Photonic crystal-based optical elements for integrated circuits and methods therefor

• US 7,418,161 B2
• Filed: 06/22/2004
• Issued: 08/26/2008
• Est. Priority Date: 06/22/2004
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Mouli, Chandra
• Primary Examiner(s): Font; Frank G
• Assistant Examiner(s): LEPISTO, RYAN A
• Application Number:
  US10/872,499
• Publication Number:
  US 20050281524A1
• Time in Patent Office: 1,526 Days
• Field of Search: 385/1
• US Class Current: 385/1
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices

Abstract

Exemplary embodiments of the invention provide photonic crystal-based optical elements for integrated circuits. A photonic crystal optical device comprises a substrate and a plurality of pillars forming a photonic crystal structure over the substrate. The pillars are spaced apart from each other. Each pillar has a height and a horizontal cross-sectional shape. A material with a different dielectric constant than the pillars is provided within the spacing between the pillars. According to exemplary embodiments of the invention, the photonic crystal-based optical element can be an optical interconnect, a lens, or a filter. The photonic crystal-based optical element of the invention can be used to transmit solitons.

Claims

1. An optical device comprising:

a substrate; and

a photonic crystal optical interconnect comprising;

a first cladding layer over the substrate;

a photonic crystal layer over the first cladding layer, the photonic crystal layer comprising at least one photonic crystal element comprising a plurality of pillars being spaced apart from each other; and

a second cladding layer over the photonic crystal layer, wherein the pillars do not extend into the second cladding layer,

wherein the photonic crystal element comprises a first region having a first photonic crystal structure, a second region having a second different photonic crystal structure, and a third region having a third photonic crystal structure different from that of the first region and the second region, wherein the difference in photonic crystal structure among the three regions is based on a difference in pillar characteristics including at least a difference in pillar shape or size, said photonic crystal element forming a wavelength filter for the interconnect.

2. The optical device of claim 1, wherein the photonic crystal optical interconnect is configured for transmitting electromagnetic radiation.

3. The optical device of claim 2, wherein the photonic crystal optical interconnect has a photonic crystal structure configured such that optical response correlation length is larger than a diameter of an electromagnetic radiation beam incident on the photonic crystal optical interconnect.

4. The optical device of claim 3, wherein the optical interconnect has a photonic crystal structure configured to permit the transmission of a soliton.

5. The optical device of claim 1, further comprising a second photonic crystal element which is a photonic crystal lens associated with the optical interconnect and is configured to focus electromagnetic radiation onto the optical interconnect.

6. The optical device of claim 5, where the photonic crystal lens is a flat lens.

7. The optical device of claim 5, where the photonic crystal lens is configured to have a negative index of refraction.

8. The optical device of claim 1, further comprising a second photonic crystal element which is a photonic crystal filter associated with the optical interconnect and is configured to pass predetermined electromagnetic wavelengths to reach the optical interconnect.

9. The optical device of claim 1, wherein the photonic crystal element further comprises a material within the spacing between the pillars, the material having a dielectric constant that is lower than a dielectric constant of the pillars.

10. The optical device of claim 1, wherein the pillars comprise aluminum oxide.

11. The optical device of claim 1, wherein the photonic crystal element further comprises a third region having a third photonic crystal structure different from the photonic crystal structure of the first and second regions.

12. An integrated circuit comprising:

a substrate;

a first circuit on the substrate;

a second circuit on the substrate; and

a photonic crystal optical interconnect comprising;

a first cladding layer over the substrate;

a photonic crystal layer over the first cladding layer, the photonic crystal layer comprising at least one photonic crystal element for affecting the transmission of electromagnetic radiation from the first circuit to the second circuit, the photonic crystal element comprising a plurality of pillars being spaced apart from each other; and

a second cladding layer over the photonic crystal layer, wherein the pillars do not extend into the second cladding layer,

wherein the photonic crystal element comprises a first region having a first photonic crystal structure, a second region having a second different photonic crystal structure, and a third region having a third photonic crystal structure different from that of the first region and the second region, wherein the difference in photonic crystal structure among the three regions is based on a difference in pillar characteristics including at least a difference in pillar shape or size, said photonic crystal element forming a wavelength filter for the interconnect.

13. The integrated circuit of claim 12, wherein the photonic crystal element further comprises a material within the spacing between the pillars, the material having a dielectric constant that is lower than a dielectric constant of the pillars.

14. The integrated circuit of claim 12, wherein the pillars comprise aluminum oxide.

15. The integrated circuit of claim 12, further comprising a second photonic crystal element which is a photonic crystal lens.

16. The integrated circuit of claim 12, further comprising a second photonic crystal element which is a photonic crystal filter.

17. The integrated circuit of claim 12, wherein the photonic crystal element further comprises a third region having a third photonic crystal structure different from the photonic crystal structure of the first and second regions.

18. A processor-based system comprising:

a processor; and

a circuit coupled to the processor, the circuit comprising;

a substrate; and

a photonic crystal optical interconnect comprising;

a first cladding layer over the substrate;

a photonic crystal layer over the first cladding layer, the photonic crystal layer comprising at least one photonic crystal element comprising a plurality of pillars being spaced apart from each other; and

a second cladding layer over the photonic crystal layer, wherein the pillars do not extend into the second cladding layer,

wherein the photonic crystal element comprises a first region having a first photonic crystal structure, a second region having a second different photonic crystal structure, and a third region having a third photonic crystal structure different from that of the first region and the second region, wherein the difference in photonic crystal structure among the three regions is based on a difference in pillar characteristics including at least a difference in pillar shape or size, said photonic crystal element forming a wavelength filter for the interconnect.

19. The system of claim 18, wherein the photonic crystal element further comprises a third region having a third photonic crystal structure different from the photonic crystal structure of the first and second regions.

20. A photonic crystal optical element for a circuit, the optical element comprising:

a substrate; and

a photonic crystal optical interconnect comprising;

a first cladding layer over the substrate;

a photonic crystal layer over the first cladding layer, the photonic crystal layer comprising at least one photonic crystal element comprising a plurality of pillars being spaced apart from each other;

a second cladding layer over the photonic crystal layer, wherein the pillars do not extend into the second cladding layer; and

a low dielectric constant material within the spacing between the pillars having a dielectric constant that is lower than a dielectric constant of the pillars,

wherein the photonic crystal element comprises a first region having a first photonic crystal structure, a second region having a second different photonic crystal structure, and a third region having a third photonic crystal structure different from that of the first region and the second region, wherein the difference in photonic crystal structure among the three regions is based on a difference in pillar characteristics including at least a difference in pillar shape or size, said photonic crystal element forming a wavelength filter for the interconnect.

21. The photonic crystal optical element of claim 20, wherein the pillars and low dielectric constant material together have an approximately flat top surface.

22. The photonic crystal optical element of claim 20, wherein the pillars have a height within the range of approximately 100 Å

to approximately 5000 Å

.

23. The photonic crystal optical element of claim 20, wherein a ratio of the spacing between the pillars to a height of the pillars is within the range of approximately 1 to approximately 10.

24. The photonic crystal optical element of claim 20, wherein at least one of the photonic crystal structures has at least one defect.

25. The photonic crystal optical element of claim 20, wherein the pillars each of at least one of the regions have a circular horizontal cross-sectional shape.

26. The photonic crystal optical element of claim 20, wherein the pillars of at least one of the regions have a pentagonal horizontal cross-sectional shape.

27. The photonic crystal optical element of claim 20, wherein the pillars of at least one of the regions have a rectangular horizontal cross-sectional shape.

28. The photonic crystal optical element of claim 20, wherein the pillars comprise aluminum oxide.

29. The photonic crystal optical element of claim 20, wherein the pillars comprise zirconium oxide.

30. The photonic crystal optical element of claim 20, wherein the pillars comprise hafnium oxide.

31. The photonic crystal optical element of claim 20, wherein the pillars comprise a silver halide.

32. The photonic crystal optical element of claim 20, wherein the pillars comprise a polymer material based on high density polyethylene.

33. The photonic crystal optical element of claim 20, wherein the low dielectric constant material is spun on glass.

34. The photonic crystal optical element of claim 20, wherein the low dielectric constant material is silicon dioxide.

35. The photonic crystal optical element of claim 20, wherein the photonic crystal element is configured to transmit electromagnetic radiation.

36. The photonic crystal optical element of claim 20, wherein the photonic crystal element is configured to transmit solitons.

37. The photonic crystal optical element of claim 20, wherein the photonic crystal element is configured to focus electromagnetic radiation.

38. The photonic crystal optical element of claim 20, wherein the photonic crystal element is configured to pass predetermined wavelengths of electromagnetic radiation.

39. The optical element of claim 20, wherein the photonic crystal element further comprises a third region having a third photonic crystal structure different from the photonic crystal structure of the first and second regions.

40. A method of forming a photonic crystal element for a circuit, the method comprising:

providing a substrate;

providing a first cladding layer over the substrate;

forming a layer of a photonic crystal material over the first cladding layer;

patterning the photonic crystal material layer to form a plurality of pillars, wherein pillars in a first region have a first photonic crystal structure, pillars in a second region have a second different photonic crystal structure, and pillars in a third region have a third photonic crystal structure different from that of the pillars in the first region and the second region, wherein the difference in photonic crystal structure is based on a difference in pillar characteristics including at least a difference in pillar size or shape, said photonic crystal element forming a wavelength filter;

placing a low dielectric constant material having a lower dielectric constant than a dielectric constant of the pillars within the spacing between the pillars; and

providing a second cladding layer over the photonic crystal material and the low dielectric constant material, wherein the pillars do not extend into the second cladding layer.

41. The method of claim 40, wherein the act of forming a layer of a photonic crystal material comprises forming the photonic crystal material layer having a thickness within a range of approximately 100 Å

to approximately 5000 Å

.

42. The method of claim 40, wherein the act of patterning the photonic crystal material layer comprises forming at least one defect in the photonic crystal structure.

43. The method of claim 40, wherein the act of patterning the photonic crystal material layer comprises forming the pillars such that a ratio of the spacing between the pillars to the height of the pillars is within the range of approximately 1 to approximately 10.

44. The method of claim 40, wherein the act of patterning the photonic crystal material layer comprises forming the pillars of at least one of the regions with a circular horizontal cross-sectional shape.

45. The method of claim 40, wherein the act of patterning the photonic crystal material layer comprises forming the pillars of at least one of the regions with a rectangular horizontal cross-sectional shape.

46. The method of claim 40, wherein the act of patterning the photonic crystal material layer comprises forming the pillars of at least one of the regions with a pentagonal horizontal cross-sectional shape.

47. The method of claim 40, wherein the act of forming the layer of a photonic crystal material comprises forming a layer of aluminum oxide.

48. The method of claim 40, wherein the act of forming the layer of a photonic crystal material comprises forming a layer of polymer material based on high density polyethylene.

49. The method of claim 40, wherein the act of forming the layer of a photonic crystal material comprises forming a layer of zirconium oxide.

50. The method of claim 40, wherein the act of forming the layer of a photonic crystal material comprises forming a layer of hafnium oxide.

51. The method of claim 40, wherein the act of forming the layer of a photonic crystal material comprises forming a layer of a silver halide.

52. The method of claim 40, wherein the act of placing the low dielectric constant material comprises depositing spun on glass.

53. The method of claim 40, wherein the act of placing the low dielectric constant material comprises depositing silicon dioxide.

54. The method of claim 40, wherein the act of patterning the photonic crystal material layer comprises forming the photonic crystal structure to transmit electromagnetic radiation.

55. The method of claim 40, wherein the act of patterning the photonic crystal material layer comprises forming the photonic crystal structure to transmit solitons.

56. The method of claim 40, wherein the photonic crystal structures are formed to focus electromagnetic radiation.

57. The method of claim 40, wherein the photonic crystal structures are formed to pass predetermined wavelengths of electromagnetic radiation.

58. The method of claim 40, wherein the patterning of the photonic crystal material layer further comprises forming pillars in a third region having a third photonic crystal structure different from the photonic crystal structures of the first and second regions.