Micro-optical sensor system for pressure, acceleration, and pressure gradient measurements
First Claim
1. A micro-optical sensor system for pressure, acceleration, and pressure-gradient measurements, comprising:
- at least one sensor including;
at least one substrate having a first and a second surface and a substrate material between said first and second surfaces,at least a pair of fiber guides formed in said substrate material extending therethrough between said first and second surfaces,a diaphragm layer formed on said first surface of said at least one substrate, andat least a pair of optical fibers received in said at least a pair of fiber guides, each of said at least a pair of optical fibers having a fiber tip displaced from said diaphragm layer by a predetermined distance, thereby forming a sensing interferometer having a Fabry-Perot cavity defined between said fiber tip and said diaphragm layer, said fiber tip and said diaphragm layer being optically reflective to form a pair of reflective surfaces of said sensing interferometer; and
at least a further sensor including;
a further substrate having a first and a second surface and a substrate material between said first and second surfaces of said further substrate, said further substrate being attached by said second surface thereof to said diaphragm layer of said at least one substrate,another diaphragm layer formed on said first surface of said further substrate, andat least one fiber guide formed in said further substrate in alignment with one of said at least a pair of said fiber guides of said at least one substrate, wherein one of said pair of said optical fibers is received in said at least one fiber guide formed in said further substrate through said one of said at least a pair of said fiber guides of said at least one substrate; and
a data acquisition and processing unit coupled to said at least a pair of optical fibers for calculating an acoustic/vibration parameter to be measured.
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Abstract
A micro-optical fiber tip based sensor system for pressure, acceleration, and pressure gradient measurements in a wide bandwidth, the design of which allows for multiplexity of the input side of the system is based on micro-electromechanical fabrication techniques. The optical portion of the system is based on low coherence fiber-optic interferometry techniques which has a sensor Fabry-Perot interferometer and a read-out interferometer combination that allows a high dynamic range and low sensitivity to the wavelength fluctuation of the light source. A phase modulation and demodulation scheme takes advantage of the Integrated Optical Circuit phase modulator and multi-step phase-stepping algorithm for providing high frequency and real time phase signal demodulation. The system includes fiber tip based Fabry-Perot sensors each of which has a diaphragm that is used as a transducer.
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Citations
16 Claims
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1. A micro-optical sensor system for pressure, acceleration, and pressure-gradient measurements, comprising:
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at least one sensor including; at least one substrate having a first and a second surface and a substrate material between said first and second surfaces, at least a pair of fiber guides formed in said substrate material extending therethrough between said first and second surfaces, a diaphragm layer formed on said first surface of said at least one substrate, and at least a pair of optical fibers received in said at least a pair of fiber guides, each of said at least a pair of optical fibers having a fiber tip displaced from said diaphragm layer by a predetermined distance, thereby forming a sensing interferometer having a Fabry-Perot cavity defined between said fiber tip and said diaphragm layer, said fiber tip and said diaphragm layer being optically reflective to form a pair of reflective surfaces of said sensing interferometer; and at least a further sensor including; a further substrate having a first and a second surface and a substrate material between said first and second surfaces of said further substrate, said further substrate being attached by said second surface thereof to said diaphragm layer of said at least one substrate, another diaphragm layer formed on said first surface of said further substrate, and at least one fiber guide formed in said further substrate in alignment with one of said at least a pair of said fiber guides of said at least one substrate, wherein one of said pair of said optical fibers is received in said at least one fiber guide formed in said further substrate through said one of said at least a pair of said fiber guides of said at least one substrate; and a data acquisition and processing unit coupled to said at least a pair of optical fibers for calculating an acoustic/vibration parameter to be measured. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of fabricating a micro-optical sensor system for acoustic and vibration measurements, comprising the steps of:
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forming a first thin diaphragm layer on a first surface of a first substrate, patterning said first substrate to form at least a first fiber guide therein; and inserting a first optical fiber in said at least a first fiber guide; patterning said first substrate to farm at least a second fiber guide therein, forming a second thin diaphragm layer on a first surface of at least a second substrate; patterning said at least a second substrate to form at least a third fiber guide therein, attaching said at least second substrate by a second surface thereof to said first diaphragm layer formed on said first substrate, aligning said at least a third fiber guide with said at least a first fiber guide, inserting said first optical fiber in said at least the third fiber guide through said at least the first fiber guide, positioning a fiber tip of said first optical fiber a first predetermined distance from said second diaphragm layer to form a first sensing interferometer having a Fabry-Perot cavity defined between said fiber tip and said first diaphragm layer, said fiber tip and said first diaphragm layer being formed optically reflective to form a pair of reflective surfaces of said first sensing interferometer, inserting a second optical fiber in said at least a second fiber guide, and positioning a fiber tip of said second optical fiber a second predetermined distance from said first diaphragm layer to form a second sensing interferometer having a Fabry-Perot cavity defined between said fiber tip of said second optical fiber and said first diaphragm layer. - View Dependent Claims (13, 14, 15)
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16. A method of fabricating a micro-optical sensor system of multiple pressure measurements, comprising the steps of:
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patterning a plurality of substrates to form fiber guides therein, forming a diaphragm layer on each of said plurality of the substrates, stacking said substrates together to form a single multiple-sensor unit, wherein predetermined fiber guides are aligned each to the other, inserting optical fibers in said fiber guides, positioning a fiber tip of each of said optical fiber a predetermined distance from a respective diaphragm layer, thus forming a plurality of sensing interferometers having a Fabry-Perot cavity defined between each said fiber tip and said respective diaphragm layer, and coupling a data acquisition and processing unit to said optical fibers for calculating acoustic parameters to be measured, said acoustic parameters comprising parameters from a group of acoustic parameters consisting of acoustic pressure, pressure gradient, deflection of a respective diaphragm layer, excitation acceleration, air particle velocity, and acoustic intensity.
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Specification