Process and apparatus for treating a workpiece with gases
First Claim
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1. A method for cleaning a workpiece comprising:
- heating a liquid to a temperature ranging from 50°
C. to about 200°
C.;
placing the workpiece into a chamber;
moving the liquid in a fluid flow line to the chamber;
entraining ozone gas into the liquid by injecting ozone gas into the liquid while the liquid is in the fluid flow line;
spraying the heated liquid onto the workpiece, with the heated liquid forming a liquid layer on the workpiece;
providing ozone gas into the spray of heated liquid, with ozone carried with the heated liquid onto the workpiece, and with ozone chemically reacting with a contaminant on the workpiece, to clean the workpiece.
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Abstract
In a method and apparatus for cleaning or processing a workpiece, a process gas is brought into contact with the workpiece by diffusion through a heated liquid layer on the workpiece, and by bulk transport achieved by entraining the gas in a liquid stream, spray or jet impinging on the workpiece. The process gas, which may be ozone, is entrained in the liquid via entrainment nozzles. Use of entrainment and diffusion together increases the amount of gas available for reaction at the workpiece surface, increases the reaction rate, and decreases required process times.
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Citations
24 Claims
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1. A method for cleaning a workpiece comprising:
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heating a liquid to a temperature ranging from 50°
C. to about 200°
C.;placing the workpiece into a chamber; moving the liquid in a fluid flow line to the chamber; entraining ozone gas into the liquid by injecting ozone gas into the liquid while the liquid is in the fluid flow line; spraying the heated liquid onto the workpiece, with the heated liquid forming a liquid layer on the workpiece; providing ozone gas into the spray of heated liquid, with ozone carried with the heated liquid onto the workpiece, and with ozone chemically reacting with a contaminant on the workpiece, to clean the workpiece. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for cleaning a workpiece, comprising:
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heating a liquid to 50-200°
C.;entraining ozone gas into the heated liquid by mixing ozone gas with the heated liquid while the heated liquid is within a liquid reservoir; placing the workpiece into a chamber; moving the heated liquid from the liquid reservoir into the chamber; directing the heated liquid onto the workpiece, with the heated liquid forming a liquid layer on the workpiece; controlling a thickness of the liquid layer; confining ozone gas within the chamber to form an ozone gas environment around the workpiece; and cleaning the workpiece by chemical reaction of the ozone gas on the workpiece. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A method for cleaning at least one workpiece comprising:
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heating a process liquid to 50-200°
C.;placing the workpiece into a chamber; moving the liquid in a fluid flow line to the chamber; entraining ozone gas into the liquid by injecting ozone gas into the liquid while the liquid is in the fluid flow line; applying the heated liquid onto the workpiece; forming the liquid into a liquid layer on the workpiece; controlling a thickness of the liquid layer on the workpiece; rotating the workpiece; and with the ozone chemically reacting with a contaminant on the workpiece, to clean the workpiece. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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Specification