Display apparatus and methods for manufacture thereof
First Claim
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1. A method of forming a spatial light modulator including a shutter supported by a compliant beam, the method comprising:
- forming a mold on a substrate, wherein the mold includes a lower horizontal surface, an upper horizontal surface and a wall;
depositing a beam material on the lower horizontal surface and the wall of the mold;
removing the beam material deposited on the lower horizontal surface of the mold while leaving the majority of the beam material deposited on the wall of the mold in place to form the compliant beam;
forming the shutter coupled to the compliant beam; and
removing the mold, thereby releasing the shutter and remaining beam material.
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Abstract
Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.
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Citations
21 Claims
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1. A method of forming a spatial light modulator including a shutter supported by a compliant beam, the method comprising:
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forming a mold on a substrate, wherein the mold includes a lower horizontal surface, an upper horizontal surface and a wall; depositing a beam material on the lower horizontal surface and the wall of the mold; removing the beam material deposited on the lower horizontal surface of the mold while leaving the majority of the beam material deposited on the wall of the mold in place to form the compliant beam; forming the shutter coupled to the compliant beam; and removing the mold, thereby releasing the shutter and remaining beam material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification