Method and system for high-speed, precise micromachining an array of devices
First Claim
1. A method for high-speed, precise micromachining an array of devices, each of the devices having at least one measurable property, the method comprising the steps of:
- selectively laser micromachining a device in the array along a linear path to vary a value of a measurable property;
suspending the step of selectively laser micromachining;
while the step of selectively laser micromachining is suspended, selectively laser micromachining at least one other device in the array along a path collinear with the linear path to vary a value of a measurable property; and
resuming the suspended step of selectively micromachining to vary a measurable property of the device until its value is within a desired range.
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Abstract
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.
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Citations
25 Claims
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1. A method for high-speed, precise micromachining an array of devices, each of the devices having at least one measurable property, the method comprising the steps of:
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selectively laser micromachining a device in the array along a linear path to vary a value of a measurable property; suspending the step of selectively laser micromachining; while the step of selectively laser micromachining is suspended, selectively laser micromachining at least one other device in the array along a path collinear with the linear path to vary a value of a measurable property; and resuming the suspended step of selectively micromachining to vary a measurable property of the device until its value is within a desired range. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification