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Film-bulk acoustic wave resonator with motion plate and method

  • US 7,427,819 B2
  • Filed: 03/04/2005
  • Issued: 09/23/2008
  • Est. Priority Date: 03/04/2005
  • Status: Active Grant
First Claim
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1. A method for utilizing a film-bulk acoustic resonator with a motion plate to detect a change in a target environmental variable, the method comprising:

  • providing a film-bulk acoustic resonator (FBAR) on a first wafer, said FBAR comprising at least one resonant property;

    providing the motion plate spaced from the FBAR such that a capacitive connection is formed between the motion plate and the FBAR and such that changes in the capacitance between the motion plate and the FBAR cause a change in the resonant property of the FBAR; and

    detecting a change in the target environmental variable by employing the FBAR and motion plate to detect a change in the resonant property of the FBAR.

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