Accelerometer
First Claim
Patent Images
1. An accelerometer, comprising:
- a fixing unit comprising a plurality of first electrode parts and a plurality of second electrode parts; and
a movable unit connected with the fixing unit and comprising a body, a plurality of third electrode parts and a plurality of fourth electrode parts, wherein the body has an opening, the third electrode parts are located at an outer side of the body and are disposed respectively with respect to the first electrode parts, and the fourth electrode parts are located in the opening and are disposed respectively with respect to the second electrode parts,wherein a plurality of capacitance sensors formed by the first electrode parts and the third electrode parts and a plurality of capacitance sensors formed by the second electrode parts and the fourth electrode parts sense an acceleration.
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Abstract
An accelerometer includes a fixing unit and a movable unit. The fixing unit has a plurality of first electrode parts and a plurality of second electrode parts. The movable unit is connected with the fixing unit and includes a body having an opening, a plurality of third electrode parts and a plurality of fourth electrode parts. The third electrode parts are disposed at an outer side of the body with respect to the first electrode parts, respectively. The fourth electrode parts are disposed at the inner side of the body in the opening, and are disposed respectively with respect to the second electrode parts, respectively.
16 Citations
17 Claims
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1. An accelerometer, comprising:
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a fixing unit comprising a plurality of first electrode parts and a plurality of second electrode parts; and a movable unit connected with the fixing unit and comprising a body, a plurality of third electrode parts and a plurality of fourth electrode parts, wherein the body has an opening, the third electrode parts are located at an outer side of the body and are disposed respectively with respect to the first electrode parts, and the fourth electrode parts are located in the opening and are disposed respectively with respect to the second electrode parts, wherein a plurality of capacitance sensors formed by the first electrode parts and the third electrode parts and a plurality of capacitance sensors formed by the second electrode parts and the fourth electrode parts sense an acceleration. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An accelerometer, comprising:
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a fixing unit comprising a substrate, a first conductive element, and a positioning structure, wherein the first conductive element has a plurality of first electrode parts, and the first conductive element is separable from the substrate and the first conductive element is fixedly positioned on the substrate by the positioning structure; and a movable unit connected with a fixing block and comprising a body and a plurality of second electrode parts, wherein the second electrode parts are located at an outer side of the body and are disposed respectively with respect to the first electrode parts. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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Specification