Lithographic apparatus, device manufacturing method, and device manufactured thereby with docking system for positioning a patterning device
First Claim
Patent Images
1. A lithographic apparatus, comprising:
- a substrate holder configured to hold a substrate;
an illuminator configured to condition a beam of radiation;
a support structure configured to support a patterning device that is configured to impart a desired pattern to the beam of radiation, the support structure including a stage;
a projection system configured to project the patterned beam onto a target portion of the substrate; and
a docking system configured to position the patterning device relative to the stage,wherein the lithographic apparatus operates in accordance with an operational cycle comprising (a) a projection phase, in which the projection system projects the patterned beam onto the substrate target portion and the stage carries the patterning device; and
(b) an exchange phase, in which the patterning device is exchanged and the docking system positions the patterning device relative to the stage,wherein the docking system is spaced from the patterning device during the projection phase, andwherein the docking system includes a part coupled to the stage and spaced from the patterning device during the projection phase.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention pertains to a lithographic apparatus that includes a docking system for positioning a patterning device, such as a reticle, relative to the reticle stage. The lithographic projection apparatus has an operational cycle that includes a projection phase, in which the reticle stage carries the patterning device and an exchange phase, in which the patterning device is exchanged and the docking system positions the patterning device relative to the reticle stage. The docking system is configured to be spaced from the patterning device during the projection phase in order to ensure that a higher accuracy of the projected image is obtained.
-
Citations
31 Claims
-
1. A lithographic apparatus, comprising:
-
a substrate holder configured to hold a substrate; an illuminator configured to condition a beam of radiation; a support structure configured to support a patterning device that is configured to impart a desired pattern to the beam of radiation, the support structure including a stage; a projection system configured to project the patterned beam onto a target portion of the substrate; and a docking system configured to position the patterning device relative to the stage, wherein the lithographic apparatus operates in accordance with an operational cycle comprising (a) a projection phase, in which the projection system projects the patterned beam onto the substrate target portion and the stage carries the patterning device; and
(b) an exchange phase, in which the patterning device is exchanged and the docking system positions the patterning device relative to the stage,wherein the docking system is spaced from the patterning device during the projection phase, and wherein the docking system includes a part coupled to the stage and spaced from the patterning device during the projection phase. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A device manufacturing method, comprising:
-
imparting a beam of radiation with a desired pattern in its cross-section, by use of a patterning device that is carried by a stage; projecting the patterned beam of radiation onto a target portion of a substrate during a projection phase; exchanging the patterning device during an exchange phase; and positioning the patterning device relative to the stage via a docking system during the exchange phase, wherein the docking system is spaced from the patterning device during the projection phase, and wherein the docking system includes a part coupled to the stage and spaced from the patterning device during the projection phase. - View Dependent Claims (10)
-
-
11. A lithographic apparatus, comprising:
-
a substrate holder configured to hold a substrate; an illuminator configured to condition a beam of radiation; a support structure configured to support a patterning device that is configured to impart a desired pattern to the beam of radiation, the support structure including a stage; a projection system configured to project the patterned beam onto a target portion of the substrate; and a positioning mechanism configured to position the patterning device relative to the stage, the positioning mechanism including a reticle carrier, wherein the lithographic apparatus operates in accordance with an operational cycle comprising (a) a projection phase, in which the projection system projects the patterned beam onto the substrate target portion and the stage carries the patterning device; and
(b) an exchange phase, in which the patterning device is exchanged and the positioning mechanism positions the patterning device relative to the stage, andwherein the positioning mechanism further includes a coupling mechanism, separate from the patterning device, that is configured to couple the reticle carrier with the stage during the exchange phase. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
-
-
23. A device manufacturing method, comprising:
-
imparting a beam of radiation with a desired pattern in its cross-section by use of a patterning device; projecting the patterned beam of radiation onto a target portion of a substrate during a projection phase, wherein the patterning device is carried by a stage during the projection phase; exchanging the patterning device during an exchange phase; positioning the patterning device relative to the stage via a positioning mechanism during the exchange phase, the positioning mechanism comprising a reticle carrier; and coupling the reticle carrier with the stage during the exchange phase with a coupling mechanism that is separate from the patterning device.
-
-
24. A lithographic apparatus, comprising:
-
a substrate holder configured to hold a substrate; an illuminator configured to condition a beam of radiation; a support structure configured to support a patterning device that is configured to impart a desired pattern onto the beam of radiation, the support structure including a stage; a projection system configured to project the patterned beam onto a target portion of the substrate; a positioning mechanism configured to position the patterning device relative to the stage, the positioning mechanism including a reticle carrier, wherein the lithographic apparatus operates in accordance with an operational cycle comprising;
(a) a projection phase, in which the projection system projects the patterned beam onto the substrate target portion and the stage carries the patterning device; and
(b) an exchange phase, in which the patterning device is exchanged and the positioning mechanism positions the patterning device relative to the stage, the stage being adapted to perform a loading stroke that extends between an operational area for the patterning device and an exchange area for the patterning device; anda position measuring system configured to measure the position of the stage along a general plane defined by the patterning device, the position measuring system comprising a sensor that is configured to measure the position of the stage in a direction substantially perpendicular to a direction of the loading stroke, wherein the exchange area is arranged relative to the operational area such that the sensor is able to measure the position of the stage in the operational area during the projection phase and in the exchange area during the exchange phase. - View Dependent Claims (25, 26)
-
-
27. A lithographic apparatus, comprising:
-
a substrate holder configured to hold a substrate; an illuminator configured to condition a beam of radiation; a support structure configured to support a patterning device that is configured to impart a desired pattern to the beam of radiation, the support structure including a stage; a projection system configured to project the patterned beam onto a target portion of the substrate; a positioning mechanism configured to position the patterning device relative to the stage, the positioning mechanism including a reticle carrier, wherein the lithographic apparatus operates in accordance with an operational cycle comprising;
(a) a projection phase, in which the projection system projects the patterned beam onto the substrate target portion and the stage carries the patterning device; and
(b) an exchange phase, in which the patterning device is exchanged and the positioning mechanism positions the patterning device relative to the stage, the stage being adapted to perform a loading stroke that extends between an operational area for the patterning device and an exchange area for the patterning device; anda position measuring system configured to measure the position of the stage substantially perpendicular to a general plane defined by the patterning device, the measuring system comprising a sensor, and wherein the exchange area is arranged relative to the operational area such that the sensor is able to measure the position of the stage in the operational area during the projection phase and in the exchange area during the exchange phase. - View Dependent Claims (28)
-
-
29. A device manufacturing method, comprising:
-
providing a substrate that is at least partially covered by a layer of radiation-sensitive material; conditioning a beam of radiation; imparting the conditioned beam of radiation with a desired pattern in its cross-section by use of a patterning device; projecting the patterned beam of radiation onto a target portion of the first substrate during a projection phase wherein the patterning device is carried by a stage during the projection phase; exchanging the patterning device during an exchange phase; wherein the stage is adapted to perform a loading stroke during the exchange phase, wherein the loading stroke extends between an operational area for the patterning device and an exchange area for the patterning device during the exchange phase, wherein the position of the stage along a general plane defined by the patterning device is measured via a position measuring system that comprises a sensor that measures the position of the stage in a direction substantially perpendicular to the direction of the loading stroke, and wherein the exchange area is arranged relative to the operational area such that the sensor is able to measure the position of the stage in the operational area during the projection phase and in the exchange area during the exchange phase.
-
-
30. A device manufacturing method, comprising:
-
providing a substrate that is at least partially covered by a layer of radiation-sensitive material; imparting a beam of radiation with a desired pattern in its cross-section by use of a patterning device; projecting the patterned beam of radiation onto a target portion of the first substrate during the projection phase wherein the pattering device is carried by a stage during the projection phase; exchanging the patterning device during an exchange phase; wherein the stage is adapted to perform a loading stroke during the exchange phase, wherein the loading stroke extends between an operational area for the patterning device and an exchange area for the patterning device, wherein the position of the stage substantially perpendicular to a general plane defined by the patterning device is measured via a position measuring system that comprises a sensor, and wherein the exchange area is arranged relative to the operational area such that the sensor is able to measure the position of the stage in the operational area during the projection phase and in the exchange area during the exchange phase. - View Dependent Claims (31)
-
Specification