Film-bulk acoustic wave resonator with motion plate and method
First Claim
1. A method for utilizing a film-bulk acoustic resonator with a motion plate to detect a change in a target environmental variable, the method comprising:
- providing a film-bulk acoustic resonator (FBAR) on a first wafer, said FBAR comprising at least one resonant property;
providing the motion plate spaced from the FBAR such that a capacitive connection is formed between the motion plate and the FBAR and such that changes in the capacitance between the motion plate and the FBAR cause a change in the resonant property of the FBAR; and
detecting a change in the target environmental variable by employing the FBAR and motion plate to detect a change in the resonant property of the FBAR.
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Abstract
An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.
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Citations
19 Claims
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1. A method for utilizing a film-bulk acoustic resonator with a motion plate to detect a change in a target environmental variable, the method comprising:
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providing a film-bulk acoustic resonator (FBAR) on a first wafer, said FBAR comprising at least one resonant property; providing the motion plate spaced from the FBAR such that a capacitive connection is formed between the motion plate and the FBAR and such that changes in the capacitance between the motion plate and the FBAR cause a change in the resonant property of the FBAR; and detecting a change in the target environmental variable by employing the FBAR and motion plate to detect a change in the resonant property of the FBAR. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A target environmental variable detection apparatus comprising:
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a first film-bulk acoustic resonator (FBAR) that includes a FBAR wafer; an acoustic reflector formed in the FBAR wafer that includes a surface; a first electrode formed on the surface of the acoustic reflector; wherein the first electrode includes a surface; a piezoelectric layer formed on the surface of the first electrode; wherein the piezoelectric layer includes a surface; a second electrode formed on the surface of the piezoelectric layer; and a motion plate spaced from the first FBAR; wherein the motion plate is capacitively coupled to the first FBAR. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification