Device and method for stacked multi-level uncoupled electrostatic actuators
First Claim
Patent Images
1. A multi-level decoupled micro-actuator device for a micro-mirror having multiple axes, using micro electro-mechanical systems (MEMS)-on-MEMS stacking technology, said device comprising:
- a first level substrate having at least one first level bottom electrode on its upper side;
a second level frame stacked on said first level substrate, said second level frame having a first deformable element rotatable about the x-axis, said first deformable element comprising;
at least one counter electrode on its lower side corresponding to, and oppositely charged to, said at least one first level bottom electrode; and
at least one second level bottom electrode on its upper side; and
a third level frame stacked on said first deformable element, said third level frame comprising a second deformable element rotatable about the y-axis, said second deformable element comprising;
at least one counter electrode on its lower side corresponding to, and oppositely charged to, said at least one second level bottom electrode;
said first deformable element being driven by said at least one first level bottom electrode,said second deformable element being driven by said at least one second level bottom electrode,such that there is no coupling between said rotation of said first and second deformable elements, respectively, about said x-axis and about said y-axis.
1 Assignment
0 Petitions
Accused Products
Abstract
A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).
-
Citations
17 Claims
-
1. A multi-level decoupled micro-actuator device for a micro-mirror having multiple axes, using micro electro-mechanical systems (MEMS)-on-MEMS stacking technology, said device comprising:
-
a first level substrate having at least one first level bottom electrode on its upper side; a second level frame stacked on said first level substrate, said second level frame having a first deformable element rotatable about the x-axis, said first deformable element comprising; at least one counter electrode on its lower side corresponding to, and oppositely charged to, said at least one first level bottom electrode; and at least one second level bottom electrode on its upper side; and a third level frame stacked on said first deformable element, said third level frame comprising a second deformable element rotatable about the y-axis, said second deformable element comprising; at least one counter electrode on its lower side corresponding to, and oppositely charged to, said at least one second level bottom electrode; said first deformable element being driven by said at least one first level bottom electrode, said second deformable element being driven by said at least one second level bottom electrode, such that there is no coupling between said rotation of said first and second deformable elements, respectively, about said x-axis and about said y-axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
-
-
17. A method for a multi-level decoupled micro-actuator device for a micro-mirror device having multi axes, using micro electro-mechanical systems (MEMS)-on-MEMS stacking technology, the method comprising:
-
providing a first level substrate comprising at least one first level bottom electrode; providing a second level frame stacked on said first level substrate comprising a first deformable element rotatable about the x-axis, said first deformable element comprising; at least one counter electrode on its lower side corresponding to, and oppositely charged to, said at least one first level bottom electrode; and at least one second level bottom electrode on its upper side, that drives a second deformable element rotatable about the y-axis; and providing a third level frame stacked on said first deformable element, said third level frame comprising said second deformable element rotatable about the y-axis, said first deformable element being driven by said at least one first level bottom electrode, such that there is no coupling between said rotation about said x-axis and said rotation about said y-axis.
-
Specification
-
- Resources
Litigation Campaign Assessment
Thank you for your request. You will receive a custom alert email when the Litigation Campaign Assessment is available.
×
-
Current AssigneeTECHNION RESEARCH AND DEVELOPMENT FOUNDATION, LTD. (Technion-Israel Institute Of Technology)
-
Original AssigneeTECHNION RESEARCH AND DEVELOPMENT FOUNDATION, LTD. (Technion-Israel Institute Of Technology)
-
InventorsNemirovsky, Yael, Bochobza-Degani, Ofir, Elata, David
-
Primary Examiner(s)Amari; Alessandro
-
Application NumberUS10/545,949Publication NumberTime in Patent Office1,668 DaysField of Search359/201, 359/202, 359/212, 359/224, 359/225, 359/290, 359/291, 359/295, 359/849US Class Current359/224.1CPC Class CodesB81B 2201/042 Micromirrors, not used as o...B81B 2203/058 Rotation out of a plane par...B81B 3/0062 Devices moving in two or mo...B81C 2201/019 Bonding or gluing multiple ...G01J 2005/0077 ImagingG01J 5/20 using resistors, thermistor...G02B 26/0841 the reflecting element bein...H01L 27/1203 the substrate comprising an...H01L 27/14669 Infrared imagersH02N 1/006 of the gap-closing type H02...
