G2-Gyroscope: MEMS gyroscope with output oscillation about the normal to the plane
First Claim
1. A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis that lies in the plane, comprising:
- a substrate defining a top surface;
spaced bonding pads attached to the substrate and projecting above the top surface of the substrate;
a generally planar plate support member spaced above and essentially parallel to the top surface of the substrate and flexibly coupled to the bonding pads by flexures, such that the support member is capable of oscillatory motion relative to the substrate about a drive axis that is in the plane of the support member and orthogonal to the input axis;
a generally planar plate gyro member located within, coplanar with, and flexibly coupled to the support member such that the gyro member is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members in response to input rotation rate, and such that the gyro member will oscillate with the support member relative to the substrate about the drive axis, as the support member is oscillated about the drive axis;
one or more support member drives for directly oscillating the support member about the drive axis, and thereby also oscillating the gyro member about the drive axis;
one or more support member motion sensors that sense motion of the support member relative to the substrate about the drive axis; and
one or more gyro member output sensors that detect oscillation of the gyro member relative to the support member about the output axis.
1 Assignment
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Accused Products
Abstract
A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis. The gyroscope has a substrate, and a generally planar support member flexibly coupled to the substrate such that it is capable of oscillatory motion about a drive axis that is orthogonal to the input axis. There is also a generally planar gyro member coplanar with and flexibly coupled to the support member such that it is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members. There are one or more drives for directly or indirectly oscillating the gyro member about the drive axis, and one or more gyro output sensors that detect oscillation of the gyro member about the output axis.
15 Citations
54 Claims
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1. A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis that lies in the plane, comprising:
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a substrate defining a top surface; spaced bonding pads attached to the substrate and projecting above the top surface of the substrate; a generally planar plate support member spaced above and essentially parallel to the top surface of the substrate and flexibly coupled to the bonding pads by flexures, such that the support member is capable of oscillatory motion relative to the substrate about a drive axis that is in the plane of the support member and orthogonal to the input axis; a generally planar plate gyro member located within, coplanar with, and flexibly coupled to the support member such that the gyro member is capable of rotary oscillatory motion relative to the support member about an output axis that is orthogonal to the plane of the members in response to input rotation rate, and such that the gyro member will oscillate with the support member relative to the substrate about the drive axis, as the support member is oscillated about the drive axis; one or more support member drives for directly oscillating the support member about the drive axis, and thereby also oscillating the gyro member about the drive axis; one or more support member motion sensors that sense motion of the support member relative to the substrate about the drive axis; and one or more gyro member output sensors that detect oscillation of the gyro member relative to the support member about the output axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A gyroscope that lies generally in a plane, for detecting rotation rate about a gyro input axis that lies in the plane, comprising:
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a substrate defining a top surface; a mounting post attached to the substrate and projecting above the top surface of the substrate; a generally planar plate ring member spaced above and essentially parallel to the top surface of the substrate and flexibly coupled to the mounting post by a plurality of radial flexures, such that the post is centrally located relative to the ring member; a generally planar plate gyro member located outside of, concentric and coplanar with, and flexibly coupled to the ring member with a pair of colinear torsional flexures such that the gyro member is capable of oscillatory motion relative to the plane of the ring member and relative to the substrate about a drive axis that is in the plane of the gyro member and orthogonal to the input axis, and such that the gyro member will oscillate with the ring member about the output axis; wherein the ring member together with the gyro member is capable of rotary oscillatory motion about an output axis that is orthogonal to the plane of the gyro member and ring member; one or more gyro member drives for directly oscillating the gyro member about the drive axis; one or more gyro member motion sensors that sense motion of the gyro member about the drive axis; and one or more gyro output sensors that detect oscillation of the ring member and the gyro member about the output axis. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54)
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Specification