16 wherein said test results are stored using a predefined format that is consistent for all vendors testing components that are the same type as said first component irrespective of which of said vendors actually performs said testing of said components that are the same type as said first component.

18. The test fixture of claim 11 wherein said first SCS represents an exact copy of said production system control software.

19. The test fixture of claim 11 wherein said data analysis module is further configured to monitor said test data for a condition that triggers a notification event.

20. The test fixture of claim 19 wherein said data analysis module further includes an auto-notification module configured to transmit a notification if said condition that triggers said notification event is met.

21. A method for testing a first component configured to be installed in a plasma processing system that is controlled during production with a production system control software, comprising:

providing an ATAC (Automated Test and Characterization) fixture, said ATAC fixture being configured to simulate a plasma processing system such that said first component can be tested with a set of tests and specification data obtained by said ATAC fixture via a computer network from a database;

coupling said ATAC fixture to said first component to facilitate said testing of said first component;

testing said first component with said set of tests and said specification data; and

analyzing test data obtained from said testing said first component using said ATAC fixture to detect a condition that triggers a notification,

wherein missing components of said plasma processing system which are not present while testing said first component are stubbed out to simulate said missing components, thereby permitting said first component to be tested in a simulated environment as if said missing components are present while testing said first component.

22. The method of claim 21 wherein said computer network represents the Internet.

23. The method of claim 21 wherein said first database is rendered accessible to a test manager module using a web server.