Methods of fabricating interferometric modulators by selectively removing a material
First Claim
Patent Images
1. A method for making a MEMS device comprising:
- depositing a material over a first electrode layer;
selectively altering a portion of the material to define a sacrificial portion of the material and a remaining portion of the material;
forming a second electrode layer over the material; and
selectively removing the sacrificial portion of the material to thereby form a cavity and a support structure of the MEMS device, the support structure comprising the remaining portion of the material, the second electrode layer comprising a moveable layer supported by the support structure;
wherein the material is a radiation-sensitive polymer; and
wherein the step of selectively altering a portion of the material comprises irradiating a portion of the radiation-sensitive polymer to thereby form an irradiated portion of the radiation-sensitive polymer and a non-irradiated portion of the radiation-sensitive polymer.
3 Assignments
0 Petitions
Accused Products
Abstract
Methods for making MEMS devices such as interferometric modulators involve selectively removing a sacrificial portion of a material to form an internal cavity, leaving behind a remaining portion of the material to form a post structure. The material may be blanket deposited and selectively altered to define sacrificial portions that are selectively removable relative to the remaining portions. Alternatively, a material layer can be laterally recessed away from openings in a covering layer. These methods may be used to make unreleased and released interferometric modulators.
469 Citations
22 Claims
-
1. A method for making a MEMS device comprising:
-
depositing a material over a first electrode layer; selectively altering a portion of the material to define a sacrificial portion of the material and a remaining portion of the material; forming a second electrode layer over the material; and selectively removing the sacrificial portion of the material to thereby form a cavity and a support structure of the MEMS device, the support structure comprising the remaining portion of the material, the second electrode layer comprising a moveable layer supported by the support structure; wherein the material is a radiation-sensitive polymer; and wherein the step of selectively altering a portion of the material comprises irradiating a portion of the radiation-sensitive polymer to thereby form an irradiated portion of the radiation-sensitive polymer and a non-irradiated portion of the radiation-sensitive polymer. - View Dependent Claims (2, 3, 4, 5, 6, 21, 22)
-
-
7. An unreleased MEMS substrate comprising a material, the MEMS substrate being configured so that a sacrificial portion of the material is removable to form a cavity;
- and the MEMS substrate being further configured so that a remaining portion of the material forms a post structure of an interferometric modulator upon removal of the sacrificial portion, wherein the sacrificial portion of the material is compositionally distinct from the remaining portion of the material; and
wherein the material comprises a polymer and the sacrificial portion of the polymer has a degree of crosslinking that is different from the remaining portion of the polymer. - View Dependent Claims (8, 9, 10, 11, 12)
- and the MEMS substrate being further configured so that a remaining portion of the material forms a post structure of an interferometric modulator upon removal of the sacrificial portion, wherein the sacrificial portion of the material is compositionally distinct from the remaining portion of the material; and
-
13. A method for making an interferometric modulator, the interferometric modulator comprising at least a first mirror, a second mirror separated from the first mirror by a cavity, and a post structure positioned at a side of the cavity and configured to support the second mirror spaced from the first mirror, the method comprising:
-
providing a substrate, the substrate having a first area configured to underlie the first mirror and a second area configured to underlie the post structure; depositing a first mirror layer over at least the first area; depositing a material over the first area and over the second area; selectively altering by irradiation at least one selected from the group consisting of the material over the first area and the material over the second area; and depositing a second mirror layer over at least the material over the first area; the material over the first area being removable to thereby form the cavity and the post structure, where the post structure comprises the material over the second area; wherein the material is a radiation-sensitive polymer. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
-
Specification