Method and device for packaging a substrate
First Claim
Patent Images
1. A display device comprising an array of movable mirrors configured to interferometrically modulate light, the display device comprising:
- a transparent substrate;
an interferometric modulator comprising the array of movable mirrors, wherein said interfereometric modulator is configured to modulate light transmitted through said transparent substrate, anda thin film backplane sealing said array of movable mirrors within a package between said transparent substrate and said thin film backplane, wherein a gap exists between said array of movable mirrors and said thin film backplane.
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Abstract
A package structure and method of packaging for an interferometric modulator. A thin film material is deposited over an interferometric modulator and transparent substrate to encapsulate the interferometric modulator. A gap or cavity between the interferometric modulator and the thin film provides a space in which mechanical parts of the interferometric modulator may move. The gap is created by removal of a sacrificial layer that is deposited over the interferometric modulator.
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Citations
33 Claims
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1. A display device comprising an array of movable mirrors configured to interferometrically modulate light, the display device comprising:
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a transparent substrate; an interferometric modulator comprising the array of movable mirrors, wherein said interfereometric modulator is configured to modulate light transmitted through said transparent substrate, and a thin film backplane sealing said array of movable mirrors within a package between said transparent substrate and said thin film backplane, wherein a gap exists between said array of movable mirrors and said thin film backplane. - View Dependent Claims (2, 3, 4, 5, 33)
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6. A method of manufacturing a display comprising an array of movable mirrors configured to interferometrically modulate light, the method comprising:
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providing a transparent substrate; forming an interferometric modulator on the transparent substrate, and wherein said interferometric modulator comprises the array of movable mirrors; and depositing a thin film backplane over the array of movable mirrors and the transparent substrate to seal said array of movable mirrors between said transparent substrate and said thin film backplane, wherein a gap exist between said array of movable mirrors and said thin film backplane. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 31, 32)
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15. A microelectromechanical systems display device comprising an array of movable mirrors configured to interferometrically modulate light, the microelectromechanical systems display device comprising:
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a transparent substrate; an interferometric modulator formed on the transparent substrate, the interferometric modulators comprising the array of movable mirrors; and a thin film backplane sealed to the transparent substrate to encapsulate the array of movable mirrors between the transparent substrate and the thin film backplane, wherein a cavity exists between the array of movable mirrors and the thin film backplane. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23)
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24. A display device comprising an array of moveable mirrors configured to interferometrically modulate light, the display device comprising:
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a transparent substrate; an interferometric modulator comprising the array of movable mirrors, wherein said interferometric modulator is configured to modulate light transmitted through the transparent substrate, and wherein said interferometric modulator is formed on the transparent substrate, a thin film backplane deposited over the array of movable mirrors, wherein the thin film backplane seals the array of movable mirrors within a package between the transparent substrate and the thin film backplane; and a cavity between the array of moveable mirrors and the thin film backplane, wherein the cavity is formed by removing a sacrificial material. - View Dependent Claims (25, 26, 27)
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28. A display device comprising an array of movable mirrors configured to interferometrically modulate light, the display device comprising:
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a transmitting means for transmitting light therethrough; a modulating means configured to modulating light transmitted through the transmitting means, wherein the modulating means comprises an interferometric modulator, wherein said interferometric modulator comprises the array of movable mirrors; and a sealing means for sealing the array of movable mirrors within a package between the transmitting means and the sealing means, wherein the sealing means comprises a thin film, and wherein a cavity exists between the array of movable mirrors and the sealing means. - View Dependent Claims (29, 30)
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Specification