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Deposition system and method

  • US 7,419,532 B2
  • Filed: 02/28/2006
  • Issued: 09/02/2008
  • Est. Priority Date: 10/05/2004
  • Status: Active Grant
First Claim
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1. A method of loading a filtering device, comprising:

  • measuring a metric indicative of an initial loading of the filtering device;

    desirably positioning a quantity of matter proximate the filtering device;

    applying a negative pressure to the filtering device such that at least a portion of the quantity of matter is drawn into the filtering device;

    measuring a metric indicative of a final loading of the filtering device; and

    generating a loading model based on at least one of the metric indicative of the initial loading of the filtering device and the metric indicative of the final loading of the filtering device.

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