Scintillator panel and radiation image sensor

• US 7,408,177 B2
• Filed: 03/03/2006
• Issued: 08/05/2008
• Est. Priority Date: 06/18/1998
• Status: Expired due to Fees

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Homme, Takuya, Sato, Hiroto, Suzuki, Takaharu, Takabayashi, Toshio, Natsume, Yoshio
• Primary Examiner(s): Hannaher; Constantine
• Application Number:
  US11/366,492
• Publication Number:
  US 20060261286A1
• Time in Patent Office: 886 Days
• Field of Search: 250/483.1
• US Class Current: 250/483.1
• CPC Class Codes: G01T 1/202 the detector being a crystal

Abstract

An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.

Claims

1. A panel for detection of radiation ray, comprising:

a support substrate on which a plurality of columnar crystals made of alkali-halide system material are formed and each of the columnar crystals has a needle shape;

said support substrate comprising;

a substrate; and

a first organic film substantially enveloping said substrate; and

said panel further comprising a second organic film substantially enveloping said columnar crystals formed on the support substrate and the support substrate.

2. The panel according to claim 1, wherein substrate comprises carbon or aluminum as a main component.

3. The panel according to claim 1, wherein the material of the first organic film is the same as that of the second organic film.

4. The panel according to claim 1, wherein either one of the first and second organic films is made of polyparaxylylene system material.

5. The panel according to claim 4, wherein the polyparaxylylene system material comprises polyparaxypolymonochloroparaxylylene, polydichloroparaxylylene, polytetrachloroparaxylylene, polyfluoroparaxylylene, polydimethylparaxylylene, and polydiethylparaxylylene.

6. The panel according to claim 1, further comprising a reflective film made of metal between the first organic film and the plurality of columnar crystals.

7. The panel according to claim 1, wherein the support substrate further comprises a reflection film between the support substrate and the first organic film.