Wafer stage storage structure speed testing
First Claim
1. A test integrated circuit manufactured on a semiconductor wafer, the test integrated circuit comprising:
- a test storage structure; and
an access controller coupled to the test storage structure and configured to access the test storage structure;
wherein the access controller comprises a clock source comprising a pulse width generator configured to independently generate a clock signal for accessing the test storage structure;
wherein the pulse width generator is configured to be programmable and configured to generate the clock signal as a pulse train at a number of frequencies;
wherein the access controller is configured to internally store within one or more registers, test results of testing of the test storage structure; and
wherein the one or more registers are accessible by automated test equipment configured to interpret the test results and to indicate functionality of another storage structure within another integrated circuit manufactured on the same semiconductor wafer as the test integrated circuit.
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Accused Products
Abstract
A system for testing integrated circuit storage structures on a semiconductor wafer. A test IC manufactured on a semiconductor wafer includes a test storage structure such as a random access memory structure, for example, and an access controller including one or more clock sources. In various embodiments, the clock sources may include a ring oscillator and a pulse width generator. These clock sources may be programmable to provide a clock signal having a variety of frequencies for accessing the storage structure. In one embodiment, the frequencies provided by the access controller may be higher than a frequency that can be supplied to the wafer from ATE. In another embodiment, the pulse width generator may be programmable to provide a pulse train having a variety of duty cycles.
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Citations
16 Claims
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1. A test integrated circuit manufactured on a semiconductor wafer, the test integrated circuit comprising:
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a test storage structure; and an access controller coupled to the test storage structure and configured to access the test storage structure; wherein the access controller comprises a clock source comprising a pulse width generator configured to independently generate a clock signal for accessing the test storage structure; wherein the pulse width generator is configured to be programmable and configured to generate the clock signal as a pulse train at a number of frequencies; wherein the access controller is configured to internally store within one or more registers, test results of testing of the test storage structure; and wherein the one or more registers are accessible by automated test equipment configured to interpret the test results and to indicate functionality of another storage structure within another integrated circuit manufactured on the same semiconductor wafer as the test integrated circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 10)
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9. A test integrated circuit manufactured on a semiconductor wafer, the test integrated circuit comprising:
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a test storage structure comprising a test register file structure; and an access controller coupled to the test storage structure and configured to access the test storage structure; wherein the access controller comprises a clock source configured to independently generate a clock signal for accessing the test storage structure;
wherein the clock source is configured to programmably generate the clock signal at a number of frequencies;wherein the access controller is configured to internally store within one or more registers, test results of testing of the test storage structure; and wherein the one or more registers are accessible by automated test equipment configured to interpret the test results and to indicate functionality of another storage structure within another integrated circuit manufactured on the same semiconductor wafer as the test integrated circuit.
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11. A method comprising:
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forming a test integrated circuit on a semiconductor wafer, wherein the test IC includes; a test storage structure; an access controller coupled to the test storage structure, wherein the access controller includes a clock source; and the access controller independently generating a clock signal to access the test storage structure;
programmably generating the clock signal at a number of frequencies; andinterpreting results of said accessing to indicate functionality of another storage structure within another integrated circuit manufactured on the same semiconductor wafer as the test integrated circuit. - View Dependent Claims (12, 13, 14)
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15. A test system, comprising:
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automated test equipment; and a semiconductor wafer comprising a plurality of integrated circuits including one or more test integrated circuits; wherein the one or more test integrated circuits are located in positions on the semiconductor wafer normally designated for others of the integrated circuits, and wherein each of the one or more test integrated circuits includes; a test storage structure; and an access controller coupled to the test storage structure and configured to access the test storage structure; wherein the access controller comprises a clock source configured to independently generate a clock signal for accessing the test storage structure; and
wherein the clock source is configured to programmably generate the clock signal at a number of frequencies, each of which is higher than any frequency supplied by the automated test equipment. - View Dependent Claims (16)
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Specification