Method and apparatus for a layered thermal management arrangement

• US 7,414,843 B2
• Filed: 03/09/2005
• Issued: 08/19/2008
• Est. Priority Date: 03/10/2004
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Joshi, Yogendra, Wei, Xiaojin, Patterson, Michael K.
• Primary Examiner(s): Gandhi; Jayprakash N
• Assistant Examiner(s): PAPE, ZACHARY
• Application Number:
  US11/077,634
• Publication Number:
  US 20050200001A1
• Time in Patent Office: 1,259 Days
• Field of Search: 174/15.1, 174/15.2, 174/252, 257/714, 361/699, 165/80.4, 165/80.5, 165/104.33
• US Class Current: 361/699
• CPC Class Codes: F28F 3/08 Elements constructed for building-up into stacks, e.g. capable of being taken apart for cleaning
• CPC Class Codes: F28F 3/12 Elements constructed in the shape of a hollow panel, e.g. with channels F28D1/02, F28D1/03 take precedence
• CPC Class Codes: F28F 9/026 with static flow control means, e.g. with means for uniformly distributing heat exchange media into conduits
• CPC Class Codes: H01L 23/473 by flowing liquids H01L23/4332, H01L23/4338 take precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

Embodiments of the present invention include an apparatus, method, and system for providing a layered thermal management arrangement. Embodiments of the present invention provide a layered thermal management arrangement, including a plurality of first channels, one or more flow-regulation features having a first and second manifold to provide and regulate at least a portion of a first fluid flow to the plurality of first channels and to drain at least the portion of the first fluid flow from the plurality of first channels. Other embodiments may be described and claimed.

Claims

1. A system comprising:

a thermal management arrangement including;

a first substrate layer having a plurality of first channels with a first end and a second end in a first plane,

a second substrate layer, coupled to the first substrate layer, having one or more flow-regulation features adapted to provide and regulate at least a portion of a first fluid flow to the plurality of first channels and to drain at least the portion of the first fluid flow from the plurality of first channels,

the one or more flow-regulation features having a first manifold with a first end and a second end, the first manifold located in a second plane that is substantially parallel to the first plane, adapted to diffuse the first fluid flow from the first end of the first manifold to the second end of the first manifold in the second plane, and to provide the first fluid flow to the plurality of first channels at the first end of the plurality of first channels in the first plane,

a third substrate layer including one or more flow-regulation features, coupled to the second substrate layer, having a first opening adapted to provide the first fluid flow to the one or more flow-regulation features, and a second opening adapted to drain the first fluid flow from the one or more flow-regulation features,

a fourth substrate layer, coupled to the first substrate layer, having a second channel, and

the one or more flow-regulation features of the third substrate layer adapted to provide and regulate at least a portion of a second fluid flow to the second channel and to drain at least the portion of the second fluid flow from the second channel; and

a flow controller coupled to a first flow control device adapted to control a first flow rate of the first fluid, and coupled to a second flow control device adapted to control a second flow rate of the second fluid flow.

2. The system of claim 1, wherein the one or more flow-regulation features further comprise:

a second manifold located in the second plane, adapted to drain the first fluid flow from the plurality of first channels, and to concentrate the first fluid flow in the second plane.

3. The system of claim 2, wherein the first manifold is adapted to provide the first fluid flow to the plurality of first channels in a direction that is substantially orthogonal to the second plane, and the second manifold is adapted to drain the first fluid flow from the plurality of first channels in a direction that is substantially orthogonal to the second plane.

4. The system of claim 1, wherein at least a subset of the plurality of first channels are substantially parallel to one another.

5. The system of claim 1, wherein the one or more flow regulation features comprise one or more flow corridors each separated by a rib.

6. The system of claim 1, further comprising:

a fifth substrate layer, coupled to the third substrate layer, having

a first opening adapted to provide the first fluid flow to the one or more flow-regulation features of the second substrate layer through the first opening of the third substrate layer;

a second opening adapted to drain the first fluid flow from the one or more flow-regulation features of the second substrate layer through the second opening of the third substrate layer;

a third opening adapted to provide the second fluid flow to the one or more flow-regulation features of the third substrate layer; and

a fourth opening adapted to drain the second fluid flow from the one or more flow-regulation features of the third substrate layer, wherein

the flow controller being adapted to control the first flow rate of the first fluid flow provided to the first opening of the fifth substrate layer and to control the second flow rate of the second fluid flow provided to the third opening of the fifth substrate layer.

7. The system of claim 6, wherein the first fluid flow is independent from the second fluid flow.

8. The system of claim 1, wherein at least the first substrate layer or the second substrate layer comprises silicon.

9. A method of thermal management comprising:

receiving a first fluid flow with a first set of flow regulation features of a first substrate layer;

diffusing the first fluid flow from a first end to a second end of the first set of flow regulation features in a first plane, with the first set of flow regulation features located in the first plane;

providing the first fluid flow from the first set of flow regulation features to one end of a plurality of first channels in a second substrate layer, the plurality of first channels being in a second plane that is substantially parallel to the first plane;

draining the first fluid flow from the plurality of first channels with a second set of flow regulation features of the first substrate layer;

receiving a second fluid flow with a third set of flow regulation features of a third layer that is coupled to the first layer;

diffusing the second fluid flow with the third set of flow regulation features in a third plane;

providing the second fluid flow from the third set of flow regulation features to a plurality of second channels in a fourth substrate layer that is coupled to the second substrate layer, the plurality of second channels being in a fourth plane that is substantially parallel to the third plane;

controlling a first flow rate of the first fluid flow with a first flow control device coupled to a flow controller; and

controlling a second flow rate of the second fluid flow with a second flow control device coupled to the controller.

10. The method of claim 9, further comprising:

concentrating the first fluid flow with the second set of flow regulation features located in the first plane.

11. The method of claim 10, further comprising:

emitting the first fluid flow from the second set of flow regulation features in a direction that is substantially orthogonal to the first plane.

12. The method of claim 9, further comprising:

draining the second fluid flow from the plurality of second channels with a fourth set of flow regulation features of the third layer.

13. The method of claim 12 wherein the first fluid flow in the plurality of first channels has a first direction and the second fluid flow in the plurality of second channels has a second direction, and the first direction is substantially the same or substantially the opposite as the second direction.

14. The method of claim 13, wherein the first fluid flow is independent from the second fluid flow.

15. A system comprising:

a thermally-managed electronic assembly including

a semiconductor package to source heat when in operation; and

a thermal management arrangement, coupled to the semiconductor package, having

a first substrate layer including a first channel;

a second substrate layer, coupled to the first substrate layer, having one or more flow-regulation features adapted to provide and regulate a first fluid flow to the first channel and to drain the first fluid flow from the first channel, the first fluid flow adapted to absorb at least a portion of the heat sourced by the semiconductor package while in the first channel;

a third substrate layer, coupled to the second substrate layer, having

a first opening adapted to provide the first fluid flow to the one or more flow-regulation features of the second substrate layer;

a second opening adapted to drain the first fluid flow from the one or more flow-regulation features of the second substrate layer; and

one or more flow-regulation features;

a fourth substrate layer, coupled to the first substrate layer, having a second channel; and

a fifth substrate layer, coupled to the third substrate layer, having

a first opening adapted to provide the first fluid flow to the one or more flow-regulation features of the second substrate layer through the first opening of the third substrate layer;

a second opening adapted to drain the first fluid flow from the one or more flow-regulation features of the second substrate layer through the second opening of the third substrate layer;

a third opening adapted to provide a second fluid flow to the one or more flow-regulation features of the third substrate layer; and

a fourth opening adapted to drain the second fluid flow from the one or more flow-regulation features of the third substrate layer;

a dynamic random access memory (DRAM) coupled to the thermally-managed electronic assembly through an interconnection; and

a flow controller coupled to a first flow control device adapted to control a first flow rate of the first fluid flow provided to the first opening of the fifth substrate layer; and

coupled to a second flow control device adapted to control a second flow rate of the second fluid flow provided to the third opening of the fifth substrate layer.

16. The system of claim 15, wherein the first substrate layer including the first channel in a first plane, and the thermal management arrangement further comprises the one or more flow-regulation features having a first manifold located in a second plane that is substantially parallel to the first plane, adapted to diffuse the first fluid flow in the second plane, and to provide the first fluid flow to the first channel.

17. The system of claim 16, wherein the thermal management arrangement further comprises the one or more flow-regulation features of the third substrate layer adapted to provide and regulate the second fluid flow to the second channel and to drain the second fluid flow from the second channel.

18. The system of claim 15, further comprising:

a thermal sensor coupled to a face of the thermal management arrangement to sense thermal conditions; and

the flow controller further coupled to the thermal sensor and adapted to receive the sensed thermal conditions and to control the first flow rate and the second flow rate based at least in part on the sensed thermal conditions.