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Systems and methods for isolation of torque and sense capacitors of an accelerometer

  • US 7,409,862 B2
  • Filed: 10/18/2006
  • Issued: 08/12/2008
  • Est. Priority Date: 10/18/2006
  • Status: Expired due to Fees
First Claim
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1. A Micro Electromechanical Systems (MEMS) accelerometer device having a proof mass flexibly attached to a substrate, the device comprising:

  • one or more sense capacitors formed between the proof mass and the substrate;

    one or more torque capacitors formed between the proof mass and the substrate; and

    an isolation device configured to electrically isolate cathodes of the sense capacitors from cathodes of the torque capacitors on the proof mass.

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