Systems and methods for isolation of torque and sense capacitors of an accelerometer

• US 7,409,862 B2
• Filed: 10/18/2006
• Issued: 08/12/2008
• Est. Priority Date: 10/18/2006
• Status: Expired due to Fees

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Derbyshire, Mark T.
• Primary Examiner(s): Kwok; Helen C.
• Application Number:
  US11/550,630
• Publication Number:
  US 20080092654A1
• Time in Patent Office: 664 Days
• Field of Search: 735/143.2, 735/141.7, 735/141.8, 735/143.6, 735/143.8, 735/142.9, 735/141.6
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means

Abstract

A Micro Electromechanical Systems (MEMS) accelerometer device having a proof mass flexibly attached to a substrate. The device includes one or more sense capacitors formed between the proof mass and the substrate, one or more torque capacitors formed between the proof mass and the substrate, and an isolation device that electrically isolates cathodes of the sense capacitors from cathodes of the torque capacitors on the proof mass.

Claims

1. A Micro Electromechanical Systems (MEMS) accelerometer device having a proof mass flexibly attached to a substrate, the device comprising:

one or more sense capacitors formed between the proof mass and the substrate;

one or more torque capacitors formed between the proof mass and the substrate; and

an isolation device configured to electrically isolate cathodes of the sense capacitors from cathodes of the torque capacitors on the proof mass.

2. The device of claim 1, wherein the isolation device includes a trough within the proof mass located between the cathodes of the sense capacitors and the cathodes of the torque capacitors.

3. The device of claim 2, wherein the trough includes at least one of an oxide layer and a bead of poly-silicon.

4. The device of claim 1, wherein the isolation device includes circuitry for electrically isolating anodes of the one or more sense capacitors from anodes of the one or more torque capacitors and the cathodes of the one or more sense capacitors from the cathodes of the one or more torque capacitors.

5. The device of claim 4, further comprising a Mid-voltage source that is electrically connected to the cathodes of the one or more torque capacitors.

6. The device of claim 5, further comprising a mechanism node that is electrically connected to the cathodes of the one or more sense capacitors.

7. The device of claim 6, further comprising first and second input voltage sources and one or more switches connected between the first and second input voltage sources and the anodes of the one or more sense capacitors.

8. The device of claim 7, further comprising a trans-impedance amplifier that is connected to the mechanism node.

9. A method of making a Micro Electromechanical Systems (MEMS) accelerometer having a proof mass flexibly attached to a substrate, the method comprising:

forming one or more sense capacitors between the proof mass and the substrate;

forming one or more torque capacitors between the proof mass and the substrate;

electrically isolating cathodes of the one or more sense capacitors from cathodes of the one or more torque capacitors.

10. The method of claim 9, wherein electrically isolating includes forming a trough within the proof mass between the cathodes of the one or more sense capacitors and the cathodes of the one or more torque capacitors.

11. The method of claim 10, wherein forming the trough includes applying at least one of an oxide layer and a bead of poly-silicon within the trough.

12. The method of claim 9, wherein electrically isolating includes forming circuitry configured to electrically isolate anodes of the one or more sense capacitors from anodes of the one or more torque capacitors and the cathodes of the one or more sense capacitors from the cathodes of the one or more torque capacitors.

13. The method of claim 12, wherein the formed circuitry electrically connects a Mid-voltage source to the cathodes of the one or more torque capacitors.

14. The method of claim 13, wherein the formed circuitry electrically connects the cathodes of the one or more sense capacitors to a mechanism node.

15. The method of claim 14, wherein the formed circuitry electrically connects first and second input voltage sources to the anodes of the one or more sense capacitors via one or more switches.

16. The method of claim 15, wherein the mechanism node is electrically connected to a trans-impedance amplifier.