Method for controlled application of reactive vapors to produce thin films and coatings

• US 7,413,774 B2
• Filed: 12/21/2004
• Issued: 08/19/2008
• Est. Priority Date: 06/27/2003
• Status: Active Grant

• Current Assignee: SPTS Technologies Limited (KLA Corporation)
• Original Assignee: Applied Microstructures, Inc. (KLA Corporation)
• Inventors: Yi, Richard C., Chinn, Jeffrey D., Nowak, Romuald, Kobrin, Boris
• Primary Examiner(s): Meeks; Timothy
• Assistant Examiner(s): Burkhart; Elizabeth A
• Application Number:
  US11/018,173
• Publication Number:
  US 20050109277A1
• Time in Patent Office: 1,337 Days
• Field of Search: 427/248.1, 427/255.23
• US Class Current: 427/248.1
• CPC Class Codes: B05D 1/185 applying monomolecular layers B05D1/204 takes precedence
• CPC Class Codes: B05D 1/60 Deposition of organic layers from vapour phase vapour phase deposition in general C23C14/00, C23C16/00
• CPC Class Codes: B05D 3/142 Pretreatment
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C08G 77/04 Polysiloxanes
• CPC Class Codes: C09D 4/00 Coating compositions, e.g. paints, varnishes or lacquers, based on organic non-macromolecular compounds having at least one polymerisable carbon-to-carbon unsaturated bond ; Coating compositions, based on monomers of macromolecular compounds of groups C09D183/00 - C09D183/16
• CPC Class Codes: C23C 16/4485 by evaporation without using carrier gas in contact with the source material C23C16/4486 takes precedence

Abstract

A vapor phase deposition method and apparatus for the application of thin layers and coatings on substrates. The method and apparatus are useful in the fabrication of electronic devices, micro-electromechanical systems (MEMS), Bio-MEMS devices, micro and nano imprinting lithography, and microfluidic devices. The apparatus used to carry out the method provides for the addition of a precise amount of each of the reactants to be consumed in a single reaction step of the coating formation process. The apparatus provides for precise addition of quantities of different combinations of reactants during a single step or when there are a number of different individual steps in the coating formation process. The precise addition of each of the reactants in vapor form is metered into a predetermined set volume at a specified temperature to a specified pressure, to provide a highly accurate amount of reactant.

Claims

1. A method of vapor-phase coating deposition on a substrate present in a processing chamber, where at least one precursor used for formation of said coating exhibits a vapor pressure below about 150 Torr at a temperature of 25°

C., the method comprising;

a) providing a processing chamber in which said coating is vapor deposited;

b) providing at least one precursor exhibiting a vapor pressure below about 150 Torr at a temperature of 25°

C.;

c) transferring vapor of said at least one precursor to a corresponding precursor vapor reservoir in which said precursor vapor accumulates;

d) accumulating a precise nominal amount of said at least one precursor vapor required for vapor phase coating deposition in at least one precursor vapor reservoir which corresponds with said at least one precursor, wherein said precise nominal amount of said precursor is accumulated by controlling a pressure at a specific temperature in said precursor vapor reservoir which corresponds with said precursor; and

e) adding said precise nominal amount of said at least one precursor vapor to said processing chamber in which said coating is being deposited, wherein the entire said precise nominal amount of said at least one precursor vapor is transferred in batch fashion into said processing chamber.

2. A method in accordance with claim 1, wherein a plurality of precursors are used, and wherein a plurality of precursors are accumulated in a plurality of corresponding precursor vapor reservoirs.

3. A method in accordance with claim 2, wherein at least two of said precursor vapors are added to said processing chamber essentially simultaneously using a batch addition technique for each precursor.

4. A method in accordance with claim 2, wherein at least two of said precursor vapors are added to said processing chamber in sequence using a batch addition technique for each addition.

5. A method in accordance with claim 2, wherein at least one of said precursor vapors is added to said process chamber from said at least one precursor vapor reservoir more than once, by repeating steps c), d), and e).

6. A method in accordance with claim 2, wherein a plurality of precursor vapors are added to said process chamber and wherein said precursor vapors are added in relative quantities required to produce coating physical characteristics.

7. A method in accordance with claim 1, wherein at least one catalyst vapor is added to said processing chamber to facilitate vapor deposition of said coating.

8. A method in accordance with claim 7, wherein said at least one catalyst vapor is accumulated in at least one catalyst vapor reservoir which corresponds with said at least one catalyst prior to transfer to said processing chamber.

9. A method in accordance with claim 8, wherein said at least one catalyst vapor is added to said processing chamber essentially simultaneously with at least one of said at least one precursor vapors.

10. A method in accordance with claim 8, wherein said at least one catalyst vapor is added to said processing chamber in sequence with at least one of said precursor vapors.

11. A method in accordance with claim 10, wherein said catalyst vapor is added to said processing chamber prior to the addition of a precursor vapor to said processing chamber.

12. A method in accordance with claim 8, wherein at least one of said at least one catalyst vapor is added to said process chamber from said corresponding at least one catalyst vapor reservoir more than once, by repeated filling of a nominal vapor reservoir volume, followed by repeated adding of said vapor catalyst to said process chamber from said corresponding at least one catalyst vapor reservoir.

13. A method in accordance with claim 8, wherein at least one catalyst vapor is added to said process chamber in a quantity relative to said at least one precursor vapor to produce a coating having specific physical characteristics.

14. A method in accordance with claim 13, wherein a volumetric ratio of a precursor to a catalyst ranges from about 1:

6 to about 6;

1.

15. A method in accordance with claim 14, wherein said volumetric ratio ranges from about 1:

3 to about 3;

1.

16. A method in accordance with claim 7, wherein at least one of said at least one catalyst vapor is added to said process chamber from said at least one catalyst vapor reservoir more than once, by repeated filling of a nominal vapor reservoir volume, followed by repeated adding of said vapor catalyst to said process chamber from said vapor reservoir.

17. A method in accordance with claim 7, wherein at least one catalyst vapor is added to said process chamber in a quantity relative to said at least one precursor vapor to produce a coating having specific physical characteristics.

18. A method in accordance with claim 17, wherein a volumetric ratio of a precursor to a catalyst ranges from about 1:

6 to about 6;

1.

19. A method in accordance with claim 18, wherein said volumetric ratio ranges from about 1:

3 to about 3;

1.

20. A method in accordance with claim 1, wherein at least one of said precursor vapors is added to said process chamber from said at least one corresponding precursor vapor reservoir more than once, by repeating steps c), d), and e).

21. A method in accordance with claim 1, wherein a plurality of precursor vapors are added to said process chamber and wherein said precursor vapors are added in relative quantities required to produce coating physical characteristics.