Piezoelectric device and method for producing same
First Claim
1. A piezoelectric device comprising:
- an elemental substrate including a piezoelectric element and a conductive pattern electrically connected to the piezoelectric element disposed on at least one main surface of the elemental substrate;
an insulating member disposed on the main surface side of the elemental substrate and surrounding the piezoelectric element leaving a space around the piezoelectric element; and
an internal conductor disposed in the insulating member so as to be connected to the conductive pattern, and extending so as to be spaced apart from the elemental substrate;
whereinthe internal conductor includes an expanded portion expanding in a direction intersecting a wiring direction of the internal conductor or a detour portion that deviates from the wiring direction; and
the expanded portion or the detour portion crosses a boundary of a sealed space formed around the piezoelectric element when viewed from the direction normal to the main surface of the elemental substrate.
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Accused Products
Abstract
A piezoelectric device ensures resistance to molding without an increase in costs and includes an elemental substrate having a piezoelectric element and a conductive pattern electrically connected to the piezoelectric element; and insulating members disposed on the elemental substrate and surrounding the piezoelectric element leaving a space around the piezoelectric element. The insulating members have an internal conductor connected to the conductive pattern and extending apart from the elemental substrate. The internal conductor has expanded portions expanding in a direction intersecting the wiring direction of the internal conductor or a detour portion deviating from the wiring direction. The expanded portions or the detour portion crosses the boundary of a sealed space formed around the piezoelectric element.
99 Citations
16 Claims
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1. A piezoelectric device comprising:
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an elemental substrate including a piezoelectric element and a conductive pattern electrically connected to the piezoelectric element disposed on at least one main surface of the elemental substrate; an insulating member disposed on the main surface side of the elemental substrate and surrounding the piezoelectric element leaving a space around the piezoelectric element; and an internal conductor disposed in the insulating member so as to be connected to the conductive pattern, and extending so as to be spaced apart from the elemental substrate;
whereinthe internal conductor includes an expanded portion expanding in a direction intersecting a wiring direction of the internal conductor or a detour portion that deviates from the wiring direction; and the expanded portion or the detour portion crosses a boundary of a sealed space formed around the piezoelectric element when viewed from the direction normal to the main surface of the elemental substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification