Temperature-compensated film bulk acoustic resonator (FBAR) devices
First Claim
Patent Images
1. A temperature-compensated film bulk acoustic resonator (FBAR) device, comprising:
- an FBAR stack, comprising;
an FBAR characterized by a resonant frequency having a temperature coefficient, the FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes, the piezoelectric element having a temperature coefficient on which the temperature coefficient of the resonant frequency depends at least in part, anda temperature-compensating element having a temperature coefficient opposite in sign to the temperature coefficient of the piezoelectric element, and the temperature-compensating element comprises one of;
a niobium-molybdenum (Nb—
Mo);
a cobalt—
palladium (Co—
Pd) alloy;
or a niobium-molybdenum (Nb—
Mo) alloy.
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Abstract
The temperature-compensated film bulk acoustic resonator (FBAR) device comprises an FBAR stack. The FBAR stack comprises an FBAR and a temperature-compensating element. The FBAR is characterized by a resonant frequency having a temperature coefficient, and comprises opposed planar electrodes and a piezoelectric element between the electrodes. The piezoelectric element has a temperature coefficient on which the temperature coefficient of the resonant frequency depends at least in part. The temperature-compensating element has a temperature coefficient opposite in sign to the temperature coefficient of the piezoelectric element.
316 Citations
37 Claims
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1. A temperature-compensated film bulk acoustic resonator (FBAR) device, comprising:
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an FBAR stack, comprising; an FBAR characterized by a resonant frequency having a temperature coefficient, the FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes, the piezoelectric element having a temperature coefficient on which the temperature coefficient of the resonant frequency depends at least in part, and a temperature-compensating element having a temperature coefficient opposite in sign to the temperature coefficient of the piezoelectric element, and the temperature-compensating element comprises one of;
a niobium-molybdenum (Nb—
Mo);
a cobalt—
palladium (Co—
Pd) alloy;
or a niobium-molybdenum (Nb—
Mo) alloy. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. An acoustic device, comprising an acoustic propagation path having a propagation time-related property, the propagation time-related property having a temperature coefficient, the acoustic propagation path comprising:
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an acoustic propagation element having a temperature coefficient on which the propagation time-related property of the acoustic propagation path depends at least in part; and a temperature-compensating element having a temperature coefficient opposite in sign to the temperature coefficient of the acoustic propagation element, and the temperature-compensating element comprises one of;
a niobium-molybdenum (Nb—
Mo);a cobalt-palladium (Co—
Pd) alloy;
or a niobium-molybdenum (Nb—
Mo) alloy.
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36. A temperature-compensated film bulk acoustic resonator (FBAR) device, comprising:
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an FBAR stack, comprising; an FBAR characterized by a resonant frequency having a temperature coefficient, the FBAR comprising opposed planar electrodes and a piezoelectric element between the electrodes, the piezoelectric element having a temperature coefficient on which the temperature coefficient of the resonant frequency depends at least in part, and a temperature-compensating element having a temperature coefficient opposite in sign to the temperature coefficient of the piezoelectric element, wherein the temperature-compensating element comprises a ferroelectric material, which comprises one of; lead nickel niobate (Pb(NixNbi-x)O3 in which the nickel fraction x is about one third;
nepheline (KAlSiO4)(NaAlSiO4)3;
or zirconium tungstate (ZrW2O8).
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37. An acoustic device, comprising an acoustic propagation path having a propagation time-related property, the propagation time-related property having a temperature coefficient, the acoustic propagation path comprising:
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an acoustic propagation element having a temperature coefficient on which the propagation time-related property of the acoustic propagation path depends at least in part; and a temperature-compensating element having a temperature coefficient opposite in sign to the temperature coefficient of the acoustic propagation element, wherein the temperature compensating element comprises a ferroelectric material, which comprises one of; lead nickel niobate (Pb(NixNb1-x)O3 in which the nickel fraction x is about one third;
nepheline (KAlSiO4)(NaAlSiO4)3;
or zirconium tungstate (ZrW2O8).
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Specification