Method and system for calibrating a rotary encoder and making a high resolution rotary encoder

• US 7,414,547 B2
• Filed: 12/22/2006
• Issued: 08/19/2008
• Est. Priority Date: 12/22/2006
• Status: Expired due to Fees

• Current Assignee: 3M Innovative Properties Company (3M Company)
• Original Assignee: 3M Innovative Properties Company (3M Company)
• Inventors: Wang, Wei, Biyikli, Levent, Aguirre, Luis A.
• Primary Examiner(s): JEANGLAUDE, JEAN BRUNER
• Application Number:
  US11/615,459
• Publication Number:
  US 20080149816A1
• Time in Patent Office: 606 Days
• Field of Search: 341/7, 341/120, 341/119, 341/118, 250/231.13, 355/71
• US Class Current: 341/7
• CPC Class Codes: G01D 5/34707 Scales; Discs, e.g. fixation, fabrication, compensation

Abstract

A calibration system for a rotary encoder comprises a rotary encoder disposed on a manufacturing substrate, the rotary encoder including an encoder pattern. The calibration system also includes a calibration pattern written onto a surface of the substrate, the calibration pattern comprising a ring that includes a grating pattern, where a radial position of the grating pattern corresponds to an error value of the position of the encoder pattern. A method of calibrating the errors of a rotary encoder and a method of fabricating a high resolution rotary encoder on a surface of a manufacturing substrate are also provided.

Claims

1. A calibration system for a rotary encoder, comprising:

a rotary encoder disposed on a manufacturing substrate, the rotary encoder including an encoder pattern having a plurality of lines spaced apart by a substantially fixed spacing distance and a detection system to detect position information corresponding to a position of the encoder pattern; and

a calibration pattern written onto a surface of the substrate, the calibration pattern comprising a ring that includes a grating pattern, wherein a radial position of the grating pattern corresponds to an error value of the position of the encoder pattern.

2. The calibration system of claim 1, further comprising an error detection system to probe and detect diffraction patterns generated by the grating pattern of the calibration pattern.

3. The calibration system of claim 1, wherein the manufacturing substrate comprises a roller having a flat surface and a curved surface, wherein the calibration pattern is disposed on one of the flat surface and the curved surface.

4. The calibration system of claim 3, wherein the calibration pattern is disposed on a surface of the manufacturing substrate at a first radial distance from the center of the manufacturing substrate that is greater than a second radial distance of the encoder pattern from the center of the manufacturing substrate.

5. The calibration system of claim 4, wherein the ring is formed on a flat surface of the substrate and wherein the grating pattern of the ring varies in radial distance from the center of the manufacturing substrate as a function of its angular position.

6. The calibration system of claim 1, wherein the calibration pattern is disposed proximate to a manufacturing area of the substrate.

7. A method of calibrating the errors of a rotary encoder for a manufacturing substrate, comprising:

providing a rotary encoder disposed on a manufacturing substrate;

acquiring positional information from the rotary encoder;

providing an interference lithography writing system to write a calibration pattern on at least one surface of the substrate, wherein the writing system includes a controller to receive the positional information from the rotary encoder and to control the writing of the calibration pattern based on the positional information; and

writing the calibration pattern on the at least one surface of the substrate.

8. The method of claim 7, further comprising:

providing an error detection system having a probe source and a detector to probe and detect error information based on diffraction patterns generated by the calibration pattern when scanned with the probe beam, the error information indicating errors in the positional information of the rotary encoder.

9. The method of claim 7, wherein the interference lithography writing system comprises a Talbot Interferometer.

10. The method of claim 7, wherein the calibration pattern is disposed on the at least one surface of the manufacturing substrate at a first radial distance from the center of the manufacturing substrate that is greater than a second radial distance of the encoder pattern from the center of the manufacturing substrate.

11. The method of claim 7, wherein the calibration pattern comprises a ring that includes a grating pattern, wherein a radial position of the grating pattern corresponds to an error value of the position of the encoder pattern.

12. The method of claim 7, wherein the interference lithography writing system further comprises a UV light source and a modulator, wherein the modulator receives a modulation signal from the controller and modulates a light signal generated by the UV light source based on the modulation signal.

13. The method of claim 7, wherein the step of writing the calibration pattern on the at least one surface of the substrate comprises stitching an interference pattern on the at least one surface while rotating the substrate at a first velocity.

14. The method of claim 7, further comprising treating the at least one surface of the substrate with a contrast layer.

15. A method of fabricating a high resolution rotary encoder on a surface of a manufacturing substrate, comprising:

disposing a rotary encoder on the manufacturing substrate about a rotation axis, the rotary encoder including a first encoder pattern and a detection system to detect position information corresponding to a position of the first encoder pattern;

acquiring the positional information from the rotary encoder;

providing an interference lithography writing system to write a calibration pattern on a first portion of at least one surface of the substrate, wherein the writing system includes a controller to receive the positional information from the rotary encoder and to control the writing of the calibration pattern based on the positional information;

writing the calibration pattern on the at least one surface of the substrate;

providing an error detection system having a probe source and a detector to probe and detect error information based on diffraction patterns generated by the calibration pattern when scanned with the probe beam, the error information indicating errors in the positional information of the rotary encoder, wherein the error information is provided to the controller; and

writing a second encoder pattern on a second portion of the substrate, wherein the interference lithography writing system writes the second encoder pattern based on the positional information and the error information.

16. The method of claim 15, wherein the calibration pattern is disposed on the at least one surface of the manufacturing substrate at a radial distance from the center of the manufacturing substrate that is greater than a radial distance of the first encoder pattern from the center of the manufacturing substrate.

17. The method of claim 15, wherein the manufacturing substrate comprises a roller having a flat surface and a curved surface, wherein the calibration pattern is disposed on one of the flat surface and the curved surface and the second encoder pattern is disposed on one of the flat surface and the curved surface.