Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces

• US 7,422,635 B2
• Filed: 08/28/2003
• Issued: 09/09/2008
• Est. Priority Date: 08/28/2003
• Status: Expired due to Fees

• Current Assignee: Micron Technology, Inc.
• Original Assignee: Micron Technology, Inc.
• Inventors: Kubista, David J., Ping, Er-Xuan, Weimer, Ronald A., Basceri, Cem, Doan, Trung T., Breiner, Lyle D., Zheng, Lingyi A., Beaman, Kevin L.
• Primary Examiner(s): Lund; Jeffrie R
• Application Number:
  US10/652,461
• Publication Number:
  US 20050045102A1
• Time in Patent Office: 1,839 Days
• Field of Search: 118/724, 118/725, 118/715, 156/345.33
• US Class Current: 118/715
• CPC Class Codes: C23C 16/45546 specially adapted for a substrate stack in the ALD reactor
• CPC Class Codes: C23C 16/45578 Elongated nozzles, tubes with holes
• CPC Class Codes: C23C 16/4583 the substrate being supported substantially horizontally

Abstract

The present disclosure suggests several systems and methods for batch processing of microfeature workpieces, e.g., semiconductor wafers or the like. One exemplary implementation provides a method of depositing a reaction product on each of a batch of workpieces positioned in a process chamber in a spaced-apart relationship. A first gas may be delivered to an elongate first delivery conduit that includes a plurality of outlets spaced along a length of the conduit. A first gas flow may be directed by the outlets to flow into at least one of the process spaces between adjacent workpieces along a first vector that is transverse to the direction in which the workpieces are spaced. A second gas may be delivered to an elongate second delivery conduit that also has outlets spaced along its length. A second gas flow of the second gas may be directed by the outlets to flow into the process spaces along a second vector that is transverse to the first direction.

Claims

1. A microfeature workpiece processing system comprising:

a process chamber having a workpiece area adapted to receive a plurality of spaced-apart microfeature workpieces arranged relative to a longitudinal axis of the process chamber;

a first set of injection tubes having three first gas conduits extending longitudinally within the process chamber proximate the workpiece area, each of the first gas conduits having a plurality of first outlets spaced longitudinally along a length of each of the first gas conduits, the first outlets being oriented toward the workpiece area and adapted to direct a first gas flow transverse to the longitudinal axis, wherein the three first gas conduits are equiangularly spaced apart along a periphery of the process chamber and at an angle less than 180 degrees from one another;

a second set of injection tubes having three second gas conduits extending longitudinally within the process chamber proximate the workpiece area, each of the second gas conduits having a plurality of second outlets spaced longitudinally along a length of each of the second gas conduits, the second outlets being oriented toward the workpiece area and adapted to direct a second gas flow transverse to the longitudinal axis, wherein the second gas conduits are equiangularly spaced apart along a periphery of the process chamber and at an angle less than 180 degrees from one another, and wherein each adjacent pair of the first gas conduits is separated by one of the second gas conduits and each adjacent pair of the second gas conduits is separated by one of the first gas conduits;

a first gas supply line adapted to deliver a first gas to the first gas conduit;

a second gas supply line adapted to deliver a second gas to the second gas conduit, the second gas supply line being independent of the first gas supply line and the second gas being different from the first gas; and

a controller operatively coupled to the first gas supply line and the second gas supply line, the controller being programmed to terminate the first gas flow before initiating the second gas flow.

2. The microfeature workpiece processing system of claim 1 wherein the first and second outlets are oriented to direct the first gas flow transverse to the second gas flow.

3. The microfeature workpiece processing system of claim 1 wherein the first outlets are oriented to direct the first gas flow substantially perpendicular to the longitudinal axis of the process chamber.

4. The microfeature workpiece processing system of claim 3 wherein the second outlets are oriented to direct the second gas flow substantially perpendicular to the longitudinal axis of the process chamber.

5. The microfeature workpiece processing system of claim 1 wherein the first outlets are oriented to direct the first gas flow toward centers of the microfeature workpieces.

6. The microfeature workpiece processing system of claim 5 wherein the second outlets are oriented to direct the second gas flow toward centers of the microfeature workpieces.

7. The microfeature workpiece processing system of claim 1 wherein the first gas conduits are substantially parallel to the second gas conduits.

8. The microfeature workpiece processing system of claim 1 further comprising a third gas supply line adapted to deliver a third gas to the process chamber.

9. The microfeature workpiece processing system of claim 1 further comprising a vacuum adapted to exhaust the first gas from the process chamber before the second gas flow is initiated.

10. The microfeature workpiece processing system of claim 1 wherein each pair of the plurality of spaced-apart microfeature workpieces is separated by a process space, and wherein individual first and second outlets generally correspond to each process space to deliver a flow of the first and second gas to each process space, respectively.

11. A microfeature workpiece processing system comprising:

a process chamber adapted to receive a plurality of microfeature workpieces spaced from one another in a first direction to define process spaces between adjacent workpieces;

a first gas supply line;

a second gas supply line;

a first set of injection tubes having three first gas conduits in fluid communication with the first gas supply line and having an outlet length extending in the first direction within the process chamber, each of the first gas conduits having a plurality of first outlets spaced along the outlet length in the first direction, the first outlets being adapted to direct a first gas flow from the first gas supply line transversely into the process spaces, wherein the three first gas conduits are equiangularly spaced apart along a periphery of the process chamber and at an angle less than 180 degrees from one another;

a second set of injection tubes having three second gas conduits in fluid communication with the second gas supply line and having an outlet length extending in the first direction within the process chamber, each of the second gas conduits having a plurality of second outlets spaced along the outlet length in the first direction, the second outlets being adapted to direct a second gas flow from the second gas supply line transversely into the process spaces, wherein the second gas conduits are equiangularly spaced apart along a periphery of the process chamber and at an angle less than 180 degrees from one another, and wherein each adjacent pair of the first gas conduits is separated by one of the second gas conduits and each adjacent pair of the second gas conduits is separated by one of the first gas conduits;

a controller operatively coupled to the first gas supply line and to the second gas supply line and adapted to selectively control the first gas flow and the second gas flow; and

a purge gas supply line adapted to deliver a purge gas to the process chamber;

wherein the controller is programmed to terminate the first gas flow and deliver the purge gas to the process chamber to purge excess first gas from the process chamber before initiating the second gas flow.

12. The microfeature workpiece processing system of claim 11 wherein the first and second outlets are oriented to direct the first gas flow transverse to the second gas flow.

13. The microfeature workpiece processing system of claim 11 wherein the first outlets are oriented to direct the first gas flow toward centers of the microfeature workpieces.

14. The microfeature workpiece processing system of claim 13 wherein the second outlets are oriented to direct the second gas flow toward centers of the microfeature workpieces.

15. The microfeature workpiece processing system of claim 11 wherein the first gas conduits are substantially parallel to the second gas conduits.

16. The microfeature workpiece processing system of claim 11 further comprising a third gas supply line adapted to deliver a third gas to the process chamber.

17. The microfeature workpiece processing system of claim 11 further comprising a vacuum coupled to the controller and adapted to exhaust the first gas from the process chamber before the second gas flow is initiated.