Exposure apparatus and exposure method
First Claim
1. An exposure apparatus measuring a surface position of an object to be exposed mounted on a stage and exposing a surface of the object in a state that the object surface is coincided with a base plane set at a desired position, comprising:
- a unit measuring the surface position of the object at least more than two points within an exposure area;
a unit calculating a distance between the base plane and the object surface and a leveling value of the object surface relative to the base plane in a plurality of exposure areas arranged on the object based on a result of the measurement by the measuring unit;
a unit storing the calculated distance and the calculated leveling value in association with position information of the exposure area performed the calculation on the object surface;
a unit determining existence or nonexistence of an exposure abnormality based on the associated information and predetermined abnormal determination criteria; and
a unit identifying a kind of the exposure abnormality, in case that the determining unit determines that the exposure abnormality exists, at least based on the number of the exposure areas where the exposure abnormality is occurred and distribution of the exposure areas where the exposure abnormality is occurred on the object surface.
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Accused Products
Abstract
According to an exposure apparatus and an exposure method in the present invention, based on a focus value and a leveling value in each exposure shot calculated based on measurements by a focus sensor, differential absolute value for respective value are calculated. The differential absolute values for the focus values and leveling vaule are compared with predetermined threshold vaule for the respective differential absolute values. When the differential absolute values exceed the threshold value, it is determined that an exposure abnormality exists. In such case, based at least the number of exposure area where the exposure abnormality is occurred and distribution of the exposure area where the exposure abnormality is occurred on the object to be exposed, a kind of the exposure abnormality is identifed. The detection of the exposure abnormality is assured, and a cause of the abnormality is determined without lowering manufacturing capabilities and increasing in cost.
7 Citations
22 Claims
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1. An exposure apparatus measuring a surface position of an object to be exposed mounted on a stage and exposing a surface of the object in a state that the object surface is coincided with a base plane set at a desired position, comprising:
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a unit measuring the surface position of the object at least more than two points within an exposure area; a unit calculating a distance between the base plane and the object surface and a leveling value of the object surface relative to the base plane in a plurality of exposure areas arranged on the object based on a result of the measurement by the measuring unit; a unit storing the calculated distance and the calculated leveling value in association with position information of the exposure area performed the calculation on the object surface; a unit determining existence or nonexistence of an exposure abnormality based on the associated information and predetermined abnormal determination criteria; and a unit identifying a kind of the exposure abnormality, in case that the determining unit determines that the exposure abnormality exists, at least based on the number of the exposure areas where the exposure abnormality is occurred and distribution of the exposure areas where the exposure abnormality is occurred on the object surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An exposure method measuring a surface position of an object to be exposed mounted on a stage and exposing a surface of the object in a state that the object surface is coincided with a base plane set at a desired position, comprising the steps of:
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measuring the surface position of the object at least more than two points within an exposure area; calculating a distance between the base plane and the object surface and a leveling value of the object surface relative to the base plane in a plurality of exposure areas arranged on the object based on a result of the measurement; associating the calculated distance and the calculated leveling value with position information of the exposure area performed the calculation on the object surface; determining existence or nonexistence of an exposure abnormality based on the associated information and predetermined abnormal determination criteria; and identifying a kind of the exposure abnormality, in case that the exposure abnormality is determined as existing, at least based on the number of the exposure areas where the exposure abnormality is occurred and distribution of the exposure areas where the exposure abnormality is occurred on the object surface. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification