MEMS passivation with phosphonate surfactants
First Claim
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1. A method for fabricating a MEMS device comprising contacting a surface of said device with a vapor comprising octadecylphosphonic acid or a salt or ester thereof.
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Abstract
Phosphonate surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirror devices. The surfactants are adsorbed from vapor or solution to form self-assembled monolayers at the device surface. The higher binding energy of the phosphonate end groups (as compared to carboxylate surfactants) improves the thermal stability of the resulting layer.
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Citations
20 Claims
- 1. A method for fabricating a MEMS device comprising contacting a surface of said device with a vapor comprising octadecylphosphonic acid or a salt or ester thereof.
- 10. A method for fabricating a MEMS device comprising contacting a surface of said device with a solution comprising a solvent and octadecylphosphonic acid or a salt or ester thereof.
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17. A method for fabricating a MEMS device comprising:
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washing a surface of the device with a carbonate or alcohol; and contacting the surface of the device with a solution comprising a solvent and an alkylphosphonic acid or a salt or ester thereof, wherein the alkylphosphonic acid comprises a hydrocarbon straight chain of at least 8-17 carbon atoms. - View Dependent Claims (18, 19, 20)
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Specification