Light emitting device, method of manufacturing the same, and manufacturing apparatus therefor

• US 7,420,210 B2
• Filed: 05/12/2006
• Issued: 09/02/2008
• Est. Priority Date: 12/28/2001
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Hamatani, Toshiji, Takayama, Toru, Yamazaki, Shunpei
• Primary Examiner(s): Sefer; A.
• Assistant Examiner(s): Wilson; Scott R.
• Application Number:
  US11/433,084
• Publication Number:
  US 20060208263A1
• Time in Patent Office: 844 Days
• Field of Search: None
• US Class Current: 257/59
• CPC Class Codes: H01L 21/67207 comprising a chamber adapted to a particular process
• CPC Class Codes: H10K 2102/3026 Top emission
• CPC Class Codes: H10K 50/125 specially adapted for multicolour light emission, e.g. for emitting white light
• CPC Class Codes: H10K 50/13 comprising stacked EL layers within one EL unit
• CPC Class Codes: H10K 50/84 Passivation; Containers; Encapsulations
• CPC Class Codes: H10K 50/841 Self-supporting sealing arrangements
• CPC Class Codes: H10K 50/844 Encapsulations
• CPC Class Codes: H10K 50/865 comprising light absorbing layers, e.g. light-blocking layers
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/123 Connection of the pixel electrodes to the thin film transistors [TFT]
• CPC Class Codes: H10K 59/124 Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/17 Passive-matrix OLED displays
• CPC Class Codes: H10K 59/32 Stacked devices having two or more layers, each emitting at different wavelengths
• CPC Class Codes: H10K 59/35 comprising red-green-blue [RGB] subpixels
• CPC Class Codes: H10K 59/353 characterised by the geometrical arrangement of the RGB subpixels
• CPC Class Codes: H10K 59/38 comprising colour filters or colour changing media [CCM]
• CPC Class Codes: H10K 59/871 Self-supporting sealing arrangements
• CPC Class Codes: H10K 59/873 Encapsulations
• CPC Class Codes: H10K 59/8792 comprising light absorbing layers, e.g. black layers
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/40 : Thermal treatment, e.g. annealing in the presence of a solvent vapour

Abstract

A light emitting device having high definition, a high aperture ratio, and high reliability is provided. The present invention achieves high definition and a high aperture ratio with a full color flat panel display using red, green, and blue color emission light by intentionally forming laminate portions, wherein portions of different organic compound layers of adjacent light emitting elements overlap with each other, without depending upon the method of forming the organic compound layers or the film formation precision.

Claims

1. A light emitting device comprising:

a first light emitting element, the first light emitting element comprising a first light emitting layer between a first electrode and a second electrode;

a second light emitting element adjacent to the first light emitting element, the second light emitting element comprising a second light emitting layer between the second electrode and a third electrode; and

an insulator covering an end of the first electrode and an end of the third electrode,

wherein the second light emitting layer overlaps the first electrode, the insulator, the third electrode, and the first light emitting layer.

2. The light emitting device according to claim 1, wherein the insulator comprises an inorganic insulator.

3. The light emitting device according to claim 1, wherein the first light emitting element emits light of one color selected from the group consisting of red, green, and blue.

4. The light emitting device according to claim 1, wherein the second light emitting element emits light of one color selected from the group consisting of red, green, and blue.

5. The light emitting device according to claim 1, wherein color of light emitted from the first light emitting element is different from color of light emitted from the second light emitting element.

6. An active electroluminescence module having the light emitting device according to claim 1.

7. A passive electroluminescence module having the light emitting device according to claim 1.

8. The light emitting device according to claim 1, wherein the light emitting device is incorporated into an electronic equipment selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a mobile computer, a mobile phone, an electronic book, a player using a recording medium, and a display.

9. The light emitting device according to claim 1, wherein a hole injecting layer and a hole transporting layer are provided between the first light emitting layer and the first electrode, and between the second light emitting layer and the third electrode.

10. The light emitting device according to claim 1, wherein the first electrode is electrically connected to a first thin film transistor and the third electrode is electrically connected to a second thin film transistor.

11. A light emitting device comprising:

a first transistor and a second transistor formed over a substrate;

a first electrode formed over the first transistor, the first electrode being electrically connected to the first transistor;

a second electrode formed over the second transistor, the second electrode being electrically connected to the second transistor;

an insulator covering an edge portion of the first electrode and an edge portion of the second electrode;

a first EL layer formed over the first electrode and the insulator; and

a second EL layer formed over the second electrode and the insulator,

wherein the second EL layer overlaps the first EL layer and the insulator.

13. The light emitting device according to claim 11, wherein the first EL layer emits light of red color.

14. The light emitting device according to claim 11, wherein the second EL layer emits light of green color.

17. The light emitting device according to claim 11, wherein color of light emitted from the first EL layer is different from color of light emitted from the second EL layer.

19. The light emitting device according to claim 11, wherein the first EL layer comprising Alq₃.

20. The light emitting device according to claim 11, wherein the second EL layer comprising Alq₃.

23. The light emitting device according to claim 11, wherein the first transistor is a first thin film transistor and the second transistor is a second thin film transistor.

25. The light emitting device according to claim 11, wherein each of the first electrode and the second electrode is an anode comprising indium tin oxide.

29. An electronic equipment having the light emitting device according to claim 11, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a portable information terminal, a player using a recording medium, and a display.

45. The light emitting device according to claim 11, wherein each of the first transistor and the second transistor comprises a silicon film having a crystal structure.

51. The light emitting device according to claim 11, wherein the second EL layer overlaps the first electrode.

52. The light emitting device according to claim 11, wherein the second EL layer overlaps the first electrode.

57. The light emitting device according to claim 11, further comprising:

a first colorization layer formed over the first EL layer; and

a second colorization layer formed over the second EL layer.

63. The light emitting device according to claim 11, wherein the insulator comprises an inorganic insulator.

12. A light emitting device comprising:

a first transistor and a second transistor formed over a substrate;

a first electrode formed over the first transistor, the first electrode being electrically connected to the first transistor;

a second electrode formed over the second transistor, the second electrode being electrically connected to the second transistor;

an insulator covering an edge portion of the first electrode and an edge portion of the second electrode;

a first EL layer formed over the first electrode and the insulator;

a second EL layer formed over the second electrode and the insulator;

a third electrode formed over the first EL layer and the second EL layer; and

a protective film formed over a third electrode,

wherein the second EL layer overlaps the first EL layer and the insulator.

15. The light emitting device according to claim 12, wherein the first EL layer emits light of red color.

16. The light emitting device according to claim 12, wherein the second EL layer emits light of green color.

18. The light emitting device according to claim 12, wherein color of light emitted from the first EL layer is different from color of light emitted from the second EL layer.

21. The light emitting device according to claim 12, wherein the first EL layer comprising Alq₃.

22. The light emitting device according to claim 12, wherein the second EL layer comprising Alq₃.

24. The light emitting device according to claim 12, wherein the first transistor is a first thin film transistor and the second transistor is a second thin film transistor.

26. The light emitting device according to claim 12, wherein each of the first electrode and the second electrode is an anode comprising indium tin oxide.

27. The light emitting device according to claim 12, wherein the third electrode is a cathode comprising MgAg.

28. The light emitting device according to claim 12, wherein the protective film is a silicon nitride film.

30. An electronic equipment having the light emitting device according to claim 12, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a portable information terminal, a player using a recording medium, and a display.

46. The light emitting device according to claim 12, wherein each of the first transistor and the second transistor comprises a silicon film having a crystal structure.

58. The light emitting device according to claim 12, further comprising:

a first colorization layer formed over the first light emitting layer; and

a second colorization layer formed over the second light emitting layer.

64. The light emitting device according to claim 12, wherein the insulator comprises an inorganic insulator.

31. A light emitting device comprising:

a first transistor and a second transistor formed over a substrate;

a first electrode formed over the first transistor and electrically connected to the first transistor;

a second electrode formed over the second transistor and electrically connected to the second transistor;

an insulator covering an edge portion of the first electrode and an edge portion of the second electrode;

a first light emitting layer formed over the first electrode and the insulator; and

a second light emitting layer formed over the second electrode and the insulator,

wherein the second light emitting layer overlaps the first light emitting layer and the insulator.

35. The light emitting device according to claim 31, wherein color of light emitted from the first light emitting layer is different from color of light emitted from the second light emitting layer.

41. An electronic equipment having the light emitting device according to claim 31, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a mobile computer, a mobile phone, an electronic book, a player using a recording medium, and a display.

42. An electronic equipment having the light emitting device according to claim 31, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a mobile computer, a mobile phone, an electronic book, a player using a recording medium, and a display.

47. The light emitting device according to claim 31, wherein each of the first transistor and the second transistor comprises a silicon film having a crystal structure.

53. The light emitting device according to claim 31, wherein the second light emitting layer overlaps the first electrode.

59. The light emitting device according to claim 31, further comprising:

a first colorization layer formed over the first light emitting layer; and

a second colorization layer formed over the second light emitting layer.

65. The light emitting device according to claim 31, wherein the insulator comprises an inorganic insulator.

32. A light emitting device comprising:

a first transistor and a second transistor formed over a substrate;

a first electrode formed over the first transistor and electrically connected to the first transistor;

a second electrode formed over the second transistor and electrically connected to the second transistor;

an insulator covering an edge portion of the first electrode and an edge portion of the second electrode;

a first light emitting layer formed over the first electrode and the insulator;

a second light emitting layer formed over the second electrode and the insulator;

a third electrode formed over the first light emitting layer and the second light emitting layer; and

a protective film formed over the third electrode,

wherein the second light emitting layer overlaps the first light emitting layer and the insulator.

36. The light emitting device according to claim 32, wherein color of light emitted from the first light emitting layer is different from color of light emitted from the second light emitting layer.

39. The light emitting device according to claim 32, wherein the protective film is a silicon nitride film.

48. The light emitting device according to claim 32, wherein each of the first transistor and the second transistor comprises a silicon film having a crystal structure.

54. The light emitting device according to claim 32, wherein the second light emitting layer overlaps the first electrode.

60. The light emitting device according to claim 32, further comprising:

a first colorization layer formed over the first light emitting layer; and

a second colorization layer formed over the second light emitting layer.

66. The light emitting device according to claim 32, wherein the insulator comprises an inorganic insulator.

33. A light emitting device comprising:

a first semiconductor film and a second semiconductor film formed over a substrate;

a gate insulating film formed over the first semiconductor film and the second semiconductor film;

a first gate electrode and a second gate electrode formed over the gate insulating film;

a first insulating film formed over the first gate electrode and the second gate electrode;

a first source electrode and a first drain electrode formed over the first insulating film and electrically connected to the first semiconductor film;

a second source electrode and a second drain electrode formed over the first insulating film and electrically connected to the second semiconductor film;

a second insulating film formed over the first source electrode, the first drain electrode, the second source electrode and the second drain electrode;

a first pixel electrode formed over the second insulating film and electrically connected to one of the first source electrode and the first drain electrode;

a second pixel electrode formed over the second insulating film and electrically connected to one of the second source electrode and the second drain electrode;

an insulator formed over the second insulating film and covering an edge portion of the first pixel electrode and an edge portion of the second pixel electrode;

a first light emitting layer formed over the first pixel electrode and the insulator; and

a second light emitting layer formed over the second pixel electrode and the insulator,

wherein the second light emitting layer overlaps the first light emitting layer and the insulator.

37. The light emitting device according to claim 33, wherein color of light emitted from the first light emitting layer is different from color of light emitted from the second light emitting layer.

43. An electronic equipment having the light emitting device according to claim 33, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a mobile computer, a mobile phone, an electronic book, a player using a recording medium, and a display.

49. The light emitting device according to claim 33, wherein each of the first semiconductor film and the second semiconductor film is a silicon film having a crystal structure.

55. The light emitting device according to claim 33, wherein the second light emitting layer overlaps the first pixel electrode.

61. The light emitting device according to claim 33, further comprising:

a first colorization layer formed over the first light emitting layer; and

a second colorization layer formed over the second light emitting layer.

67. The light emitting device according to claim 33, wherein the insulator comprises an inorganic insulator.

34. A light emitting device comprising:

a first semiconductor film and a second semiconductor film formed over a substrate;

a gate insulating film formed over the first semiconductor film and the second semiconductor film;

a first gate electrode and a second gate electrode formed over the gate insulating film;

a first insulating film formed over the first gate electrode and the second gate electrode;

a first source electrode and a first drain electrode formed over the first insulating film and electrically connected to the first semiconductor film;

a second source electrode and a second drain electrode formed over the first insulating film and electrically connected to the second semiconductor film;

a second insulating film formed over the first source electrode, the first drain electrode, the second source electrode and the second drain electrode;

a first pixel electrode formed over the second insulating film and electrically connected to one of the first source electrode and the first drain electrode;

a second pixel electrode formed over the second insulating film and electrically connected to one of the second source electrode and the second drain electrode;

an insulator formed over the second insulating film and covering an edge portion of the first pixel electrode and an edge portion of the second pixel electrode;

a first light emitting layer formed over the first pixel electrode and the insulator; and

a second light emitting layer formed over the second pixel electrode and the insulator;

an opposite electrode formed over the first light emitting layer and the second light emitting layer; and

a protective film formed over the opposite electrode,

wherein the second light emitting layer overlaps the first light emitting layer and the insulator.

38. The light emitting device according to claim 34, wherein color of light emitted from the first light emitting layer is different from color of light emitted from the second light emitting layer.

40. The light emitting device according to claim 34, wherein the protective film is a silicon nitride film.

44. An electronic equipment having the light emitting device according to claim 34, wherein the electronic equipment is one selected from the group consisting of a video camera, a digital camera, a head mounted display, a car navigation system, a car stereo, a personal computer, a mobile computer, a mobile phone, an electronic book, a player using a recording medium, and a display.

50. The light emitting device according to claim 34, wherein each of the first semiconductor film and the second semiconductor film is a silicon film having a crystal structure.

56. The light emitting device according to claim 34, wherein the second light emitting layer overlaps the first pixel electrode.

62. The light emitting device according to claim 34, further comprising:

a first colorization layer formed over the first light emitting layer; and

a second colorization layer formed over the second light emitting layer.

68. The light emitting device according to claim 34, wherein the insulator comprises an inorganic insulator.