Lateral piezoelectric microelectromechanical system (MEMS) actuation and sensing device
First Claim
1. A microelectromechanical system (MEMS) device comprising:
- a substrate;
an anchored end connected to said substrate;
a free end positioned opposite to said anchored end;
a central gap separating said anchored end from said free end and positioned along a central longitudinal axis of said MEMS device; and
multiple actuation beams each having a longitudinal axis positioned transverse to said central longitudinal axis of said central gap and said MEMS device, wherein said multiple actuation beams comprise a first set of multiple actuation beams and a second set of multiple actuation beams positioned on opposite sides of said central gap, wherein said central gap separates said first set of multiple actuation beams from said second set of multiple actuation beams, and wherein each actuation beam comprises;
a first electrode;
a piezoelectric layer over said first electrode; and
multiple sets of second electrodes over said piezoelectric layer, wherein each of said sets of second electrodes being defined by a transverse gap there between, and wherein one of said sets of second electrodes are actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane.
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Accused Products
Abstract
A microelectromechanical system (MEMS) device comprises a substrate; an anchored end connected to the substrate; a free end comprising an end effector opposite to the anchored end; a spring attached to the end effector; multiple actuation beams; multiple connection beams adapted to connect the multiple actuation beams to one another; and an actuator/sensor comprising a first electrode; a piezoelectric layer over the first electrode; and a set of second electrodes over the piezoelectric layer, wherein the set of second electrodes being defined by a transverse gap therebetween. Each of the multiple actuation beams comprises two sets of the second electrodes. The set of second electrodes comprise an extensional electrode and a contraction electrode. One of the sets of second electrodes is actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane.
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Citations
22 Claims
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1. A microelectromechanical system (MEMS) device comprising:
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a substrate; an anchored end connected to said substrate; a free end positioned opposite to said anchored end; a central gap separating said anchored end from said free end and positioned along a central longitudinal axis of said MEMS device; and multiple actuation beams each having a longitudinal axis positioned transverse to said central longitudinal axis of said central gap and said MEMS device, wherein said multiple actuation beams comprise a first set of multiple actuation beams and a second set of multiple actuation beams positioned on opposite sides of said central gap, wherein said central gap separates said first set of multiple actuation beams from said second set of multiple actuation beams, and wherein each actuation beam comprises; a first electrode; a piezoelectric layer over said first electrode; and multiple sets of second electrodes over said piezoelectric layer, wherein each of said sets of second electrodes being defined by a transverse gap there between, and wherein one of said sets of second electrodes are actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A microelectromechanical system (MEMS) device comprising:
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at least one actuation beam comprising; a continuous lower electrode; a piezoelectric layer over said lower electrode; and at least one pair of upper electrodes over said piezoelectric layer; an anchored end connected to said actuation beam; a free end opposite to said anchored end, wherein said free end comprises an end effector; and a spring member connected to said free end, wherein said spring member does not directly contact said at least one actuation beam, and wherein said spring member flanks lateral sides of said end effector. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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17. A microelectromechanical system (MEMS) device having a first end and a second end, said device comprising:
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a sensor positioned in between said first end and said second end and comprising; a piezoelectric layer; and multiple electrodes sandwiching said piezoelectric layer, said multiple electrodes comprising a continuous first electrode attached to a first side of said piezoelectric layer and at least one pair of second electrodes attached to a second side of said piezoelectric layer, wherein said pair of second electrodes comprises a primary electrode and a secondary electrode defined by a transverse gap therebetween; a substrate anchored to said first end; an end effector attached to said second end; and a spring member attached to lateral sides of said end effector and spaced apart from said sensor, wherein said multiple electrodes are adapted to receive voltage, said voltage causing said end effector to laterally deflect in a geometric plane of said substrate. - View Dependent Claims (18, 19, 20, 21, 22)
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Specification