Excitation in micromechanical devices
First Claim
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1. A micromechanical device comprising:
- a resonant structure comprising a beam; and
at least one mass attached to the beam; and
an excitation component configured to excite motion of the resonant structure;
wherein the resonant structure is configured to have a predominantly rotational excitation mode defined in an excitation plane in response to the resonant structure being excited, and the at least one mass includes a suitable geometry that prevents any principal axis of a rotational inertia tensor of the resonant structure from being normal to the excitation plane.
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Abstract
A resonant structure for a micromechanical device includes a beam and at least one mass attached to the beam. The resonant structure is arranged to have a predominantly rotational excitation mode and an excitation plane in which motion of the excited resonant structure predominantly takes place, the at least one mass including a geometry such that none of the principal axes of the rotational inertia tensor of the resonant structure are normal to the excitation plane.
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Citations
14 Claims
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1. A micromechanical device comprising:
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a resonant structure comprising a beam; and
at least one mass attached to the beam; andan excitation component configured to excite motion of the resonant structure; wherein the resonant structure is configured to have a predominantly rotational excitation mode defined in an excitation plane in response to the resonant structure being excited, and the at least one mass includes a suitable geometry that prevents any principal axis of a rotational inertia tensor of the resonant structure from being normal to the excitation plane. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 11, 13)
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10. A method of exciting a resonant structure in an excitation plane in a micromechanical device, the method comprising:
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providing a resonant structure including at least one mass with a suitable geometry that prevents any principal axis of a rotational inertia tensor of the resonant structure from being normal to the excitation plane; and exciting motion of the resonant structure in a direction normal to the excitation plane. - View Dependent Claims (12, 14)
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Specification