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Piezoelectric device and method for producing same

  • US 7,427,824 B2
  • Filed: 07/06/2007
  • Issued: 09/23/2008
  • Est. Priority Date: 06/16/2005
  • Status: Active Grant
First Claim
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1. A piezoelectric device comprising:

  • an elemental substrate including a piezoelectric element and a conductive pattern electrically connected to the piezoelectric element disposed on at least one main surface of the elemental substrate;

    an insulating member disposed on the main surface side of the elemental substrate and surrounding the piezoelectric element leaving a space around the piezoelectric element; and

    an internal conductor disposed in the insulating member so as to be connected to the conductive pattern, and extending so as to be spaced apart from the elemental substrate;

    whereinthe internal conductor includes an expanded portion expanding in a direction intersecting a wiring direction of the internal conductor or a detour portion that deviates from the wiring direction; and

    the expanded portion or the detour portion crosses a boundary of a sealed space formed around the piezoelectric element when viewed from the direction normal to the main surface of the elemental substrate.

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