Mirror and mirror layer for optical modulator and method
First Claim
1. A microelectromechanical systems mirror comprising a mirror body, the mirror body comprising a first surface and a second surface opposite from the first surface, whereinthe first surface of the mirror body comprises a reflective surface,the mirror body is substantially rigid,the mirror body being movable within a microelectromechanical systems device and secured therein by a connector extending between the second surface of the mirror body and a mechanical layer, andthe mirror body comprises a plurality of cavities.
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Accused Products
Abstract
Described herein are systems, devices, and methods relating to packaging electronic devices, for example, microelectromechanical systems (MEMS) devices, including optical modulators such as interferometric optical modulators. The interferometric modulator disclosed herein comprises a movable mirror. Some embodiments of the disclosed movable mirror exhibit a combination of improved properties compared to known mirrors, including reduced moving mass, improved mechanical properties, and reduced etch times.
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Citations
14 Claims
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1. A microelectromechanical systems mirror comprising a mirror body, the mirror body comprising a first surface and a second surface opposite from the first surface, wherein
the first surface of the mirror body comprises a reflective surface, the mirror body is substantially rigid, the mirror body being movable within a microelectromechanical systems device and secured therein by a connector extending between the second surface of the mirror body and a mechanical layer, and the mirror body comprises a plurality of cavities.
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6. A microelectromechanical systems mirror comprising a mirror body, wherein
a surface of the mirror body comprises a reflective surface, the mirror body is substantially rigid, the mirror body being movable within a microelectromechanical systems device, the mirror body comprises a plurality of cavities, and the plurality of cavities are at least in part defined by a plurality of layers of a body material, wherein each layer of body material is substantially parallel to the reflective surface.
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9. A microelectromechanical systems mirror comprising a mirror body, wherein
a surface of the mirror body comprises a reflective surface, the mirror body is substantially rigid, the mirror body being movable within a microelectromechanical systems device, the mirror body comprises a plurality of cavities, and the mirror body is porous.
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11. A microelectromechanical systems mirror comprising a mirror body, wherein
a surface of the mirror body comprises a reflective surface, the mirror body is substantially rigid, the mirror body being movable within a microelectromechanical systems device, the mirror body comprises a plurality of cavities, the plurality of cavities are defined at least in part by one or more structures comprising elements that are substantially perpendicular to the reflective surface, and the structures comprise a plurality of pins.
Specification