Dual membrane single cavity Fabry-Perot MEMS filter

• US 7,420,738 B2
• Filed: 12/22/2003
• Issued: 09/02/2008
• Est. Priority Date: 12/22/2003
• Status: Expired due to Fees

• Current Assignee: Axsun Technologies Incorporated
• Original Assignee: Axsun Technologies Incorporated
• Inventors: Verghese, Paul Mattackal
• Primary Examiner(s): Chang; Audrey Y
• Application Number:
  US10/743,238
• Publication Number:
  US 20050134962A1
• Time in Patent Office: 1,716 Days
• Field of Search: 359/578, 359/379, 359/260, 359/245, 359/577, 359/579, 372/96, 372/45, 735/142.6, 356/506, 356/454, 356/519
• US Class Current: 359/578
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters

Abstract

A dual membrane, single cavity MEMS Fabry-Perot filter has a cavity that is defined between two mirror structures that are located on separate MEMS membranes. This configuration can yield a number of advantages. First, the membranes will be typically subject to the same mechanical vibrations, thus, will vibrate together. This vibration, however, will be rejected as common mode, however. Moreover, since the membranes will move in opposed directions in the gravitational field, the dual membrane device is insulated against passband shifts resulting from changes in orientation in the gravitational field. Finally, since each membrane can now be deflected separately, the scanning range is effectively doubled without increases in the size of the electrostatic cavities.

Claims

1. A single cavity dual membrane Fabry-Perot filter comprising:

a first membrane device comprising;

a first membrane holding a first mirror structure, a first substrate for supporting the first membrane and defining a first electrostatic cavity between the first membrane and the first substrate, an electrostatic voltage between the first membrane and the first substrate causing deflection of the first membrane relative to the first substrate; and

a second membrane device comprising;

a second membrane holding a second mirror structure, which is opposed the first mirror structure, to thereby define a Fabry-Perot cavity between the first mirror structure and the second mirror structure, a second substrate for supporting the second membrane and defining a second electrostatic cavity between the second membrane and the second substrate, an electrostatic voltage between the second membrane and the second substrate causing deflection of the second membrane relative to the second substrate.

2. A Fabry-Perot filter as claimed in claim 1, further comprising a spacer between the first membrane device and the second membrane device for controlling a size of the Fabry-Perot cavity.

3. A Fabry-Perot filter as claimed in claim 1, wherein the first mirror structure and the second mirror structure are flat mirrors.

4. A Fabry-Perot filter as claimed in claim 1, wherein at least one of the first mirror structure and the second mirror structure is curved mirror structure.

5. A Fabry-Perot filter as claimed in claim 1, wherein, the both the first mirror structure and the second mirror structure are curved mirrors.

6. A Fabry-Perot filter as claimed in claim 1, wherein the membrane devices comprise respective substrates, the membranes being deflected by the establishment of electrostatic drive voltages between the substrates and the membranes.

7. A Fabry-Perot filter as claimed in claim 6, further comprising an optical port through at least one of the first substrate and the second substrate.

8. A Fabry-Perot filter as claimed in claim 1, wherein the mirror structures comprise highly reflecting dielectric mirrors.

9. A Fabry-Perot filter as claimed in claim 1, wherein a drive voltage generator establishes a voltage in the first electrostatic cavity and the second electrostatic cavity.

10. A Fabry-Perot filter as claimed in claim 1, wherein a drive voltage generator establishes a drive voltage between the membrane of the first membrane device and the membrane of the second membrane device.

11. A Fabry-Perot filter as claimed in claim 1, wherein first membrane comprises flexures enabling the deflection of the first membrane relative to the first substrate and second membrane comprises flexures enabling the deflection of the second membrane relative to the second substrate.

12. A Fabry-Perot filter as claimed in claim 1, further comprising a first optical port through the first substrate and a second optical port through the second substrate.