Fabrication of LTCC T/R modules with multiple cavities and an integrated ceramic ring frame

• US 7,416,630 B2
• Filed: 11/24/2003
• Issued: 08/26/2008
• Est. Priority Date: 11/24/2003
• Status: Active Grant

• Current Assignee: Northrop Grumman Systems Corporation (Northrop Grumman Corporation)
• Original Assignee: Northrop Grumman Corporation
• Inventors: Gupta, Tapan K., Jacobson, Rena Y., Fisher, John S. III, Curbean, Andrea
• Primary Examiner(s): HESS, DOUGLAS A
• Application Number:
  US10/718,805
• Publication Number:
  US 20050109453A1
• Time in Patent Office: 1,737 Days
• Field of Search: 29/254.2, 343/700.MS, 156/89.12, 156/253, 438/123, 257/680
• US Class Current: 156/253
• CPC Class Codes: H01L 21/4807 Ceramic parts
• CPC Class Codes: H01Q 21/0025 Modular arrays
• CPC Class Codes: Y10T 156/1057 Subsequent to assembly of laminae
• CPC Class Codes: Y10T 29/435 Solid dielectric type

Abstract

A method of fabricating a transmit/receive (T/R) module utilizing low temperature co-fired ceramic (LTCC) material in place of high temperature co-fired ceramic (HTCC) material and utilizing a combination of multiple lamination steps which also include forming a ceramic frame, as opposed to a metal ring frame, in the process. Brazing metallization is also utilized to attach heat sinks and lids as well as pin connectors. The formation of the pin connectors is provided on the side surface of the T/R module with a side printing process.

Claims

1. A method of fabricating a package for an electronic device with low temperature co-fired ceramic (LTCC) including one or more multi-layer parts having multiple cavities therein for the location of active and passive electronic circuit components, comprising the steps of:

dividing and stacking a plurality of partially fabricated layers of LTCC material into a predetermined number of stacks, each of the stacks including a predetermined number of LTCC layers based on a respective cavity configuration to be subsequently formed therein;

separately laminating each of the stacks of LTCC layers at a first predetermined pressure into individual sections of laminated LTCC material;

forming desired cavity patterns into each of said sections;

stacking the sections including the cavity patterns formed therein into an assembly of contiguous sections;

placing the assembly in a lamination fixture; and

isostatically laminating the assembly of the sections at a second predetermined pressure into a composite LTCC structure;

wherein said layers of LTCC tape comprise at least 20 layers of about 5 mil thick tape.

2. A method according to claim 1 wherein said composite structure comprises a panel of a plurality of like LTCC parts.

3. A method according to claim 2 and additionally including the step of separating the panel into individual parts.

4. A method according to claim 3 wherein said individual parts comprise substrates for a circuit module utilized in an electronic system.

5. A method according to claim 1 wherein said predetermined number of stacks of LTCC material include one stack for the fabrication of a ceramic ring frame and the remaining stacks are utilized for forming a substrate for a transmit/receive (T/R) module in a radar system.

6. A method according to claim 1 wherein said LTTC structure comprises at least one substrate for a transmit/receive (T/R) module for an active aperture of a phased array radar system.

7. A method according to claim 6 wherein one of said sections comprises an outer ceramic ring for the substrate.

8. A method according to claim 7 wherein said layers of LTCC materials comprise layers of LTCC tape.

9. A method according to claim 8 wherein said step of separately laminating each of the stacks comprises laminating the stacks of LTCC tape.

10. A method according to claim 9 wherein said first predetermined pressure ranges between about 1000 psi and about 2000 psi.

11. A method according to claim 8 further including the step of machining the cavity patterns in each of the sections.

12. A method according to claim 11 wherein the step of machining comprises routing the cavity patterns with a router tool.

13. A method according to claim 10 wherein said second predetermined pressure ranges between about 4000 psi and about 5000 psi.

14. A method according to claim 13 wherein said step of isostatically laminating the assembly includes isostatically laminating the assembly of contiguous sections at substantially 4000-5000 psi at about 72°

C. for about 15 minutes.

15. A method according to claim 14 and additionally including the step of attaching a lid, a heat sink and a set of pin connectors to the substrate by brazing.

16. A method according to claim 2 and additionally including the step of firing the panel with a designated firing profile following the isostatic laminating step.

17. A method according to claim 15 wherein the pin connectors are attached by brazing metallization to a side wall surface of the substrate.

18. A method according to claim 17 and further including the step of dicing individual parts from the panel.

19. A method according to claim 17 and additionally including the step of effecting post fire printing as required.