Display device and method of fabricating the same

• US 7,411,215 B2
• Filed: 04/14/2003
• Issued: 08/12/2008
• Est. Priority Date: 04/15/2002
• Status: Expired due to Fees

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Murakami, Satoshi, Hayakawa, Masahiko, Yamazaki, Shunpei, Akimoto, Kengo
• Primary Examiner(s): Gurley; Lynne A.
• Assistant Examiner(s): Im; Junghwa M
• Application Number:
  US10/412,234
• Publication Number:
  US 20030193054A1
• Time in Patent Office: 1,947 Days
• Field of Search: 257/72, 257/350, 257/59, 257 66- 69, 257/84, 257/89, 257/E27.111, 257/E29.278
• US Class Current: 257/72
• CPC Class Codes: H01L 27/12 the substrate being other than a semiconductor body, e.g. an insulating body
• CPC Class Codes: H01L 27/1248 with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
• CPC Class Codes: H01L 27/1288 employing particular masking sequences or specially adapted masks, e.g. half-tone mask
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 33/44 characterised by the coatings, e.g. passivation layer or anti-reflective coating

Abstract

To achieve promotion of stability of operational function of display device and enlargement of design margin in circuit design, in a display device including a pixel portion having a semiconductor element and a plurality of pixels provided with pixel electrodes connected to the semiconductor element on a substrate, the semiconductor element includes a photosensitive organic resin film as an interlayer insulating film, an inner wall face of a first opening portion provided at the photosensitive organic resin film is covered by a second insulating nitride film, a second opening portion provided at an inorganic insulating film is provided on an inner side of the first opening portion, the semiconductor and a wiring are connected through the first opening portion and the second opening portion and the pixel electrode is provided at a layer on a lower side of an activation layer.

Claims

1. A display device comprising a pixel portion having a plurality of pixels,

wherein each of the pixels is provided with a pixel electrode, and

wherein the pixel electrode is connected to a semiconductor element over a substrate,

wherein the semiconductor element comprises:

an activation layer,

a gate insulating film in contact with the activation layer,

a gate electrode opposed to the activation layer through the gate insulating film,

a first insulating nitride film provided over the activation layer,

an organic resin film provided over the first insulating nitride film,

a second insulating nitride film provided over the organic resin film, and

a wiring provided over the second insulating nitride film;

wherein an inner wall face of a first opening portion formed in the organic resin film is covered by the second insulating nitride film;

wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion;

wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion;

wherein the pixel electrode is connected to the semiconductor element through the wiring electrically;

wherein a first part of an insulating film is formed over the pixel electrode; and

wherein the activation layer is formed over a second part of the insulating film.

5. The display device according to claim 1, wherein said organic resin film is photosensitive organic resin film.

9. The display device according to claim 1, wherein each of the first insulating nitride film and the second insulating nitride film comprises at least one selected from a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film and an aluminum oxynitride film.

13. The display device according to claim 1, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

17. The display device according to claim 1, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

21. The display device according to claim 1, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

25. An electronic device having the display device according to claim 1, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.

2. A display device comprising a pixel portion having a plurality of pixels,

wherein each of the pixels is provided with a pixel electrode,

wherein the pixel electrode is connected to a semiconductor element over a substrate,

wherein the semiconductor element comprises:

an activation layer,

a gate insulating film in contact with the activation layer,

a gate electrode opposed to the activation layer through the gate insulating film,

a first insulating nitride film provided over the activation layer,

an organic resin film provided over the first insulating nitride film,

a second insulating nitride film provided over the organic resin film, and

a wiring provided over the second insulating nitride film;

wherein an inner wall face of a first opening portion formed in the organic resin film is covered by the second insulating nitride film, a bottom face of said first opening portion including a region in which the first insulating nitride film and the second insulating nitride film are brought into contact with each other over 0.3 through 3 μ

m;

wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion;

wherein the activation layer in the wiring are connected through the first opening portion and the second opening portion;

wherein the pixel electrode is connected to the semiconductor element through the wiring electrically;

wherein a first part of an insulating film is formed over the pixel electrode; and

wherein the activation layer is formed over a second part of the insulating film.

6. The display device according to claim 2, wherein said organic resin film is a photosensitive organic resin film.

10. The display device according to claim 2, wherein each of the first insulating nitride film and the second insulating nitride film comprises at least one selected from a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film and an aluminum oxynitride film.

14. The display device according to claim 2, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

18. The display device according to claim 2, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

22. The display device according to claim 2, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

26. An electronic device having the display device according to claim 2, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.

3. A display device comprising a pixel portion having a plurality of pixels,

wherein each of the pixels is provided with a pixel electrode,

wherein the pixel electrode is connected to a semiconductor element over a substrate,

wherein the semiconductor element comprises:

an activation layer,

a gate insulating film in contact with the activation layer,

a gate electrode opposed to the activation layer through the gate insulating film,

a first insulating nitride film provided over the activation layer,

an acrylic film provided over the first insulating nitride film,

a second insulating nitride film provided over the acrylic film, and

a wiring provided over the second insulating nitride film;

wherein an inner wall face of a first opening portion formed in the acrylic film is covered by the second insulating nitride film;

wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion;

wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion;

wherein the pixel electrode is connected to the semiconductor element through the wiring electrically;

wherein a first part of an insulating film is formed over the pixel electrode; and

wherein the activation layer is formed over a second part of the insulating film.

7. The display device according to claim 3, wherein said acrylic film is a positive type photosensitive acrylic film.

11. The display device according to claim 3, wherein each of the first insulating nitride film and the second insulating nitride film comprises at least one selected from a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film and an aluminum oxynitride film.

15. The display device according to claim 3, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

19. The display device according to claim 3, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 3 μ

m.

23. The display device according to claim 3, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

27. An electronic device having the display device according to claim 3, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.

4. A display device comprising a pixel portion having a plurality of pixels,

wherein each of the pixels is provided with a pixel electrode,

wherein the pixel electrode is connected to a semiconductor element over a substrate,

wherein the semiconductor element comprises:

an activation layer,

a gate insulating film in contact with the activation layer,

a gate electrode opposed to the activation layer through the gate insulating film,

a first insulating nitride film provided over the activation layer,

an acrylic film provided over the first insulating nitride film,

a second insulating nitride film provided over the acrylic film, and

a wiring provided over the second insulating nitride film;

wherein an inner wall face of a first opening portion formed in the acrylic film is covered by the second insulating nitride film, a bottom face of said first opening portion including a region in which the first insulating film and the second insulating film are brought into contact with each other over 0.3 through 3 μ

m;

wherein a second opening portion is formed in a laminated layer body including the gate insulating film, the first insulating nitride film and the second insulating nitride film inside the first opening portion;

wherein the activation layer and the wiring are connected through the first opening portion and the second opening portion;

wherein the pixel electrode is connected to the semiconductor element through the wiring electrically;

wherein a first part of an insulating film is formed over the pixel electrode; and

wherein the activation layer is formed over a second part of the insulating film.

8. The display device according to claim 4, wherein said acrylic film is a positive type photosensitive acrylic film.

12. The display device according to claim 4, wherein each of the first insulating nitride film and the second insulating nitride film comprises at least one selected from a silicon nitride film, a silicon nitrooxide film, a silicon oxynitride film, an aluminum nitride film, an aluminum nitrooxide film and an aluminum oxynitride film.

16. The display device according to claim 4, wherein a radius of curvature at an upper end portion of the first opening portion falls in a range of 3 through 30 μ

m.

20. The display device according to claim 4, wherein a radius of curvature at an upper end portion of the first opening portion is changed continuously in a range of 3 through 30 μ

m.

24. The display device according to claim 4, wherein a contact angle θ

at a lower end portion of the first opening portion satisfies 30°

<

θ

<

65°

.

28. An electronic device having the display device according to claim 4, wherein said electronic device is selected from the group consisting of a television, a digital camera, a laptop computer, a mobile computer, a portable image reproducing apparatus, a goggle type display, and a video camera.