Chip-scale optical spectrum analyzers with enhanced resolution

• US 7,426,040 B2
• Filed: 08/19/2005
• Issued: 09/16/2008
• Est. Priority Date: 08/19/2004
• Status: Active Grant

• Current Assignee: University Of Pittsburgh (University of Pittsburgh of The Commonwealth System of Higher Education)
• Original Assignee: University Of Pittsburgh (University of Pittsburgh of The Commonwealth System of Higher Education)
• Inventors: Sun, Zhijun, Jung, Yun Suk, Kim, Hong Koo
• Primary Examiner(s): Connolly; Patrick
• Assistant Examiner(s): Richey; Scott M
• Application Number:
  US11/206,900
• Publication Number:
  US 20060209413A1
• Time in Patent Office: 1,124 Days
• Field of Search: 356/519, 356/521, 356/454, 356/480, 977/932, 977949-951
• US Class Current: 356/519
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G01J 2003/1213 Filters in general, e.g. dichroic, band
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0224 using polarising or depolarising elements
• CPC Class Codes: G01J 3/0229 using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
• CPC Class Codes: G01J 3/0259 Monolithic
• CPC Class Codes: G01J 3/1804 Plane gratings
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 3/2803 using photoelectric array detector
• CPC Class Codes: G01J 3/2823 Imaging spectrometer
• CPC Class Codes: G01J 4/04 Polarimeters using electric detection means G01J4/02 takes precedence
• CPC Class Codes: G01N 2021/6439 with indicators, stains, dyes, tags, labels, marks
• CPC Class Codes: G01N 21/6452 Individual samples arranged in a regular 2D-array, e.g. multiwell plates
• CPC Class Codes: G02B 5/1857 using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
• CPC Class Codes: G02B 5/284 of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices
• CPC Class Codes: Y10S 977/932 for electronic or optoelectronic application

Abstract

A Fabry-Perot cavity filter includes a first mirror and a second mirror. A gap between the first and the second mirror monotonically varies as a function of width of the filter. This filter may be used with photodetector and a channel selection filter in an optical device, such as a spectrum analyzer. The channel selection filter may be a metal nanooptic filter array which includes plurality of subwavelength apertures in a metal film or between metal islands.

Claims

1. A device comprising:

a Fabry-Perot cavity filter comprising a first mirror and a second mirror, wherein a gap between the first and the second mirror monotonically varies as a function of width of the filter; and

a channel selection filter comprising a metal nanooptic filter array based on plasmon resonance,

wherein the channel selection filter has a wider wavelength passband width than the Fabry-Perot cavity filter and

wherein the metal nanooptic filter array comprises a plurality of subwavelength apertures in a metal film or between metal islands, such that a distance between the apertures in different regions of the metal nanooptic filter array is different.

2. The device of claim 1, wherein the first mirror is tilted with respect to the second mirror such that the gap varies in a continuous fashion along the width of the filter.

3. The device of claim 1, wherein the first mirror and the second mirror comprise flat mirrors.

4. The device of claim 1, wherein:

the gap comprises an air filled gap; and

the first mirror is tilted with respect to the second mirror such that the gap between the first and the second mirror monotonically varies.

5. The device of claim 1, wherein:

a tapered spacer material is located in the gap; and

the first and the second mirrors contact the tapered spacer material such that the gap between the first and the second mirror monotonically varies.

6. The device of claim 1, further comprising a photodetector, wherein a first photodetector pixel is adapted to detect radiation from the Fabry-Perot cavity filter position having a first gap height and a second photodetector pixel is adapted to detect radiation from the Fabry-Perot cavity filter position having a second gap height different from the first gap height.

18. The device of claim 1, wherein the metal nanooptic filter array comprises a metal film.

20. The device of claim 1, wherein the metal nanooptic filter array comprises metal islands.

7. A device, comprising:

a Fabry-Perot cavity filter comprising a first mirror and a second mirror wherein a gap between the first and the second mirror is variable; and

a photodetector array, wherein a first photodetector pixel is adapted to detect radiation from the Fabry-Perot cavity filter position having a first gap height and a second photodetector pixel is adapted to detect radiation from the Fabry-Perot cavity filter position having a second gap height different from the first gap height;

a channel selection filter array positioned such that only one peak from the Fabry-Perot cavity filter is incident on each pixel of the photodetector array;

wherein the channel selection filter comprises a metal nanooptic filter array based on plasmon resonance;

wherein the channel selection filter has a wider wavelength passband width than the Fabry-Perot cavity filter; and

wherein the metal nanooptic filter array comprises a plurality of subwavelength apertures in a metal film or between metal islands, such that a distance between the apertures in different regions of the metal nanooptic filter array is different.

8. The device of claim 7, wherein:

the photodetector array comprises a plurality of pixels; and

each detector pixel is adapted to detect radiation from a different Fabry-Perot cavity filter position having different gap height.

9. The device of claim 7, wherein:

the channel selection filter is positioned between the photodetector array and the Fabry-Perot cavity filter.

10. The device of claim 7, wherein:

the first mirror is tilted with respect to the second mirror such that the gap varies in a continuous fashion as a function of width of the Fabry-Perot cavity filter; and

the first mirror and the second mirror comprise flat mirrors.

11. The device of claim 7, wherein the device comprises a color camera, a spectrum analyzer, a monochromator or an optical analyte detection system.

19. The device of claim 7, wherein the metal nanooptic filter array comprises a metal film.

21. The device of claim 7, wherein the metal nanooptic filter array comprises metal islands.

12. An optical filtering method, comprising:

passing incident radiation through a Fabry-Perot cavity filter comprising a first mirror and a second mirror, wherein a gap between the first and the second mirror monotonically varies as a function of width of the filter;

passing the incident radiation through a channel selection filter such that only one peak from the incident radiation that passes through Fabry-Perot cavity filter is incident on each pixel of a photodetector;

wherein the channel selection filter comprises a metal nanooptic filter array which comprises a plurality of subwavelength apertures in a metal film or between metal islands, such that a distance between the apertures in different regions of the metal nanooptic filter array is different; and

wherein the incident radiation is filtered by the channel selection filter based on plasmon resonance between the incident radiation and the metal film or metal islands of the channel selection filter.

13. The method of claim 12, wherein the first mirror is tilted with respect to the second mirror such that the gap varies in a continuous fashion along the width of the filter.

14. The method of claim 12, wherein the channel selection filter has a wider wavelength passband width than the Fabry-Perot cavity filter.

15. The method of claim 12, further comprising:

detecting radiation from the Fabry-Perot cavity filter position having a first gap height at a first photodetector pixel; and

detecting radiation from the Fabry-Perot cavity filter position having a second gap height different from the first gap height at a second photodetector pixel.

16. The method of claim 12, wherein the method comprises a spectrum analysis method, a color image formation method, a wavelength separation method or an optical analyte detection method.

17. The method of claim 12, wherein the incident radiation first passes through the Fabry-Perot filter and then through channel selection filter.

22. The method of claim 12, wherein the metal nanooptic filter array comprises a metal film.

23. The method of claim 12, wherein the metal nanooptic filter array comprises metal islands.

24. The method of claim 12, wherein at each location on the metal nanooptic filter array and on the Fabry-Perot cavity filter corresponding to one photodetector pixel, the Fabry-Perot cavity filter passes a set of wavelength peaks and the metal nanooptic filter array passes a wavelength band that overlaps with only one of the Fabry-Perot wavelength peaks.