Integrated circuit porphyrin-based optical Fabry-Perot chemical sensor
First Claim
1. A sensing method comprising the steps of:
- providing a Fabry-Perot cavity, including a pair of partially transmissive, partially reflective, surfaces wherein a first of said surfaces is flexibly suspended adjacent and parallel to a second of said surfaces so that a gap exists therebetween;
providing a source of variable electrostatic potential for providing a selected electrostatic potential between said first and second surfaces so that said gap is adjustable;
providing a translucent chemical layer on said flexibly suspended first surface outside of said gap;
providing a photosensor attached to said second surface outside of said gap; and
providing a source of light, said light for irradiating said photosensor through said chemical layer and said first and second surfaces wherein said light is also partially reflected between said surfaces;
providing a sensing environment wherein an agent undergoes a reaction with said chemical layer and a reference environment wherein said reaction does not occur;
measuring a change in spectrum of an output of said photosensor between said sensing environment and said reference environment; and
measuring a change in spectral intensity of said output of said photosensor between said sensing environment and said reference environment;
wherein said gap and said light are selected to provide a desired output of said photosensor.
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Accused Products
Abstract
A Fabry-Perot cavity has a pair of partially transmissive, partially reflective, surfaces. A first of the surfaces is flexibly suspended adjacent and parallel to a second of the surfaces. A gap exists between the surfaces. A variable electrostatic potential permits this gap to be adjusted. A translucent chemical layer is disposed on the first surface. A photosensor is attached to the second surface. Light irradiates the photosensor through the chemical layer and the first and second surfaces wherein the light is also partially reflected between the surfaces. A sensing environment is provided wherein an agent undergoes a reaction with the chemical layer as well as an environment wherein the reaction does not occur. The output of the photosensor is measured to assess a change in spectrum and spectral intensity for each of the sensing environments. The gap between the surfaces as well as the light used are selected to provide an optimum photosensor output.
26 Citations
19 Claims
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1. A sensing method comprising the steps of:
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providing a Fabry-Perot cavity, including a pair of partially transmissive, partially reflective, surfaces wherein a first of said surfaces is flexibly suspended adjacent and parallel to a second of said surfaces so that a gap exists therebetween; providing a source of variable electrostatic potential for providing a selected electrostatic potential between said first and second surfaces so that said gap is adjustable; providing a translucent chemical layer on said flexibly suspended first surface outside of said gap; providing a photosensor attached to said second surface outside of said gap; and providing a source of light, said light for irradiating said photosensor through said chemical layer and said first and second surfaces wherein said light is also partially reflected between said surfaces; providing a sensing environment wherein an agent undergoes a reaction with said chemical layer and a reference environment wherein said reaction does not occur; measuring a change in spectrum of an output of said photosensor between said sensing environment and said reference environment; and measuring a change in spectral intensity of said output of said photosensor between said sensing environment and said reference environment; wherein said gap and said light are selected to provide a desired output of said photosensor. - View Dependent Claims (2)
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3. A sensing method comprising the steps of:
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providing a Fabry-Perot cavity, including a pair of partially transmissive, partially reflective, surfaces wherein a first of said surfaces is flexibly suspended adjacent and parallel to a second of said surfaces so that a gap exists therebetween; providing a source of variable electrostatic potential for providing a selected electrostatic potential between said first and second surfaces so that said gap is adjustable; providing a translucent porphyrin layer on said flexibly suspended first surface outside of said gap; providing a photosensor attached to said second surface outside of said gap; and providing a source of light, said light for irradiating said photosensor through said porphyrin layer and said first and second surfaces wherein said light is also partially reflected between said surfaces; providing a sensing environment wherein an agent undergoes a reaction with said porphyrin and a reference environment wherein said reaction does not occur; measuring a change in spectrum of an output of said photosensor between said sensing environment and said reference environment; and measuring a change in spectral intensity of said output of said photosensor between said sensing environment and said reference environment; wherein said gap and said light are selected to provide a desired output of said photo sensor. - View Dependent Claims (4, 5, 6, 7, 8, 9)
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10. An optical chemical sensor comprising:
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a Fabry-Perot cavity, wherein the Fabry-Perot cavity comprises first and second partially transmissive, partially reflective, surfaces wherein the first surface is flexibly suspended adjacent and parallel to the second surface so that a gap exists therebetween; a source of variable electrostatic potential configured to provide a selected electrostatic potential between said first and second surfaces so that said gap is adjustable; a translucent chemical layer on said first surface outside of said gap; a photosensor attached to said second surface outside of said gap; and a source of light, said light source configured to irradiate said photosensor through said chemical layer and said first and second surfaces wherein said light is also partially reflected between said surfaces. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification