High-sensitivity optical scanning using memory integration
First Claim
Patent Images
1. An inspection system comprising:
- a light source providing non-continuous illumination;
a two dimensional array of photosensors operative to acquire at a frame rate a plurality of at least partially overlapping two dimensional image frames of an object to be inspected, wherein said non-continuous illumination and said frame rate are generally synchronized; and
a defect analyzer operative to receive said two dimensional image frames, to combine overlapping portions of said two dimensional image frames to generate a representation of said object to be inspected, and to provide a report of defects on said object to be inspected based on an inspection of said representation.
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Abstract
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
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Citations
14 Claims
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1. An inspection system comprising:
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a light source providing non-continuous illumination; a two dimensional array of photosensors operative to acquire at a frame rate a plurality of at least partially overlapping two dimensional image frames of an object to be inspected, wherein said non-continuous illumination and said frame rate are generally synchronized; and a defect analyzer operative to receive said two dimensional image frames, to combine overlapping portions of said two dimensional image frames to generate a representation of said object to be inspected, and to provide a report of defects on said object to be inspected based on an inspection of said representation. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for inspecting an object, comprising:
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illuminating an object to be inspected with non-continuous illumination; acquiring at a frame rate a plurality of at least partially overlapping two dimensional image frames of said object to be inspected, wherein said non-continuous illuminating and said acquiring at a frame rate are generally synchronized; and generating a representation of said object to be inspected by combining overlapping portions of said two dimensional image frames; and reporting defects on said object to be inspected based on an inspection of said representation. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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Specification