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Methods and apparatus for rinsing and drying

  • US 7,429,537 B2
  • Filed: 12/02/2005
  • Issued: 09/30/2008
  • Est. Priority Date: 01/22/1999
  • Status: Expired due to Term
First Claim
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1. A method for rinsing and drying a workpiece, comprising:

  • placing the workpiece into a chamber;

    spinning the workpiece about a spin axis;

    applying a rinsing fluid onto the workpiece from a first opening through a first wall of the chamber, and with a first opening fixed in place and substantially aligned on the spin axis, with the rinsing fluid moving outwardly towards the edge of the workpiece via centrifugal force, to rinse the workpiece;

    applying a drying fluid onto the workpiece from the first opening, with the drying fluid moving outwardly towards the edge of the workpiece via centrifugal force, to dry the workpiece.

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