Double sided probing structures

• US 7,420,381 B2
• Filed: 09/08/2005
• Issued: 09/02/2008
• Est. Priority Date: 09/13/2004
• Status: Expired due to Fees

• Current Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Burcham, Terry, Jones, Rod, McCann, Peter
• Primary Examiner(s): Karlsen; Ernest F.
• Assistant Examiner(s): Chan; Emily Y
• Application Number:
  US11/222,275
• Publication Number:
  US 20060043962A1
• Time in Patent Office: 1,090 Days
• Field of Search: 324754-765
• US Class Current: 324/750.02
• CPC Class Codes: G01R 1/0408 Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets G01R1/067 takes precedence; mass production testing systems G01R31/59; testing of connections G01R31/66; for testing printed circuit boards G01R31/2808
• CPC Class Codes: G01R 1/06705 Apparatus for holding or moving single probes for moving multiple probe heads or ICs under test G01R31/2886
• CPC Class Codes: G01R 31/2806 Apparatus therefor, e.g. test stations, drivers, analysers, conveyors G01R31/2805, G01R31/281, G01R31/2818 take precedence
• CPC Class Codes: G01R 31/2822 of microwave or radiofrequency circuits of attenuation, gain, e.g. using network analyzers G01R27/28
• CPC Class Codes: G01R 35/005 Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references G01R33/0035, G01R35/002 take precedence

Abstract

A test configuration for double sided probing of a device under test includes a holder to secure the device under test in a first orientation, a calibration substrate secured in a second orientation and a probe capable of calibration using the calibration substrate and probing the device under test.

Claims

1. A probing structure comprising:

(a) a holder for supporting a device under test;

(b) a calibration substrate including a calibration structure surface;

(c) a probe element including a contacting portion; and

(d) a probe positioner supporting said probe element, said probe element supportable in a first orientation enabling said contacting portion to engage said calibration structure surface and, alternatively, supportable in a second orientation enabling said contacting portion to engage said device under test, said probe positioner comprising a stand and a pivot block hingedly connected to said stand, said stand comprising an adjustment mechanism enabling translation of said pivot block in at least one direction without movement of said stand, said probe element affixed to said pivot block.

2. A probing structure comprising:

(a) a holder for supporting a device under test;

(b) a calibration substrate including a calibration structure surface;

(c) a probe element including a contacting portion; and

(d) a probe positioner supporting said probe element, said probe element supportable in a first orientation enabling said contacting portion to engage said calibration structure surface and, alternatively, supportable in a second orientation enabling said contacting portion to engage said device under test, said probe positioner comprising a stand and a pivot block hingedly connected to said stand enabling pivoting of said pivot block between a first predefined angular relationship with said stand and a second predefined angular relationship with said stand, said probe element affixed to said pivot block.

3. The probing structure of claim 2 wherein said pivoting of said pivot block is securable in at least one of said first predefined angular relationship and said second predefined angular relationship by a pin engageable simultaneously with said pivot block and said stand.

4. A probe station comprising:

(a) a probe station support;

(b) a holder for supporting a device under test having a first probe pad on a first side and a second probe pad on a second side of said device under test, said holder supporting said device under test on said probe station support such that said first probe pad and said second probe pad are simultaneously accessible for probing;

(c) a calibration substrate including a calibration structure surface, said calibration substrate supported by said probe station support;

(d) a probe element including a contacting portion; and

(e) a probe positioner supporting said probe element on said probe station support, said probe element supportable in a first orientation to said probe station support enabling said contacting portion to engage said first probe pad and movable, without movement of said probe positioner relative to said probe station support, to a second orientation to said probe station support to enable engagement with at least one of said second probe pad and said calibration structure surface.

5. The probe station of claim 4 wherein said first side and said second side of said device under test are arranged substantially normal to said probe station support and said calibration structure surface is arranged substantially parallel to said probe station support.

6. The probe station of claim 4 wherein said first side and said second side of said device under test are arranged substantially parallel to said probe station support and said calibration structure surface is arranged substantially normal to said probe station support.

7. The probe station of claim 4 wherein said first side and said second side of said device under test and said calibration structure surface are arranged substantially parallel to said probe station support.

8. The probe station of claim 4 wherein said first side and said second side of said device under test and said calibration structure surface are arranged substantially normal to said probe station support.

9. The probe station of claim 4 wherein said probe positioner comprises:

(a) a stand supported by said probe station support; and

(b) a pivot block hingedly connected to said stand, said probe element affixed to said pivot block.

10. The probe station of claim 9 wherein said stand comprises an adjustment mechanism enabling translation of said pivot block in at least one direction without movement of said stand on said probe station support.

11. The probe station of claim 9 wherein said hinged connection enables pivoting of said pivot block between a first predefined angular relationship with said probe station support and a second predefined angular relationship with said probe station support.

12. The probe station of claim 11 wherein said pivoting of said pivot block is securable in at least one of said first predefined angular relationship and said second predefined angular relationship by a pin engageable simultaneously with said pivot block and said stand.