Method of fabricating a multi-post structures on a substrate
First Claim
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1. A method of forming a post structure assembly, comprising:
- bonding a first substrate to a second substrate, wherein the bonding is achieved without a bonding layer;
patterning the second substrate, wherein the patterning leaves a first portion of material of the second substrate and a second portion of material of the second substrate and removes material between the first and second portions of the second substrate, the first potion forming a plurality of structures and the second portion forming an assembly that is a unitary structure having a plurality of apertures therein; and
separating the second portion of the second substrate from the first substrate, wherein the second portion does not include the structures.
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Abstract
Micromechanical devices having complex multilayer structures and techniques for forming the devices are described.
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Citations
18 Claims
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1. A method of forming a post structure assembly, comprising:
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bonding a first substrate to a second substrate, wherein the bonding is achieved without a bonding layer; patterning the second substrate, wherein the patterning leaves a first portion of material of the second substrate and a second portion of material of the second substrate and removes material between the first and second portions of the second substrate, the first potion forming a plurality of structures and the second portion forming an assembly that is a unitary structure having a plurality of apertures therein; and separating the second portion of the second substrate from the first substrate, wherein the second portion does not include the structures. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification