Methods of sensing temperature of an electronic device workpiece

• US 7,419,299 B2
• Filed: 02/06/2004
• Issued: 09/02/2008
• Est. Priority Date: 02/27/1998
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Hembree, David R., Akram, Salman
• Primary Examiner(s): PERT, EVAN T
• Application Number:
  US10/773,383
• Publication Number:
  US 20040164372A1
• Time in Patent Office: 1,670 Days
• Field of Search: 430/311, 430/327, 438 14- 16, 374/137, 357/48, 257/48
• US Class Current: 374/137
• CPC Class Codes: G01K 1/026 arrangements for monitoring a plurality of temperatures, e.g. by multiplexing
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2224/48464 the other connecting portion not on the bonding area also being a ball bond, i.e. ball-to-ball
• CPC Class Codes: H01L 2224/8592 Applying permanent coating, e.g. protective coating
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/15156 Side view

Abstract

The present invention includes electronic device workpieces, methods of semiconductor processing and methods of sensing temperature of an electronic device workpiece. In one aspect, the invention provides an electronic device workpiece including: a substrate having a surface; a temperature sensing device borne by the substrate; and an electrical interconnect formed upon the surface of the substrate, the electrical interconnect being electrically coupled with the temperature sensing device. In another aspect, a method of sensing temperature of an electronic device workpiece includes: providing an electronic device workpiece; supporting a temperature sensing device using the electronic device workpiece; providing an electrical interconnect upon a surface of the electronic device workpiece; electrically coupling the electrical interconnect with the temperature sensing device; and sensing temperature of the electronic device workpiece using the temperature sensing device.

Claims

1. A temperature sensing apparatus fabrication method comprising:

forming a cavity in an electronic device workpiece;

providing a temperature sensing device within the cavity and in a configuration to sense temperature of the electronic device workpiece;

supporting the temperature sensing device using the electronic device workpiece;

providing an electrical interconnect upon a surface of the electronic device workpiece; and

electrically coupling the electrical interconnect with the temperature sensing device.

2. The method according to claim 1 wherein the electrically coupling comprises wire bonding the electrical interconnect and the temperature sensing device.

3. The method according to claim 1 wherein the forming the cavity comprises anisotropically etching the electronic device workpiece.

4. The method according to claim 1 wherein the forming the cavity comprises isotropically etching the electronic device workpiece.

5. The method according to claim 1 further comprising forming the temperature sensing device.

6. The method according to claim 5 wherein the forming the temperature sensing device comprises forming a resistance temperature device.

7. The method according to claim 1 further comprising electrically coupling the electrical interconnect with external circuitry.

8. The method according to claim 1 further comprising electrically coupling the temperature sensing device with an edge of the electronic device workpiece using the electrical interconnect.

9. The method according to claim 1 wherein the providing the electrical interconnect comprises forming a conductive trace.

10. The method according to claim 1 further comprising contacting the electrical interconnect with the temperature sensing device.

11. The method according to claim 1 wherein the sensing comprises sensing temperature of the electronic device workpiece comprising a semiconductive wafer.

12. The method according to claim 1 wherein the electronic device workpiece comprises a silicon wafer.

13. The method according to claim 1 further comprising configuring the temperature sensing device to sense the temperature of the electronic device workpiece during fabrication of an electronic device using the electronic device workpiece.

15. The method according to claim 13 further comprising:

providing an electrical interconnect upon the electronic device workpiece; and

electrically coupling the electrical interconnect with at least one of the temperature sensing devices.

16. The method according to claim 15 wherein the providing the electrical interconnect comprises forming a conductive trace.

17. The method according to claim 15 wherein the electrically coupling comprises wire bonding the electrical interconnect and the at least one of the temperature sensing devices.

18. The method according to claim 15 wherein the electrically coupling includes contacting the electrical interconnect and the at least one of the temperature sensing devices.

14. A temperature sensing apparatus fabrication method comprising:

providing an electronic device workpiece;

forming a plurality of temperature sensing devices over the electronic device workpiece, the temperature sensing devices being configured to sense temperature in three dimensions of the electronic device workpiece.

19. The method according to claim 14 further comprising:

forming a cavity in the electronic device workpiece; and

providing at least one of the temperature sensing devices within the cavity.

20. The method according to claim 19 wherein the forming the cavity comprises anisotropically etching the electronic device workpiece.

21. The method according to claim 14 wherein the forming comprises forming the temperature sensing devices individually comprising a resistance temperature device.

22. The method according to claim 14 wherein the providing the electronic device workpiece comprises providing a wafer comprising silicon.

23. The method according to claim 14 wherein the wherein the temperature sensing devices are individually configured to sense the temperature of the electronic device workpiece during fabrication of an electronic device using the electronic device workpiece.

24. A temperature sensing apparatus fabrication method comprising:

supporting a temperature sensing device using an electronic device workpiece;

providing the temperature sensing device in a temperature sensing relationship with the electronic device workpiece;

providing an electrical interconnect upon a surface of the electronic device workpiece; and

electrically coupling the electrical interconnect with the temperature sensing device comprising wire bonding the electrical interconnect and the temperature sensing device.

25. The method according to claim 24 further comprising:

forming a cavity in the electronic device workpiece; and

providing the temperature sensing device within the cavity.

26. The method according to claim 25 wherein the forming the cavity comprises anisotropically etching the electronic device workpiece.

27. The method according to claim 24 further comprising forming the temperature sensing device upon the electronic device workpiece.

28. The method according to claim 24 further comprising electrically coupling the electrical interconnect with circuitry external to the electronic device workpiece.

29. The method according to claim 24 further comprising electrically coupling the temperature sensing device with an edge of the electronic device workpiece using the electrical interconnect.

30. The method according to claim 24 wherein the providing the electrical interconnect comprises forming a conductive trace.

31. The method according to claim 24 wherein the electronic device workpiece comprises a silicon wafer.

32. The method according to claim 24 wherein the temperature sensing device is configured to sense temperature of the electronic device workpiece during fabrication of an electronic device using the electronic device workpiece.

33. A temperature sensing method comprising:

supporting a plurality of temperature sensing devices using a wafer, and wherein the temperature sensing devices are individually in a temperature sensing relationship with respect to the wafer;

exposing the wafer and the temperature sensing devices to process conditions effective to form at least one electronic device; and

sensing temperature of the wafer in three dimensions of the wafer using the temperature sensing devices during the exposing.

34. The method of claim 33 further comprising adjusting the process conditions responsive to the sensing.

35. The method of claim 33 further comprising sensing the temperature of the wafer at a plurality of positions covering substantially an entirety of a surface of the wafer.

36. The method of claim 33 wherein the wafer comprises a production wafer, and further comprising forming the at least one electronic device using the wafer during the exposing.

37. The method of claim 33 wherein the supporting comprises supporting the temperature sensing devices using the wafer comprising silicon.

38. The method of claim 33 wherein the sensing the temperature comprises sensing the temperature of the wafer during fabrication of an electronic device using the wafer.

39. A temperature sensing apparatus fabrication method comprising:

providing an electronic device workpiece;

forming a temperature sensing device over the electronic device workpiece, the forming including providing the temperature sensing device in a temperature sensing relation with the electronic device workpiece;

providing an electrical interconnect upon the electronic device workpiece;

electrically coupling the electrical interconnect with the temperature sensing device; and

wherein the electrically coupling comprises wire bonding the electrical interconnect and the temperature sensing device.

40. A temperature sensing apparatus fabrication method comprising:

forming a cavity in an electronic device workpiece;

supporting a temperature sensing device using the electronic device workpiece, the supporting comprising providing the temperature sensing device within the cavity in a temperature sensing relationship with the electronic device workpiece;

providing an electrical interconnect upon a surface of the electronic device workpiece; and

electrically coupling the electrical interconnect with the temperature sensing device.

41. The method according to claim 40 wherein the forming the cavity comprises anisotropically etching the electronic device workpiece.