×

Process and apparatus for treating a workpiece with gases

  • US 7,416,611 B2
  • Filed: 06/18/2004
  • Issued: 08/26/2008
  • Est. Priority Date: 05/09/1997
  • Status: Expired due to Fees
First Claim
Patent Images

1. A method for cleaning a workpiece comprising:

  • heating a liquid to a temperature ranging from 50°

    C. to about 200°

    C.;

    placing the workpiece into a chamber;

    moving the liquid in a fluid flow line to the chamber;

    entraining ozone gas into the liquid by injecting ozone gas into the liquid while the liquid is in the fluid flow line;

    spraying the heated liquid onto the workpiece, with the heated liquid forming a liquid layer on the workpiece;

    providing ozone gas into the spray of heated liquid, with ozone carried with the heated liquid onto the workpiece, and with ozone chemically reacting with a contaminant on the workpiece, to clean the workpiece.

View all claims
  • 5 Assignments
Timeline View
Assignment View
    ×
    ×