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Thin films

  • US 7,419,903 B2
  • Filed: 04/13/2005
  • Issued: 09/02/2008
  • Est. Priority Date: 03/07/2000
  • Status: Expired due to Term
First Claim
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1. A graded liner layer in a damascene trench comprising:

  • a first non-graded layer comprising a first compound;

    a second non-graded layer, above said first non-graded layer, said second non-graded layer comprising a first metal, wherein between said first and second non-graded layers is a first transition layer comprising both the first compound and the first metal, and wherein the first transition layer has greater than 90% step coverage; and

    a third non-graded layer, above said second non-graded layer, comprising a second metal, wherein between the second and third non-graded layers is a second transition layer comprising the first metal and the second metal, wherein the layers are located within a damascene trench.

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