MEMS-based monitoring

• US 7,412,899 B2
• Filed: 09/15/2006
• Issued: 08/19/2008
• Est. Priority Date: 09/16/2005
• Status: Active Grant

• Current Assignee: International Electronic Machines Corp.
• Original Assignee: International Electronic Machines Corp.
• Inventors: Mian, Zahid F., Spoor, Ryk E.
• Primary Examiner(s): Lefkowitz; Edward
• Assistant Examiner(s): ROY, PUNAM P
• Application Number:
  US11/532,212
• Publication Number:
  US 20070062299A1
• Time in Patent Office: 704 Days
• Field of Search: 735/79, 735/83, 737/63, 737/69, 737/73, 738/02, 340/870.25, 340/870.26, 340/870.18, 365/174, 702/42, 702/56
• US Class Current: 73/802
• CPC Class Codes: G07C 3/00 Registering or indicating the condition or the working of machines or other apparatus, other than vehicles

Abstract

A solution for monitoring a property of an object and/or an area using a Micro-ElectroMechanical Systems (MEMS)-based monitoring device is provided. In an embodiment of the invention, the MEMS-based monitoring device includes a MEMS-based sensing device for obtaining data based on a property of the object and/or area and a power generation device that generates power from an ambient condition of the monitoring device. In this manner, the monitoring device can operate independent of any outside power sources or other devices. Further, the monitoring device can include a transmitter that transmits a signal based on the property. The monitoring device can be used to monitor a moving component of a machine, and can be integrated with a health monitoring system of the machine using one or more relay devices.

Claims

1. A system for monitoring a property of an object, the system comprising:

a monitoring device physically associated with the object, the monitoring device including;

a Micro-ElectroMechanical Systems (MEMS)-based sensing device for sensing the property using an impedance that varies with the property, wherein the property is at least one of;

a stress or a strain experienced by the object during operation of a machine;

a transmitter that transmits a signal based on the property while the object is in use, wherein at least one of;

a frequency, an amplitude, or a phase of the signal varies with the impedance, and wherein the signal is transmitted either continuously or periodically according to a set time period; and

a power generation device that generates power from an ambient condition of the monitoring device, wherein the sensing device and transmitter are serially connected to the power generation device.

2. The system of claim 1, wherein the object is a component of a machine that is in motion with respect to at least one other component of the machine during operation of the machine.

3. The system of claim 1, further comprising a relay device, the relay device including:

a receiver for receiving the signal; and

a processor for processing the signal to obtain the property.

4. The system of claim 3, wherein the relay device further includes a storage module for temporarily storing object data.

5. The system of claim 3, further comprising a health monitoring system for processing property data for the object.

6. The system of claim 1, wherein the monitoring device further includes a receiver.

7. The system of claim 1, wherein the monitoring device further includes a processing module.

8. The system of claim 1, wherein the power generation device comprises a cantilever including a piezoelectric material and having one end unsupported.

9. The system of claim 1, wherein the power generation device comprises a MEMS-based device.

10. The system of claim 1, wherein the transmitter comprises a MEMS-based transmitter.

11. A machine comprising:

a plurality of components; and

at least one monitoring device physically associated with at least one of the plurality of components, the at least one monitoring device including;

a Micro-ElectroMechanical Systems (MEMS)-based sensing device having an impedance that changes with a property of the at least one of the plurality of components;

a transmitter that transmits a signal based on the property, wherein at least one of;

a frequency, an amplitude, or a phase of the signal varies with the impedance, and wherein the signal is transmitted either continuously or periodically according to a set time period;

a processing module that adjusts at least one of;

the frequency, the amplitude, or the phase of the signal to identify the at least one monitoring device; and

a power generation device that generates power from an ambient condition of the monitoring device.

12. The machine of claim 11, further comprising at least one relay device attached to a stationary component of the machine, the at least one relay device including:

a receiver for receiving the signal; and

a processor for processing the signal to obtain component data.

13. The machine of claim 12, further comprising a health monitoring system in communication with the at least one relay, the health monitoring system including a means for processing the component data.

14. The machine of claim 12, wherein the at least one relay device further includes a power system for generating power for the at least one relay device.

15. The machine of claim 11, wherein the at least one of the plurality of components comprises a limiting component.

16. The machine of claim 11, wherein the at least one of the plurality of components is in motion with respect to at least one other of the plurality of components during operation of the machine.

17. The machine of claim 11, wherein the property comprises at least one of a stress or a strain of the at least one of the plurality of components.

18. The machine of claim 11, wherein the at least one monitoring device is at least one of:

attached to the at least one of the plurality of components or embedded in the at least one of the plurality of components during manufacturing.

19. A system for monitoring a property of an object, the system comprising:

a monitoring device physically associated with the object, the monitoring device including;

a Micro-ElectroMechanical Systems (MEMS)-based sensing device for sensing the property using an impedance that varies with the property, wherein the MEMS-based sensing device comprises a strain sensing device that includes a pair of shafts that are interlocking but not connected;

a transmitter that transmits a signal based on the property while the object is in use, wherein at least one of;

a frequency, an amplitude, or a phase of the signal varies with the impedance, and wherein the signal is transmitted either continuously or periodically according to a set time period; and

a power generation device that generates power from an ambient condition of the monitoring device, wherein the sensing device and transmitter are serially connected to the power generation device.

20. A system for monitoring a property of an object, the system comprising:

a monitoring device physically associated with the object, the monitoring device including;

a Micro-ElectroMechanical Systems (MEMS)-based sensing device for sensing the property using an impedance that varies with the property;

a transmitter that transmits a signal based on the property while the object is in use, wherein at least one of;

a frequency, an amplitude, or a phase of the signal varies with the impedance, and wherein the signal is transmitted either continuously or periodically according to a set time period; and

a processing module that adjusts at least one of;

the frequency, the amplitude, or the phase of the signal to identify the monitoring device; and

a power generation device that generates power from an ambient condition of the monitoring device, wherein the sensing device and transmitter are serially connected to the power generation device.

21. The system of claim 20, wherein the object is a component of a machine that is in motion with respect to at least one other component of the machine during operation of the machine.

22. The system of claim 20, further comprising a relay device, the relay device including:

a receiver for receiving the signal; and

a processor for processing the signal to obtain the property.

23. The system of claim 22, further comprising a health monitoring system for processing property data for the object.

24. The system of claim 20, wherein the power generation device comprises a cantilever including a piezoelectric material and having one end unsupported.

25. The system of claim 20, wherein the MEMS-based sensing device comprises a strain sensing device that includes a pair of shafts that are interlocking but not connected.

26. A system for monitoring a property of an object, the system comprising:

a monitoring device physically associated with the object, the monitoring device including;

a Micro-ElectroMechanical Systems (MEMS)-based sensing device for sensing the property using an impedance that varies with the property;

a transmitter that transmits a signal based on the property while the object is in use, wherein at least one of;

a frequency, an amplitude, or a phase of the signal varies with the impedance, and wherein the signal is transmitted either continuously or periodically according to a set time period; and

a power generation device that generates power from an ambient condition of the monitoring device, wherein the sensing device and transmitter are serially connected to the power generation device,

wherein the object is a component of a machine that is in motion with respect to at least one other component of the machine during operation of the machine, and wherein the object comprises at least one component of a helicopter rotor assembly.